High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

OMR0031

The setting range is 1 to 400 mm/s. The speed can be entered when the [Speed Entry Method] has been selected in the [Step Data Input Method] in the Basic Parameter Set up window. The Speed can be set in increments of 1 mm/s. f) Accel Set the acceleration required to reach from stop to [Speed]. The setting range is 1 to 60,000 mm/s2.

e-Rodless Actuator

Operating cylinder E-MY2H25-500 Set speed 400 mm/s Note) 1. Horizontal mounting 2. Wall mounting Set acceleration degree a 4.9 m/s2 Note) y z Mounting orientation Wall mounting Wb: MGGLB25-200 (4.35 kg) x y E-MY2H25-500TAN x z 3.

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: A (Size 40: 16mm, Size 63: 20mm, Size 100: 25mm), Stroke: 400mm

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 400mm, Motor Option: -, Cover: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Connector: -, Option: -

V100

Lubrication Manual override Shock/Vibration resistance (2) Enclosure Non-locking push type 150/50 m/s2 Dustproof Note 1) Based on dynamic performance test, JIS B 8374-1981.

25

Nil P NPN PNP Bar length (mm) 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 With 2 pcs. 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 Since input/output function cannot be used, specify Nil when the AC adapter is being used.

3 Port Air Operated Valve Series SYJA300 1

Impact/Vibration resistance (m/s2) Note) 150/50 Enclosure Dustproof Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal ON and OFF.

Magnetically Coupled Rodless Cylinder

, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact SMC if the maximum stroke will be exceeded.

AC Servo Motor Driver (CC-Link Type)

The highest value in the past 15 seconds is displayed relative to the rated torque of 100%. 0 to 400 % 14 Instantaneous torque Torque that occurred instantaneously is displayed. The value of the torque that occurred is displayed in real time relative to the rated torque of 100%. 0 to 400 % 15 Within one-revolution position Position within one-revolution is displayed in encoder pulses.

Vacuum

Material N N B R S Silicone rubber u urethane rubber F Fluorine rubber GN Conductive NBR (s2-o 16) GS Conductive silicone (s2-o16) Material N N B R s silicone rubber u _ urethane rubber F Ftuorine rubber GN Conductive NBR (o2-o16\ GS Conductive silicone (@2-@'16) Pad type (application: Refer to list O) U Flat type c Ftat with rib D Deep type B Bellows type Pad type U Flat type c _ Flat vYith

Vacuum

Material N N B R S Silicone rubber u urethane rubber F Fluorine rubber GN Conductive NBR (s2-o 16) GS Conductive silicone (s2-o16) Material N N B R s silicone rubber u _ urethane rubber F Ftuorine rubber GN Conductive NBR (o2-o16\ GS Conductive silicone (@2-@'16) Pad type (application: Refer to list O) U Flat type c Ftat with rib D Deep type B Bellows type Pad type U Flat type c _ Flat vYith

42

Bore size CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] Series 40 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQ4100--03 VQ4101--03 1100 1000 900 800 700 600 500 400 300 200 100 0 VQ5100--04 VQ5101--04 Values at extension

CY1F

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

S1 S2 Effective area ratio 2.3 : 1 Pressure loss: Large K M 3 Without nozzle 3 H Pressure Loss of Air Gun Only Effective area (mm2) Upstream side S1: 15 Nozzle side S2: 6.4 D S1 : S2 = 2.3 : 1 Effective area ratio Nozzle size (mm) Number of nozzles Supply pressure Regulator pressure Outlet pressure Pressure loss 3 MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

LEF-OM007xx

S2 100 to 120VAC LECSA1 A1 100 to 120VAC LECSA1 A1 Right side R Right side R A1,A2 A1,A2 32 200 S3 32 200 S3 200 to 230VAC LECSA2 A2 200 to 230VAC LECSA2 A2 Both side D Both side D 40 400 S4 40 400 S4 100 to 120VAC 100 to 120VAC LECSB1 LECSB1 B1 B1 25 100 S6 25 100 S6 Motor option 32 200 S7 AC servo motor (Absolute encoder 32 200 S7 AC servo motor (Absolute encoder LECSB2 LECSB2 200 to 230VAC

SYJ3000/5000/7000

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

VQZ1000/2000/3000

Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VQZ2121-C6 800 700 600 500 400 300 200 100 0 VQZ3121-C6 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being