SMC Basic Pneumatics

A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .

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A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

d L / t \ t k N H*#N NVZ3320 NVZ3240 NVZ334O A P / ^ l | , r l \ l l \ ^ d l / l a !

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d L / t \ t k N H*#N NVZ3320 NVZ3240 NVZ334O A P / ^ l | , r l \ l l \ ^ d l / l a !

PFxx-OMJ0005CN

min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/

Direct Solenoid

't;"iii:l:lr:'ir'i' .l l:r':].l:'.:ri:]"r''irr':''i ' r.i' 'r "i "" ' r' ,.it:.i:ur,,r':.,'l:.,t:i:rr'].i:,i::.!t'.:.,i,l.:a,,l'.::ra,'.i,," " . r' i l ,,,.:,:].::.i::.::rl::]rr:,;,:::t,:,,,t,.i:.i:t.:fi:l':,rill..ia,it,"l'-'.:l:...:', ,'l.it:la:::lt]i:ri:t,:i;:i.:i:.,'i:r':::l'.'rt:ail.:r'.,t'...':.':r:'ir . ,,,lri:,,j:li:.l'..i.,i',i.].'..i'1.'rt...i.i.1,.j,.: j..i riir',: .,,, I . .

Air Pilot Operated Series NVSA

l!9@ !ryrq! l r"d lrtu (drd.d rrr rd 6l l u?qq''3. T!4qr'3.I rro9 b llia' rub. Bb ud rid @orral 'e d jsdM br prol .8, 'l xc (., d.r.it 6 Dd i.) ror bd no iincloi hr tror cMedoi. conrr.l. or ddr r3, (.) d.dr q (3) fi' r?rF nurh prus., T Pslro T xroc.3 T pb10. T xnG3 | ri.!l(._r,vrbodylo!'lo'|n. T I g.Prhr eql-tsPd ,utdroi bor c9{r Fibt M .'

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(L): VQZ2 5(R)L Indicator light 83 300 (Lead wire length) Cover diameter 1.5 Pg.7 Cross sectional area 0.23mm2 53 87 MAX.10 Applicable cord O.D.

CC-Link-E

S. or l ess H yst eresi s F. S. or l ess Repeat abi l i t y F. S. or l ess Sensi t i vi t y F. S. or l ess Tem perat ure charact eri st i cs F.

KK/KK13

H L M L (mm) H Width across flats Body size Weight g Effective area mm L H Width across flats Min. bore M Applicable hose I.D.

3 Way,3 Port Solenoid Valve NVZ Series

N\rz3o4FoH 0.18(4.5)Dia L typ plug conneclorz/NVZ304-OL.Nvz384R-OL M type piug connector.,/Nvz3o4-OM Nvz3O4R-Oil Type 20 Manifold,z Top Ported inch (mm) Grommet(G),(H) L type plug connector (L) M type plug connector TApe 21R Manifold,/ Top Ported(External Pilot) inch(nn) Grommet (G), (H) L type dug connector(L) H type plug connector ( ) o = 6 o J 13.78 (350) r3.

NVZseies

N\rz3o4FoH 0.18(4.5)Dia L typ plug conneclorz/NVZ304-OL.Nvz384R-OL M type piug connector.,/Nvz3o4-OM Nvz3O4R-Oil Type 20 Manifold,z Top Ported inch (mm) Grommet(G),(H) L type plug connector (L) M type plug connector TApe 21R Manifold,/ Top Ported(External Pilot) inch(nn) Grommet (G), (H) L type dug connector(L) H type plug connector ( ) o = 6 o J 13.78 (350) r3.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Poppet) VT 0.56 With light/surge voltage suppressor VP L plug connector (L) (A) 2 VG Body Ported Non-locking push type (Tool required) VQZ200 (Standard) 12 VDC 24 VDC VP 1 (P) 3 (R) L plug connector (L) N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

SY SYJ VK Blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VZ L Dimensions VT A One-touch fitting d Part No. A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail AXT100-DR-l 12.5 (Pitch) 5.25 7.5 VQ Enter suffix number into l from the table below.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

HRX-OM-M090

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1

Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

Speed Controller with Indicator

rate [L/min (ANR)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 02 01, 23 300 50 03, 04 100 200 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

INFORMATION Step Motor Controller 5 types of communication protocols New New

Terminal name Details 1 L+ +24 V 2 NC N/A 3 L 0 V 4 C/Q IO-Link signal * For , enter a number from the No. line in the table on page 6. Refer to the dimension drawings on page 6 for the mounting dimensions.