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/2 Ball valve 1276 1375 Facility water outlet R1/2 (When symbol 4 is specified.)

VQZ 1 (P) 5 (R1) 3 (R2) Port plug mounting port VQD 3 position exhaust center (A) 4 (B) 2 Nil A B 4 None Port 4(A) 1 (P) 5 (R1) 3 (R2) Port 2(B) 3 position pressure center (A) 4 (B) 2 5 Cylinder port 1 (P) 5 (R1) 3 (R2) C3 C4 C6 M5 L3 L4 L6 L5 One-touch fitting for 3.2 4 position dual 3 port valve One-touch fitting for 4 (2) (A) 4 (B) 2 Side ported A One-touch fitting for 6 5 (R1) 3 (R2)

NAR1000 NAW1000 K10 1/8NPT 0 ~ 160PSI NAR2000 2500 NAW2000 3000 K12 1/4NPT 0 ~ 160PSI NAR4000 NAW4000 K13 1/4NPT 0 ~ 30PSI NAR4000 NAW4000 K20 1/8NPT 0 ~ 30PSI NAR2000 2500 NAW2000 3000 G27-10-R1 116 Connection D I M E N S I O N S 5K8-10P/4P/2.5P D I M E N S I O N S 4K8-10P/4P/2.5P D I M E N S I O N S G27-10-R1 VACUUM GAUGES H O W T O O R D E R V A C U U M G A U G E S Scale in mmHg

, 2% F.S. or less of pressure measured at 25C Vibration resistance Impact resistance Temperature characteristics 01: R1/8, M5 x 0.8, T1: NPT1/8, M5 x 0.8, W1: Rc1/8 C4: With 4 One-touch fitting, C6: With 6 One-touch fitting, M5: M5 female threads 5 wire oil resistant heavy duty cord (0.15mm) 01/T1 types approx. 60g, W1 type approx. 80g, C4/C6/M5 types approx. 92g (each including 0.6m lead

ON) Output voltage: 1 to 5V Output voltage: 1 to 5V 2.5% F.S. or less (in rated pressure range) 5% F.S. or less (in rated pressure range) Linearity: 1% F.S. or less Analog output (Note 2) Linearity: 1% F.S. or less Output impedance: Approx. 1kW Output impedance: Approx. 1kW Auto shift input (Note 3) No-voltage input (reed or solid state), input 5ms or more Enclosure IP65 Operating: 0 to 50C

Values for double types are when the switch is ON. 4 position dual 3 port valve (A) (A) 4 (B) 2 3 (R2) 5 (R1) 1 (P) N.C. N.C. 4 position dual 3 port valve (B) (A) 4 (B) 2 3 (R2) 5 (R1) 1 (P) N.O. N.O. 4 position dual 3 port valve (C) (A) 4 (B) 2 3 (R2) 5 (R1) 1 (P) N.C.

A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A) 2 (B) IP65 enclosure compliant kit (Circular connector) 10 5 6 7 8 9 3 4 1 2 1 (P) 1 (P) 1 (P) Features 2 26 pins 5 6 7 8 9 10 1 2 3 4 Series VS 8-4 S R VS 8-2 S R 1 Base Mounted: Variations Series Metal seal

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Option VP7-6-FPG-DStandard Specifications Operating pressure range 0.1 to 0.9 0.15 to 0.9 Air Fluid VP7-6-FG-DSingle 2 position 2 position 3 position 0.15 to 0.9 Double Max. 50C Ambient and fluid temperature Manual override Non-locking type Electrical

Single mounting screw, clamp construction Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 Replaceable One-touch fittings R1 A P B R2 Model A side B side JIS symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve Wiring 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2

Construction Symbol (B) 2 (A) 4 5 (R1) 1 (P) 3 (R2) Component Parts No.

SI unit Master unit Remote I/O unit Remote I/O unit SDA SDB RDA RDB SG FG SDA SDB RDA RDB SG FG SDA SDB RDA RDB SG FG S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

/2 R1/2 36 129 20 7122 350 700 752 1.3 Name and function of parts Facility water outlet Terminal block for signal Facility water inlet (Symbol: W5) (Symbol: W5) R1/2 R1/2 Refer to 6.3 Outer dimensions 6 4 IDF100F~150F-W IDX-OM-M051 Air Dryer 6.

Mounting position Applicable stations Symbol U Q DeviceNet U side D side Both sides R1 CompoBus/S (16 outputs) 2 to 10 stations D B M R2 CompoBus/S (8 outputs) 2 to 16 stations For special specifications, indicate in the station table below. U JEMANET V CC-Link Special specifications 2 Valve Type ( ) Maximum number of valves: 16 stations However, up to 16 solenoids are applicable.

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

P. 60 Glass circuit board Vacuum Saving Valve Connection thread size for pad side M5 x 0.8 M6 x 1 M8 x 1.25 R1/8 Rc1/8 G1/8 NPT1/8 Can restrict the reduction of vacuum pressure even when there is no workpiece. No need for switching operation when changing work pieces P. 61 Multiple vacuum pads can be operated by one ejector.

All the parts in contact with fluid are non-copper materials Type of actuation Direct operated type 2 position single solenoid Air 10 to 50C (No freezing.

0 to 50C Linearity Note 1) 5% F .S. or less 3% F .S. or less Repeatability Note 1) 2% F .S. or less 1% F .S. or less Temperature characteristics 2% F.S. or less (15 to 35C based on 25C), 3% F .S. or less (0 to 50C based on 25C) Pulse output, N channel, open drain, output for display unit PF2W3.

Set pressure range 0.105 to 1.050 MPa 105.0 to 105.0 kPa 10.0 to 105.0 kPa Vacuum, compound and/or positive pressure can be displayed in MPa or kPa. 500 kPa 500 kPa 1.5 MPa Withstand pressure 0.1 kPa 0.001 MPa 0.1 kPa Minimum unit setting NPN or PNP open collector 1 output NPN or PNP open collector 2 outputs NPN or PNP open collector 1 output + Analog output (voltage or current) Output R1

Note q Nipple Stainless steel HRLE090 R1 2 For CH1 HRLE050 R1/2 [CH2 side] w Ball valve Stainless steel HRLE090 Rc1 1 For CH1 HRLE050 Rc1/2 t w e Different diameter tee Stainless steel HRLE090 Rc1 x Rc3/8 1 For CH1 HRLE050 Rc1/2 x Rc3/8 r Hexagon bushing Stainless steel HRLE090/050 Rc3/8 x Rc1/4 2 For CH1/CH2 t Pressure gauge HRLE090/050 R1/4 2 For CH1/CH2 y Nipple Stainless steel HRLE090