V

-01 1.5 0.08 1.4 0.5 0.3 (6A) VX312(0/2/4)-01 2.2 0.16 2.8 0.3 0.2 VX313(0/2/4)-01 3 0.24 4.3 Water 1 0.6 VX311(0/2/4)-02 1.5 0.08 1.4 0.5 0.3 VX312(0/2/4)-02 2.2 0.16 2.8 Oil 0.6 VX3224-02 2.2 0.19 3.4 1 VX3324-02 2.2 0.19 3.4 Air 0.3 0.2 VX313(0/2/4)-02 3 0.24 4.3 1/4 2 0.3 VX3234-02 3 0.33 6 (8A) 0.6 VX3334-02 3 0.33 6 0.15 VX3244-02 4 0.5 9 Steam 0.3 VX3344-02 4 0.5 9 0.6 VX3224-03

15

(Recommended height 5 mm) LEC Y Motorless Motorless Dimensions [mm] Stroke L A B n D E 50 238 56 180 4 100 288 106 230 4 150 338 156 280 4 200 388 206 330 6 2 300 250 438 256 380 6 2 300 300 488 306 430 6 2 300 350 538 356 480 8 3 450 400 588 406 530 8 3 450 450 638 456 580 8 3 450 500 688 506 630 10 4 600 550 738 556 680 10 4 600 600 788 606 730 10 4 600 650 838 656 780 12 5 750 700

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Slider Type Ball Screw Drive/11-LEFS Series

L4 [mm] L4 1000 1000 1000 1000 X Motorless 500 500 500 500 LAT 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 LC3F2 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6

SMC Electronic Switch Series Variations

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

Title not found

4 d.!

Title not found

4 mv30m onv 5 lnpul code 4 only 6 Outsut code 0 only 7 OuFtn code 2 or 3 only I No pressure disply I StGighl connectors 10 4-bii input gjves 16 pressur presels 11 1O{rl parallel inpui 12 Not ava|hble wrlh preset inM lype 13 100"1 ouFut at 0% input; 0% odput al 100% input 14 lllPa dispaly units only 15 Pod size 2 (1/4")only 16 Right angle L cable not availabl 17 Not availabh with monilor oulput

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Weight (g) LEC S LEC SS-T D-M9P(V) D-M9B(V) D-M9N(V) Auto switch model 0.5 m (Nil) 8 7 LEC Y 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 Motorless 5 m (Z) 68 63 LAT Dimensions LZ (mm) D-M9 D-M9V LC3F2 M2.5 x 4 L M2.5 x 4 L Indicator light Slotted set screw Slotted set screw 8 Indicator light 2 3.2 4.6 2.6 4 2.8 2.7 2.7 20 2.8 4 22 3.2 2.6 9.5 Most sensitive position 6 4 6 Most sensitive

ITVH

(Error number 5) Vs : Power supply 24 VDC A : Input signal 4 to 20 mA DC 0 to 20 mA DC Vs : Power supply 24 VDC Vin : Input signal 0 to 5 VDC 0 to 10 VDC 4 points preset input type Brown Blue S1 White Vs Black S2 Vs: Power supply 24 VDC (Negative common) One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2.

Solid State Vacuum Regulator

input type Power supply Input signal GND (COMMON) Monitor output 1 2 3 4 1 2 3 4 Power supply Input signal 1 GND (COMMON) Input signal 2 Brown Brown Brown White White Blue Blue Blue S1 White Vs Black Black Black S2 Note) A right angle type cable is also available.

LEJ-OM004xx

Contents Safety Instructions. 2 1.Outline of clean room specification. 4 1.1 Grease used . 4 1.2 Recommended tube diameter. 4 2.Raising dust characteristic . 4 2.1 Recommended tube diameter. 4 2.2 Amount of vacuum aspiration . 5 3.How to Order . 6 4.Construction. 7 1 11-LEJ Series / Slider type Safety Instructions These safety instructions are intended to prevent hazardous situations and

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

164.5 170 180 230 251 15 15 15 20 22 22 8 3 , , 8 3 4 1 2 1 Bracket dimensions E D C B A Model Port size 4 3 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 , 87.5 125 4 3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

Dedicated Controller Series LC1 Uniaxial Type

ALARM (24) Alarm output 2 NO.1 12 General-purpose input NO.2 COM (12, 25) Common The output terminal common. 3 < 1 > NO.3 13 NO.4 4 NO.5 14 5 NO.0 15 6 NO.1 16 < 2 > 7 NO.2 17 General-purpose output 8 NO.3 18 9 NO.4 19 10 NO.5 20 57 Series LC1 Series LC1 Timing for temporary stop during operation Timing for READY signal generation immediately after turning on power HOLD ON OFF ON OFF Power

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Note 4) M5 fittings for M5 thread are attached without being incorporated.

Table of Contents

4 !

42

box are 3/8". 504 Base Mounted Plug-in Unit VQ5000 Series Bottom ported drawing SV 2 x G3/4 Conduit port SYJ 144.5 143 112.5 83.5 55.5 M5 x 0.8 Ground screw 1/2" 4(A), 2(B) port 106 61 SZ 9 9 VF VP4 34.5 34 n 12 X VQ 1/2 U side A 4 B 2 VQ 4/5 VQ 4/5 6 B A VQC 1/2 B 2 A 4 3/8" Note) 5 B A VQC 4/5 B 2 A 4 VQZ 4 SMC SMC SMC SMC B A L2 L1 58.5 P = 41 SQ A 4 B 2 3 B A VFS B 2 A 4 VFR 2 B A VQ7

LEC-OM02704CN

414-40 4.1 43 4.2 46 4.3 47 4.3.1 47 4.3.2 48 4.3.3 CNP1CNP2CNP3 4-10 4.4 4-17 4.5 () 4-18 4.5.1 4-18 4.5.2 4-21 4.5.3 4-22 4.6 () 4-22 4.6.1 / 4-22 4.6.2 4-23 4.6.3 4-26 4.7 4-27 4.8 4-28 4.8.1 4-28 4.8.2 4-29 4.8.3 4-31 4.9 4-32 4.10 4-33 4.10.1 4-33 4.10.2 4-34 4.11 4-35 4.11.1 4-35 4.11.2 4-36 4.11.3 (LE--) 4-39 4.12 4-40 2 - 5 515

Battery-less

4 Top side parallel motor type: LEYG16E Top side parallel motor type, With lock/motor cover $4 @4 @5 $1 @4 @3 $3 In-line motor type, With lock/motor cover In-line motor type @5 @4 @3 #7 #8 @5 $1 $2 @4 @3 #9$0 !

VQ7-6/7-8

1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 3/8, 1/2, 3/4 R1, R2 port P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-25 26 Series VQ7-8 Construction DIN Terminal Type Metal seal Rubber seal type VQ7-8-FG-SVQ7-8-FG-S-R !

•

e J1IS1Jr1aces, 15 105 tID 115 Same surface) With I pL 41 11 5+40~ With n pes. 2 15+40(1\ 2 2) 105 + 40[0 2 4) 110+40!n 2 (" 2. 4. 6. 8 ..) (" = 4. 8. 12. ' 6 ..) (" =4. 8. ' 2. '6.. ) (" = 4. 8. ' 2. ' 6 .. ) With 2 pes tDrtterent slIriaces, 90 80 85 '0 Same surface), Wilh 1 pc. D-M90V D-M90WV 80 + 3O4\ 10+ 30[; 2) 8S+30~ 90+30~ 2 2 (n::: 2, 4, 6, 8) WiIh n pcs (n = 4, 8, 12, 18 ..)