Body Size: 75B [424 SCFM (12,000l/Min), Approx. Compressor Output 100HP, (75kW)], Thread: F [G (Conforms to ISO1179-1)], Port Size: 2, Accessory: Bracket, Auto Drain: N.O. Auto Drain, Rubber Material: -, Air Pressure: -, Drain Guide: -, IN-OUT Direction: -, Pressure Switch 125VAC, 30VDC: -, Element Service Indicator: -, Pressure Switch 30V: -, Degreasing Wash: -, Made-to-Order: -

Body Size: 75B [424 SCFM (12,000l/Min), Approx. Compressor Output 100HP, (75kW)], Thread: F [G (Conforms to ISO1179-1)], Port Size: 1 1/2, Accessory: None, Auto Drain: N.O.

Body Size: 75B [424 SCFM (12,000l/Min), Approx. Compressor Output 100HP, (75kW)], Thread: NPT, Port Size: 1 1/2, Accessory: Bracket, Auto Drain: N.O.

Body Size: 75B [424 SCFM (12,000l/Min), Approx.

Body Size: 75B [424 SCFM (12,000l/Min), Approx.

Body Size: 75B, Thread: Rc, Port Size: 14 (1 1/2)

Body Size: 75B, Thread: Rc, Port Size: 20 (2)

Body Size: 75B, Thread: F (G), Port Size: 14 (1 1/2)

Fluoropolymer Piping Equipment

-R5 LQ3T21-R6 LQ3T31-R1 LQ3T31-R2 LQ3T31-R5 LQ3T31-R6 LQ3T32-R1 LQ3T32-R5 LQ3T41-R1 LQ3T41-R5 LQ3T51-R1 LQ3T51-R5 LQ3T61-R1 LQ3T61-R5 4 x 3 1/4" x 5/32" 2 1 TL TIL TLM TILM 6 x 4 2 3/8" x 1/4" 3 TD TID 1/4" x 5/32" TH TIH 10 x 8 3 1/2" x 3/8" 4 8 x 6 12 x 10 4 3/8" x 1/4" 19 x 16 5 25 x 22 6 3/4" x 5/8" Note) For details of the applicable tubing sizes, refer to page 945. 5 1/2" x 3/8" 3/8

Battery-less

1 Actuator cable type/length Robotic cable [m] Nil None R8 8*7 R1 1.5 RA 10*7 R3 3 RB 15*7 R5 5 RC 20*7 Nil Housing B bottom*6 Housing B bottom K Body bottom 2 locations Body bottom For details on auto switches, refer to the Web Catalog. 21 Battery-less Absolute Encoder Type Slider Type/Ball Screw Drive LEFS Series Battery-less Absolute (Step Motor 24 VDC) !

AHC System Series MA

M3 x 10 (4 pcs.) 11 14 15 20 740 AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC

VQZ1000/2000/3000

5 (R)-M57 (Lead wire length) Cross section 0.23 mm2 Cover diameter 1.5 300 58.5 <63.5> 73.5 137.5 Indicator light 62 160 < >: AC 2-7-44 Base Mounted 45 45 Series VQZ1000/2000/3000 Plug Lead Unit: Single Unit VQZ3000 2 position single Grommet (G): VQZ3150 1(R)-G-02 03 300 (Lead wire length) 95 58 28 10.5 10.5 (For Rc 3/8) (For Rc 3/8) 9 9 24.5 mounting hole (For Rc 1/4) (For Rc 1/4) 5 R5

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

plug connector (M): VQZ2 5 (R)lMl 0 1 01 02 57 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire) 73.5 135.5<137.5> 300 61.5<62.5> 160 58.5<63.5> < >: AC 1.12-42 VQZ1000/2000/3000 Base Mounted VQZ3000 2 position single 0 1 02 03 Grommet(G): VQZ315 (R)lGl 300 95 58 28 (Lead wire length) 10.5 10.5 24.5Mounting holes (Rc(PT)3/8) (Rc(PT)3/8) 9 9 (Rc(PT)1/4) (Rc(PT)1/4) 5 R5

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

For post-stoppage positioning and locking

green when turned ON Connector size M12 x 1 0 0.5 0.4 0.3 0.2 0.1 1 Supply pressure [MPa] 2 4 3 Connector pin arrangement Type Connector pins and arrangement 1 2 3 4 E2E-X7D1-M1J-T10.3M OUT ( ) OUT () 1 Pallet Lock Cylinder W-R1/W-R3 Series Dimensions W-R1-S2Position of fulcrum 2 x 18.5 Proximity switch mounting bracket 68 Proximity switch (Option) 117 15 15 26 26 2 x Rc3/8 36.5 6.5 R5

The LES series electric slide table actuator uses a compactly-integrated, recirculating linear guide for high rigidity and high precision. When the LES is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein.. Two types of built-in motors * are available. The series can be top or bottom mounted. In

Size: 16, Motor Mounting Position: L (Symmetrical Type), Motor Type: Step Motor, (Servo/24 VDC), Lead: J (LES8: 8mm; LES16: 10mm; LES25: 16mm), Stroke: 100mm, Motor Option: B (w/Lock)

Size: 16, Motor Mounting Position: L (Symmetrical Type), Motor Type: Step Motor, (Servo/24 VDC), Lead: J (LES8: 8mm; LES16: 10mm; LES25: 16mm), Stroke: 100mm

Size: 16, Motor Mounting Position: L (Symmetrical Type), Motor Type: Step Motor, (Servo/24 VDC), Lead: J (LES8: 8mm; LES16: 10mm; LES25: 16mm), Stroke: 30mm

Size: 16, Motor Mounting Position: L (Symmetrical Type), Motor Type: Step Motor, (Servo/24 VDC), Lead: J (LES8: 8mm; LES16: 10mm; LES25: 16mm), Stroke: 50mm, Motor Option: w/o Lock, Body Option: S (Dustproof Specification)