1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SET POS. 53 127 43 63 VX3 (Max. 50) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112

LVQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 17-5-84 Fitting Assembly Procedure Assemble fittings following

Series KC Self-seal Fittings

L1 D L2 A Rc(PT)1 8 KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 28.0 33.5 38.5 39.0 13.6 17.6 25.2 27.0 17.8 28.5 33.8 57.1 14 17 19 24 11.0 14.0 17.0 20.0 25.0 30.0 34.5 35.0 3 8 Rc(PT)1 4 Rc(PT) Rc(PT) 1 2 85 Series KB Piping Module 3 Other Piping Material Nipple: KBN Weight (g) L A D Part No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3

XM, XY

part XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Metal seal)<83> 300 (Lead wire length) VS 54<55> Indicator light 80 (Rubber seal)<81> 60<61> Indicator light VS7 54<59> 49<52.5> R1 R2 R1 R2 P P 81<82> 75<76> Cover diameter 1.5 Cross section 0.23mm2 < >: AC < >: AC 1.12-37 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ1000 Grommet(G): VQZ125 (R)lGl01 2 position double 0 1 23.4Mounting holes 300 95 (Lead wire length) 47.5 18 7.2 7.2 3 R3

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

0.23mm2 < >: AC 61.5 54 3 4 5 36 0 1 M plug connector (M): VQZ2 2 (R)wMwC4, C6, M5 37.5 <42.5> 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23mm2 73.5 160 135.5 <137.5> 61.5 <62.5> Indicator light < >: AC 1.12-14 VQZ1000/2000/3000 Body Ported VQZ3000 2 position single 0 1 Grommet (G): VQZ312 (R)wGwC6, C8, C10, 02 300 (Lead wire length) 19 95 58 24.5Mounting holes 24.4 9 9 R3

VCHN

How to Order VCHN 06 3 Option Port size Nil None Symbol VCHN4 VCHN3 Port size F With freeze reduction 06 10 12 14 R3/4 Symbol R1 Body size R11/4 3 4 R11/2 608 5.0 MPa Silencer Series VCHN Specifications Model VCHNF4 VCHN4 VCHNF3 VCHN3 Fluid Air, Insert gas Max. operating pressure (MPa) 5.0 (Solenoid valve inlet pressure) Relief valve unlocking pressure (MPa) 1.8 R3/4 R1 R3/4 R1 R1 R11/4 R11

Pallet Lock Cylinder W-R1/W-R3 Series

Pallet Lock Cylinder W-R1/W-R3 Series How to Order W R1 S2 Type 1 B W R3 S B Type 3 Proximity Switch B With mounting bracket (Without proximity switch) SC With proximity switch * For details, refer to the table below.

One-touch Fittings

connection 001 Same diameter tubing Symbol Model Oval type Round type H Male connector v v S Hexagon socket head male connector v v F Female connector v v L Male elbow v v LU Branch male elbow v V Universal male elbow v v W Extended male elbow v v T Male branch tee v v Y Male run tee v v D Male delta union v v U Branch Y v UD Double branch Y v M5 M5 x 0.8 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3

Industrial Filters

/4 FN Rp1/4 203 203 R3/4 EB ES DRAIN R3/4 90 90 260 DRAIN FGES type (V-band type) (mm) FGEL type (V-band type) (mm) FGET type (Bolt tightening type) (mm) A A A B C B C B C Model FGESA FGESB FGESC Port size R Model FGELA FGELB FGELC Port size R Model FGETA FGETB FGETC Port size R 671 850 671 850 366 612 910 1, 2 1, 2 1, 2 554 554 931 1350 931 1325 516 871 1225 1191 1860 1191 1825 647 1133

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

Metric size Inch size Body size Port size 3 1/8 standard 06 6 07 1/4 Symbol Cylinder side 4 1/4 standard 08 8 09 5/16 01 R1/8 5 3/8 standard 10 10 11 3/8 02 R1/4 6 1/2 standard 12 12 13 1/2 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series Applicable tubing O.D.

ACTUATOR, ELECTRIC, ACTUATOR, ELECTRIC ACTUATOR, IC, 25MM LE ELECTRIC ACTUATOR, 8.51687 lb

Industrial Filter

(Port size: R3/4) OUT of filtered fluid (Port size: R1 or R2) DRAIN Port to discharge all fluid when replacing the element. (Port size: R3/4) Table 1. Description and function of parts No.

FGE-C

O 1 (O P71) V (V P71) 6/12 FGX-OM-L009-B FGESL Series IN/OUT -0.1MPa (P10) (M12) IN OUT O O V 40 () () () 7/12 FGX-OM-L009-B 1 G1/8 () (R1 R2) IN (Rp1/4) (R3/4) DRAIN OUT (Rp1/4) (R1 R2) (R3/4) 1 1 SUS304 O FGE-OP007 8 NBR FKM O (NBR) (FKM) M10X1.5 1 SUS304 M10 SUS304 SUS304 SUS316WPA FGE-OP005 SUS316 SUS304 SUS304 FGD-OP001 SUS316 FGE-KT001 NBR O FGE-KT002

MRHQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 66h9 0 -0.074 33.3 opened +2.5 -0.2 10 0 -0.1 12 0 -0.06 M5 x 0.8 Finger closing port 4-M5 x 0.8 (attachment mounting screw ) 19.3 closed 0 -0.8 6 12 25 30.4 Max. 14 4-M8 x 1.25 depth 12 (two on opposite side) 63 24 M5 x 0.8 Finger opening port 3-R3 2

Low torque Metal seal type Rotary joint

R3 3 (29) 32 ( 35) 29 5 37 (45) 5 MQR8-F MQR12-F 4-6 counter bore 5 4-3.2 through P.C.D.48 4-8 counter bore 5.5 4-4.5 through32 drill through 4-4.5 through 2-4.2 through 3 *at 2 points 27 drill through 45 25 R4 R4 45 3.5 (43) 41 5 (55) 7 45 ( 50) 46.5 4 Series MQR Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Exhaust Cleaner for Vacuum Pump AMV Series

/8 AMV15, AMV37: R1/2 AMV75, AMV160: R3/4 Replacement Parts AMV3 AMV6 AMV15 AMV75 1 AMV37 AMV160 2 No Description Material Part no.

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1

■How to Order ASP-X369 Series ASP330F－01－06S－X369 Applicable tubing O.D. Body size Metric size Inch size Port size φ6 3 φ1/4” 06 07 1/8 standard Symbol Cylinder side φ8 4 φ5/16” 08 09 1/4 standard 01 R1/8 φ3/8” φ10 5

Metric size Inch size Body size Port size 06 6 3 1/8 standard 07 1/4 Symbol Cylinder side 08 8 4 1/4 standard 09 5/16 01 R1/8 10 10 11 3/8 5 3/8 standard 02 R1/4 12 12 13 1/2 6 1/2 standard 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series XTO257102 Applicable tubing O.D.