Modular F.R.L. Units

Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40-A AFD40-A P1=0.5 MPa P1=0.3 MPa 0.04 0.04 P1=0.7 MPa P1=0.3 MPa P1=0.7 MPa P1=0.5 MPa 0.03 0.03 Pressure drop [MPa] Pressure drop [MPa] 0.02 0.02 P1=0.5 MPa P1=0.5 MPa P1=0.3 MPa P1=0.3 MPa P1=0.7 MPa 0.01 0.01 P1=0.7 MPa 0 0 0 0 100 200 300 500 400 600 200 800 1000 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 57 Mist Separator

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

CL

A R1 Part No.

VQ7-6/7-8

(initial value) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 2 Series VQ7-6 DIN Connector Type 2 position/Single : VQ7-6-FG-S Single (reverse pressure): VQ7-6-YZ-S 50 68.5 52 120.5 68.5 120.5 2-6.5 Mounting hole 50 25 25 42.5 42.5 13 (port A) 13 (port B) 3-Rc3/8 (R1, R2) Manual override R1 R2 P B A 14 50 62 11 9 12 38 50 62 13 A B R1 R2 P 2-Rc1/8 13 34 Indicator

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note No

CJ5-S

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 + 0.4 + 0.2 0.2 0.4 8 + 0.058 0 + 0.058 0 + 0.058 0 + 0.070 0 + 0.070 0 + 0.084 0 + 0.058 0 + 0.058 0 I-G02SUS Y-G02SUS 20 20 16 8 8 8 34 8.5 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS + 0.4 + 0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25, 32 20 10 10 10 10 41 10.5 30 M10 x 1.25

CJ5-S

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 + 0.4 + 0.2 0.2 0.4 8 + 0.058 0 + 0.058 0 + 0.058 0 + 0.070 0 + 0.070 0 + 0.084 0 + 0.058 0 + 0.058 0 20 I-G02SUS Y-G02SUS 20 16 8 8 8 34 8.5 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS + 0.4 + 0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25, 32 20 10 10 10 10 41 10.5 30 M10 x 1.25

Fieldbus System

) 3 (R2) 1 (P) 3 (R2) 5 (R1) 1 (P) N.C.

7.4

S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.

IDX-OM-W032

R1-1/2 R2 10mm 1 2 54kg 62kg 100kg 116kg 1ANR 2065% 2 3 30mA 4() 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDFA Series 6-1 6 1 IDX-OM-W032 6 6-3 IDFA22EIDFA37E IDFA55EIDFA75E mm A B C D E F G K L M N P Q R IDFA22E R1 290 775 623 134 405 698 93 13 314 85 600 340 IDFA37E R1-1/2 855 680

Vacuum System Peripherals:

(VJA314) Attachment Body ported individual interface ZX1-R1 Blanking plate assembly ZX1-BM1 Note) Low wattage type is 12, 24 VDC. Air operated valve is controlled by external 3 port valve. External release is done directly from external 2 port valve.

IDX-OM-W094

mm 600 mm 600 mm 600 mm 600 mm z z z 3.2.2 z z 7 7.3 z IDF-AB500 14 1 IDFA60/70/80/90 Series 3-2 IDX-OM-W094 3.2.3 z z z z z 60 z 65 65 z z z z z z z OUT IN (IN) (OUT) IN OUT IDFA60/70/80/90 Series 3-3 IDX-OM-W094 3.2.4 z 12mm 5m8mm z z z z SO O S IDFA60/70/80/90 Series 3-4 IDX-OM-W094 3.2.5 7.1 0.2m IDFA60-23 IDFA70-23 IDFA80-23 IDFA90-23 16AWG (1.25mm

IDX-OM-W093

mm 600 mm 600 mm 600 mm 600 mm 3.2.2 7 7.3 IDF-AB500 14 1 IDF60/70/80/90 Series 3-2 IDX-OM-W093 3.2.3 60 65 65 IN OUT (OUT) (IN) IN OUT IDF60/70/80/90 Series 3-3 IDX-OM-W093 3.2.4 12mm 5m8mm SO O S IDF60/70/80/90 Series 3-4 IDX-OM-W093 3.2.5 7.1 0.2m IDF60-20 IDF70-20 IDF80-20 IDF90-20 2) 12AWG (3.5mm 2) 10AWG (5.5mm 2) 16AWG (1.25mm 911 mm 1823 mm IDF60-30 IDF70-30 IDF80

IDX-OM-U010

Necessary maintenance space Front: 600 mm Back: 600 mm Top: 600 mm Right side: 600 mm Left side: 600 mm Avoid locations where the ventilation grille is obstructed. Avoid locations where the air dryer will draw in high-temperature air discharged from an air compressor or other dryer.

IDX-OM-W095

mm 600 mm 600 mm 600 mm 600 mm 3.2.2 7 7.3 IDF-AB500 14 1 IDFC60/70/80/90 Series 3-2 IDX-OM-W095 3.2.3 60 80 80 IN OUT (IN) (OUT) IN OUT IDFC60/70/80/90 Series 3-3 IDX-OM-W095 3.2.4 12mm 5m8mm SO O S IDFC60/70/80/90 Series 3-4 IDX-OM-W095 3.2.5 7.1 0.2m IDFC60-23 IDFC70-23 IDFC80-23 IDFC90-23 16AWG (1.25mm 2) 14AWG (2.0mm 2) 911 mm 1823 mm IDFC60-23 IDFC70-23 IDFC80-23

IDX-OM-V020

Necessary maintenance space Front: 600 mm Back: 600 mm Top: 600 mm Right side: 600 mm Left side: 600 mm Avoid locations where the ventilation grille is obstructed. Avoid locations where the air dryer will draw in high-temperature air discharged from an air compressor or other dryer. Avoid pneumatic circuits where rapid pressure fluctuations or flow speed changes are generated.

CG5-S

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 +0.4 +0.2 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.058 0 +0.058 0 0.2 0.4 8 20 20 I-G02SUS Y-G02SUS 8 8 8 34 8.5 16 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS +0.4 +0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25,32 10 10 10 10 41 10.5 20 30 M10 x 1.25 12.8 14 41 10.5

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

Series VQ Metal Seal/Rubber Seal Body Ported

controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 4.5 (0.25) VQ1000 (Metal seal) 6 6.3 (0.35) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CJ2 Pressure 0.5MPa Load

MB

150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 80 1400 Symbol Specifications 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 -XA 100 1500 Change of rod end shape 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 C95 -XB5 Oversized rod cylinder 125 1500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600