VQC

Single mounting screw, clamp construction Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 Replaceable One-touch fittings R1 A P B R2 Model A side B side JIS symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve Wiring 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2

15

EC ED Section XX2 XB (R2) XAH9 Section Y details XA [mm] LEYGlL (Ball bushing bearing) [mm] LEYGlM (Sliding bearing) * Refer to page 872 for the dimensions of motor flange.

5 Port Solenoid Valve, Series VQC

Single mounting screw, clamp construction Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 Replaceable One-touch fittings R1 A P B R2 Model A side B side JIS symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve Wiring 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2

VF1000-OMP0001

(EXH1) R1 R2 (B)2 4(A) (B)2 4(A) (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 3(R2) 1(P) 5(R1) JIS () Z (B)2 (A)4 1:P 2:B 3:R2 4:A 5:R1 1:P(SUP) 2:B(CYL.1) 3:R2(EXH.1) 4:A(CYL.2) 5:R1(EXH.2) 1:P 4:A 2:B 5:R1 3:R2 EZTZDZLZMZ DC24V ) 8 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 (VF1000/3000 (VF1000/3000 (VF1000/3000 (VF1000/3000 ) ) ) ) PE 1) 1) 1) 1) 2) 2

,

) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage other than above (50VDC or less) Indicator light with surge voltage suppressor 9 Z A02 VS1 01 Sub-plate Thread

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage other than above (50VDC or less) Indicator light with surge voltage suppressor 9 Z A02 VS1 01 Sub-plate Thread

,

) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage other than above (50VDC or less) Indicator light with surge voltage suppressor 9 Z A02 VS1 01 Sub-plate Thread

VK3000

Construction Symbol (B) 2 (A) 4 5 (R1) 1 (P) 3 (R2) Component Parts No.

Refrigerated Air Dryer

Large size IDFAF Series Outlet air pressure dew point Page Model Rated inlet condition Air flow capacity (m3/h [ANR]) Port size IDFA100F-38 960 R2 40C IDFA125F-38 10C 1210 R2 1/2 0.7 MPa IDFA150F-38 1500 DIN flange 80 P. 98 to 100 IDFA100F-40 860 R2 35C IDFA125F-40 3C 1100 R2 1/2 0.7 MPa IDFA150F-40 1340 DIN flange 80 3.

SY

F1 Uni-wire (16 outputs) S Internal pilot/Built-in silencer External pilot/Built-in silencer Note 1) For "J2" and "R2" SI units with 8 outputs, up to 8 solenoids are applicable. Note 2) Includes the number of blanking plate assemblies. Note 3) Two stations are required for valves other than single solenoid, because they are dual body type.

SV

SI unit Master unit Remote I/O unit Remote I/O unit SDA SDB RDA RDB SG FG SDA SDB RDA RDB SG FG SDA SDB RDA RDB SG FG S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

Series SV

General purpose Each T unit has 32 control points. 16 outputs 24VDC 10% External power supply A, B, D, E, F1, G, J1, J2, K, R1, R2, H, U, V Current consumption (Inside unit) 0.1A 0.3A C, Q SI manifold solenoid valve T unit OB unit SI unit SI unit Master unit Remote I/O unit Remote I/O unit S1 S2 SG S1 S2 R1 R2 SG FG 24V 0V S1 S2 R1 R2 SG FG 24V 0V S1 S2 R1 R2 SG FG SDA SDB RDA RDB SG FG

Table of Contents

-6 = 9.0 x 10-6 (kgm2) Moment of inertia around Z axis IA = IZ1 + m1r12 X 10-6 z r2 Z2 B part r2 = 47(mm) Calculation of weight m2 = d x e x f x Specific gravity m2 = 5 x 10 x 12 x 2.7 x 10-6 = 0.002 (kg) Moment of inertia around Z2 axis IZ2 = {m2 (d2 + e2)/12} x 10-6 IZ2 = {0.002 x (52 + 102)/12} x 10-6 = 0.02 x 10-6 (kgm2) IB = 0.02 x 10-6 + 0.002 x 472 x 10-6 = 4.4 x 10-6 (kgm2) I =

KB

T Connecting thread KBB1-M5 KBB1-M6 KBB3-R1 KBB4-R2 Rc(PT)1 4 Rc(PT)1 8 M6 X 1 M5 X 0.8 T Connecting thread Part No.

KJ

26.5 25.0 D MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T Elbow Socket Module: KBV H (width across flats) T Connection thread M5 x 0.8 M6 x 1 M5 x 0.8 M6 x 1 A Weight (g) VMG L3 L4 L2 D1 D2 D3 L1 Model KBV1-M5 KBV1-M6 KBV2-M5 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2

Table of Contents

26.5 25.0 D MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T Elbow Socket Module: KBV H (width across flats) T Connection thread M5 x 0.8 M6 x 1 M5 x 0.8 M6 x 1 A Weight (g) VMG L3 L4 L2 D1 D2 D3 L1 Model KBV1-M5 KBV1-M6 KBV2-M5 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2

Series KC Self-seal Fittings

T Connecting thread KBB1-M5 KBB1-M6 KBB3-R1 KBB4-R2 Rc(PT) 1 4 T Connecting thread Part No.

IDX-OM-U022

[IDFA125F-38/40] () (10 2m) (100.7m) 20 4x R2 1/2 R2 1/2 1130 78 9351 267 1120 655 75 64 (17 ) 40 1276 1375 R ) (14~18) () P.1-5 P.1-5 P.1-5 7122 20 350 700 752 IDFA100F150F 6 4 6.3 IDX-OM-U022 6.

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

76

Signal cable outlet (Electric wire diameter 0.67 (17) or less) Grommet with membrane Power cable holder (Electric wire diameter 0.71 (18) to 0.91 (23) Drain tube for drain pan of condensed water Ventilation air inlet (with dustproof filter) Top view 4 x 0.79 (20) 27.6 (700) 0.039 (1) 4.21 (107) 28.0 (712) 0.079 (2) 13.2 (335) 0.79 (20) Air inlet R2 18.1 (460) 10.5 (267) Air inlet R2 5 Refrigerated