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200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure

Slider Type Ball Screw Drive/11-LEFS Series

Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 * Please consult with SMC for

XM, XY

XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3 S1

V

Ambient & Fluid Temperature -10 ~ 50C A Clean Room version is available to specified Lubrication Not Required order Manual Override Non-Locking Push Type Shock Resistance/Vibration Resistance 150 / 30m/s2 Mounting Orientation Free The VQD1000 is used either on a Single SubEnclosure Dust Proof base or Manifold Mounted.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1

LEC-OM07605CN

(3)DO-2() (a) 35mA LA (LB LZ) L A (LB LZ) 100 Am26LS32 150 LAR (LBR LZR) LAR (LBR LZR) LG SD SD (b) CCW LA (T)[Pr. PA15][Pr.

Title not found

Metric size (Release bushing: White color) s3.2, o4, 06, o8, o10, o12 . lnch size (Belease bushing: Orange color) s1 18 . o5n.2', o31 16', s1 14", o51 16', qglS' . 01 2' I Speed may be accurately controlled even at low speeds. I Able to control and set a constant speed easily. I Retainer prevents accidental loss of needle. I Maximum operating pressure 1 MPa max.

Battery-less

2.96 3.30 3.56 2.96 3.20 3.75 4.81 4.98 5.47 5.91 Series LEYG16LmE LEYG25LmE LEYG32LmE Stroke [mm] 30 50 100 150 200 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Product weight [kg] 0.98 1.11 1.28 1.57 1.72 1.70 1.91 2.15 2.58 2.84 3.16 3.40 2.54 3.21 3.60 4.15 4.69 5.20 5.59 Series LEYG40MmE LEYG40LmE Stroke [mm] 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Product weight

Dedicated Controller

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

Lubrication Equipment

A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

Title not found

I E s1/r ooo E s1/rooo Y T I l" DIN rai mount {with DIN DIN rai mount (withoul DlN N.le) nseaD0 ony DIN rallilrings are altached DIN rail length Doube lviinq specitcalion: S nqle, dolbe and 3 pos t on soenoclvaves can be lsed of a rnaftfo d slators. Supply/Exhaust block assembly specif ication Speclied ayoul Indicate vJir ng speciical ons on a nran to cl spec iicai on shet.

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Impact/Vibration resistance (m/s2) 150/50 Note) Manifold Possible Use dry air (Dew point: 20C or less). If using a lubricant, be sure to use a lubricant for low temperatures.

LEC-OM02704CN

6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (8) (2) 150 RDN 7 7 7 7 7 7 8 8 8 8 8 8 6 6 6 (6) (6) (6) 1.

Compact Guide Cylinder

Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12 (10 x 2) 16 (12 x 2) 10, 20, 30, 50, 100 20 (16 x 2) 25 (20 x 2) 20, 30, 50, 100, 150 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) 25, 50, 100, 150, 200 Intermediate strokes are available as a special order. Refer to pages 10 and 11 for cylinders with auto switches.

39

Relation between clamp arm length and maximum clamping force The length of the clamp arm L should be the length given below or less. operating pressure 0.5 MPa 5000 Arm length L Model 4000 Clamping force (N) CKZ3N50 CKZ3T50 CKZ3N63 CKZ3T63 150 mm 63 3000 300 mm 2000 50 1000 0 350 300 250 200 150 100 50 0 Arm length L (mm) Series CKZ3N Allowable load for clamp arm end Refer to the graph on

ISA2

200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure

Series LC7R Dedicated Regenerative Absorption Unit

Applicable Controller Power Supply Voltage 100VAC Specification Series LJ1H10 Series LJ1H20 LJ1H1021H-K (8mm lead) LJ1H2021F-K (5mm lead) 250 400 225 350 12kg 6kg 200 300 175 250 Speed (mm/s) Speed (mm/s) 150 8kg 13kg 125 200 10kg 100 150 14kg 75 100 15kg 50 50 25 0 100 200 Stroke (mm) 300 400 0 100 200 300 400 500 600 Stroke (mm) When an actuator is operated under conditions that exceed

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LER S7 AC servo motor (Absolute encoder) 200 63 LECSB-S7 LECSC-S7 LECSS-S7 LEH LEY -X5 *1 For motor type S2 and S6, the compatible driver part number suffixes are S1 and S5 respectively. *2 For details of the driver, refer to page 607. 11LEFS y Motor option i Cable type*6, *7, *8 !

SMC Electronic Switch Series Variations

P1 LED lever meter Sensor S1 S3 Red is on: Output OFF Green is on: Output ON S4 S2 + P2 Red 1 Gap too big S1, S2: Fixed orifice S3: Variable orifice (Set via adjustment knob) S4: Detection nozzle Red 2 Green 1 BEST POSITION The bridge circuit is constructed as shown in the diagram. Position the work piece in front of the nozzle (S4).

VQ7-6/7-8

AXT500-13 VQ7060-13-2 VQ7060-13-1 VQ7060-13-3 37 x 1.6 Gasket Gasket A Gasket B Gasket C O-ring Mini Y seal Pilot valve assembly Double check spacer DIN terminal q w e r t y u i o MYN-11 MYN-16 VQZ110QVV71-FPG UKL-S1 3-10-10 11 Series VQ7-6 Manifold Specifications How to Order Manifold VV71 6 02D 02R VK Air release valve coil rating Stations 1 1 station VZ Silencer box Nil 1 2 3 4 9 None