Modular F.R.L. Units

Port size Center of F.R.L. body E F F E E B C Cross spacer E D A F: Without thread Model 1 E (Port size) A B C D Applicable model Y14-M5-A M5 23 16 14 25 AC10l-A Y24-l01-A 1/8 40 40 22 40 AC20l-B Y24-l02-A 1/4 Y34-l01-A 1/8 49 43 28 48 AC25l-B, AC30l-B Y34-l02-A 1/4 Y44-l02-A 1/4 60 48 36 54 AC40l-B Y44-l03-A 3/8 Y54-l03-A 3/8 72 62 40 62 AC40l-06-B Y54-l04-A 1/2 Caution on Mounting 1.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

" 15.2 39.7 18.5 18.5 28.2 8 15.2 76 49.5 47 12.9 45.1 35.2 28.2 9.5 23 1.5 49.3 R1/4 19 54.8 AS331F-02-10ST AS231F-N02-11ST 3/8" 17.9 20.2 43.7 21 21 32.6 10 18.5 80 53.9 48 47.9 38.7 31 16.2 23 AS331F-02-12ST AS331F-N02-07ST 17 1/4" 13.2 44.9 22 34.4 12 20.9 82 55.7 73 46.9 38.7 25.6 12.9 20.6 AS331F-03-06ST AS331F-N02-09ST 23 NPT1/4 19 1.5 49.3 9.5 5/16" 15.2 18.5 38.5 17 25.2 6 12.8 78

Table of Contents

Assuming the attachment material is aluminium alloy (relative density=2.7), r1= 16.4 (mm).

CNG

NDH10 MM MM MM NDH10 MM L L R1 R1 R1 R R R1 R R E1 E1 E1 E1 U1 NX NX A1 U1 A1 L1 U1 A1 NX U1 A1 L1 NX L1 NZ A L1 A NZ A A ND Part no. Applicable bore size (mm) A A1 E1 L1 MM U1 NX NZ L Applicable A Applicable bore size (mm) MM R1 U1 NDH10 NX R1 R Part no. R pin part no.

VFS

VVFS5000-22A-1 VVFS5000-22A-2 VFS5410-D VFS5410-E Applicable valve model Check valve Cylinder side pressure VFS5400-F Solenoid one side energized A B R2 R1 R2 R1 R2 R1 320 or less 320 or less P Leakage (cm3/min) P Solenoid both sides de-energized Piston SUP side pressure (P1) 0 SUP side pressure P1 (MPa) Supply pressure: 0.5 MPa Operating range Caution Double check spacer In the case of

SYJ3000/5000/7000

P R2 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (WO): SYJ3140-WO-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5

SY

Dimension L 44 45 46 47 48 49 50 51 52 53 54 No. 648 660.5 673 685.5 698 710.5 723 735.5 748 760.5 773 Connector manufacturer examples Hirose Electric Company Sumitomo/3-M Limited Fujitsu, Ltd. Japan Aviation Electronics Industry, Ltd. J.S.T. Mfg. Co., Ltd.

Air Cylinder

Applicable bore size (mm) A A1 E1 L1 MM R1 U1 ND NX NZ L Included pin part no.

Table of Contents

/4 R3/8 R1/2 Flow valve: Series ASQ Model Model Applicable tubing O.D.

Modular F.R.L. Unit

AC10A G27-10-R1 G27-10-R1 AD17 Y100 AC30A G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38NNote 7) AC20A G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 Y200 AC40A-06 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 7) AC40A G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 7) Model Description Round 1.0MPa Note 1) Note 2) Square embedded type Accessories Pressure gauge Note 3) Round 0.2MPa

CV/MVGQ

Material: Free cutting sulfur steel Applicable bore size (mm) 40 50, 63 80 100 A A1 R1 U1 E1 L1 MM NX NDH10 Part no.

CV/MVGQ

Material: Free cutting sulfur steel Applicable bore size (mm) 40 50, 63 80 100 A A1 R1 U1 E1 L1 MM NX NDH10 Part no.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

CE-compliant EX122-SDN1 EX122-SCS1 EX122-SCS2 EX122-SMJ1 Q R1 R2 V F1 H J1 J2 X90 Main valve fluoro rubber (Refer to page 332.)

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For the auto switch mounting position and its mounting height, refer to page 7-6-48.

smcmaintenancepartslist

How to Order N M X0 149 FND100 10 Nominal filtration rating Seal material Material t Symbol 149 149 m Nominal filtration rating Symbol N V NBR FKM 150 Element type Type 188 Symbol M Gold mesh Port size r Symbol 10 R1 Port size OUT IN Note Replacement Parts Specifications FND100V-10-M149X0 Model FND100N-10-M149X0 R1 Stainless steel 304 No. Description Element Material Kit No.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

4/5 Port Air Operated Valve Series SYJA3000

SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

4/5 Port Air Operated Valve SYJA3000 Series

)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) 5 3 position pressure center 3 position closed center 3 position exhaust center 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) How to Order Manifold Base 3 position pressure center 2(B) (A)4 Same manifolds as SYJ5000 series are prepared.