Table of Contents

Pressure units conversion (Approximation) 17 Unit Pa (N/m2) kPa MPa bar kgf/cm2 atm mmH2O or mmAq mmHg or Torr PSI 1 x 103 1 x 106 1 x 105 1.0197 x 105 9.8692 x 106 1.0197 x 101 7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1

VQ5000

Series Nil CD1 Note 1) 5 VQ5000 Cylinder port size 3/8 NPTF 1/2 NPTF Bottom ported 1/2 NPTF Rc3/8 Rc1/2 Bottom ported Rc1/2 Mixed sizes Note) CD2 Note 1) 03T 04T BT 03 04 B CM Manifold type CU1 Note 1) 1 Plug-in unit CU2 Note 1) SB SD Note 1) Stations SU Note 1) 1 1 station D U D U Note 1) Combination of [C ] and [S ] is not possible.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Series Nil CD1 Note 1) 5 VQ5000 Cylinder port size CD2 Note 1) 3/8 NPTF 1/2 NPTF Bottom ported 1/2 NPTF Rc3/8 Rc1/2 Bottom ported Rc1/2 Mixed sizes Note) 03T 04T BT 03 04 B CM Manifold type CU1 Note 1) 1 Plug-in unit CU2 Note 1) SB SD Note 1) Stations SU Note 1) 1 1 station D U D U Note 1) Combination of [C ] and [S ] is not possible.

Electric Actuator/Slider Type

6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

SMC Electronic Switch Series Variations

102 1.0197 X 102 9.8692 X 103 1.0197 X 102 1 7.5006 1 X 106 1 X 103 1.0197 X 105 7.5006 X 103 1.4503 X 102 1 1 X 10 1.0197 X 10 9.8692 1 X 105 1 X 102 1 X 101 9.8692 X 101 1.0197 X 104 7.5006 X 102 1 1.0197 1.4503 X 10 9.8067 X 104 9.8067 X 102 9.8067 X 101 9.6784 X 101 1 X 104 7.3556 X 102 1 1.4217 X 10 9.8067 X 10 1.0133 X 105 1.0133 X 102 1.0133 X 101 1.0332 X 104 7.6000 X 102 1.0332 1.4706

2

Connection thread Metric 2, 3.2, 4, 6, 8 M3 x 0.5, M5 x 0.8, M6 x 1.0 Metric 3.2, 4, 6, 8, 10, 12, 16 M5 x 0.8 R, Rc, G1/8, 1/4, 3/8, 1/2 10, 12, 16 R, Rc1/8, 1/4, 3/8, 1/2 Inch 1/8", 5/32", 1/4", 5/16" 3/8", 1/2" 10-32UNF NPT1/8, 1/4, 3/8, 1/2 1/8", 5/32", 3/16", 1/4" 10-32UNF 5/16", 3/8", 1/2" NPT1/16, 1/8, 1/4, 3/8, 1/2 Inch 1/8", 3/16", 1/4" 5/16", 3/8", 1/2" M5 x 0.8 R, Rc1/8, 1/4, 3

Compact 5-Port Solenoid Valve

(A)4 2(B) (A)4 2(B) 4(A) 2(B) (EA)5 1 3(EB) (EA)5 1 3(EB) (P) (P) 3-position pressure center 5(EA) 3(EB) 1(P) (A)4 2(B) N.O. valve x 2 pcs. 2(B) 4(A) (EA)5 1 3(EB) (P) 3(EB) 5(EA) 1(P) N.C. valve, N.O. valve x 1 pc. of each 2(B) 4(A) 3(EB) 5(EA) 1(P) Component Parts No.

AC Servo Motor Driver (MECHATROLINK-III type)

To Travel amount per 1 command pulse (P=1m) by actuator lead (L = 6mm) and pulley ratio (n1/n2 = 1/1) = 1 1048576 1 1000 Pn210 Pn20E 1 6 1/1 = 1048576 Pn210 Pn20E 6 1000 1 = 1048576 Pn210 Pn20E 6000 1 = 65536 Pn210 Pn20E 375 1 *1 For pulley ratio, refer to Lead of LECYU Operation Manual (Simplified Edition),section 4.4.1.

Digital Gap Checker

Description Lead wire color (Output wire color) 1 DC (+) Brown *1 Black 2 N.C. 1 3 DC () Blue *1 4 OUT1 1 DC (+) Brown *1 White 2 N.C. 2 3 DC () Blue *1 4 OUT1 1 DC (+) Brown *1 Gray 2 N.C. 3 3 DC () Blue *1 4 OUT1 1 DC (+) Brown *1 Orange 2 N.C. 4 3 DC () Blue *1 4 OUT1 1 DC (+) Brown *1 Red 2 N.C. 5 3 DC () Blue *1 4 OUT1 1 DC (+) Brown *1 Green 2 N.C. 6 3 DC () Blue *1 4 OUT1 *1:

ISA2

P1 Sensor S1 S3 S2 S4 P2 S1, S2: Fix orifice S3: Variable orifice (adjusted by setting dial) S4: Detection nozzle 16-8-6 7 Series ISA2 Air Catch Sensor Internal Circuit and Wiring Circuit and Wiring for 2 Port Solenoid Valve NPN open collector output DC (+) Without indicator light DC circuit Without display light AC Circuit OUT Main circuit of switch Main circuit of switch Load 1 DC (+) 1

0.01

EXH port P1 SUP port Sensor S1 S3 S2 S4 P2 Detection port S1, S2: Fix orifice S3: Variable orifice (adjusted by setting dial) S4: Detection nozzle 868 A Air Catch Sensor Series ISA2 Wiring Individual wiring Centralized wiring Terminal block 1: Brown 2: NC 3 0 1 2 3 4 Brown Blue Black DC (+) NC DC () OUT ZSE30 ISE30 OUT 1 OUT 2 OUT 3 OUT 4 OUT 5 6 9 3: Blue DC () NC DC (+) OUT 6 ZSE40 ISE40

Environment

1 !2 !

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

1 t LEM e Motor type*1 r Lead [mm] q Accuracy LEY Symbol Type Output [W] Actuator size Compatible driver*2 Nil Basic type H High precision type Symbol LEJS40 LEJS63 A 16 20 B 8 10 LES S2 AC servo motor (Incremental encoder) 100 40 LECSA-S1 w Size S3 AC servo motor (Incremental encoder) 200 63 LECSA-S3 LEPY LEPS t Stroke [mm]*3 40 63 S6 AC servo motor (Absolute encoder) 100 40 LECSB-S5 LECSC-S5

Air Catch Sensor

P1 LED lever meter Sensor S1 S3 Red is on: Output OFF Green is on: Output ON S4 S2 + P2 Red 1 Gap too big S1, S2: Fixed orifice S3: Variable orifice (Set via adjustment knob) S4: Detection nozzle Red 2 Green 1 BEST POSITION The bridge circuit is constructed as shown in the diagram. Position the work piece in front of the nozzle (S4).

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Note 1) 25P Note 1) 26P 20P Side entry Side entry Side entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable Without cable Without cable With cable (1.5 m) With cable (3 m) With cable (5 m) Without cable S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 0 1 2 3 U0 U1 U2

LEC-OM07605CN

1) (1) (1) 46.2 2 SD (1) (1) (1) 46 46.3 SD (1) (1) (1) (1) 46.5 3 DB (1) (1) (1) 46.6 4 DB (1) (1) (1) 47 47.1 SD 47.2 SD 50.1 1 SD (1) (1) (1) 50.2 2 SD (1) (1) (1) 50.3 4 SD (1) (1) (1) 50 1(1) 50.4 1 SD (1) (1) (1) 50.5 2 SD (1) (1) (1) 50.6 4 SD (1) (1) (1) 51.1 3 DB (1) (1) (1) 51 2(1) 51.2 3 DB (1) (1) (1) 8 4 8.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

AREA4 33 AREA4 33 N.C. 1 N.C. 1 4 4 Load Load INP1 14 INP1 14 N.C. 1 N.C. 1 24 24 Load Load INP2 34 INP2 34 N.C. 1 N.C. 1 5 5 Load Load INP3 15 INP3 15 N.C. 1 N.C. 1 Load Load 25 25 INP4 35 INP4 35 ALARM1 ALARM1 Load Load N.C. 1 16 N.C. 1 16 6 6 ALARM2 ALARM2 Load Load 36 36 N.C. 1 N.C. 1 26 26 ALARM3 ALARM3 Load Load 17 17 N.C. 1 N.C. 1 7 7 ALARM4 ALARM4 Load Load 37 37 N.C. 1 N.C. 1 27

Battery-less

1 !

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

LEF-OM007xx

They are all important notes for safety and must be followed in addition to International Standards (ISO /IEC), Japan Industrial Standards (JIS)*1) and other safety regulations*2). *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part