Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: NPN, I/O Cable Length: 3m, DIN Rail: DIN Rail Mounting, Type: Rod Type, Body Size: 16, Bearing Type: Ball Bushing Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 10mm; 25: 12mm; 32: 16mm, Stroke: 50mm

Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: NPN, I/O Cable Length: 3m, DIN Rail: Screw Mounting, Type: Rod Type, Body Size: 16, Bearing Type: Ball Bushing Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 10mm; 25: 12mm; 32: 16mm, Stroke: 50mm

Compatible Motor: Step Motor, Servo/24 VDC, Parallel I/O Type: NPN, I/O Cable Length: 5m, DIN Rail: Screw Mounting, Type: Rod Type, Body Size: 16, Bearing Type: Ball Bushing Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24 VDC), Lead: 16: 10mm; 25: 12mm; 32: 16mm, Stroke: 50mm

Controller Series: LECP1 (Programless Controller), Parallel I/O Type: N (NPN), I/O Cable Length, m: 3, Actuator Series: LEY (Rod Type), Size: 16, Motor Mounting Position: L (Left Side Parallel Type), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm), Stroke: 50mm

Controller Series: LECP1 (Programless Controller), Parallel I/O Type: P (PNP), I/O Cable Length, m: 3, Actuator Series: LEY (Rod Type), Size: 16, Motor Mounting Position: L (Left Side Parallel Type), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm), Stroke: 50mm

Table of Contents

amount (mm) Plate displacement amount (mm) MGP MGPA16-250 MGPA16-250 0.35 MGPA -400 50 50 63 63 MGPA -400 50 63 0.6 0.3 50 50 63 63 MGPA -300 0.5 50 63 MGPA -300 MGPA16-150 MGPA16-150 MGPA16-100 MGPA16-75 0.25 0.4 MGP MGPA16-100 50 50 63 63 MGPA -200 50 63 MGPA -200 0.2 MGP MGPA16-75 0.3 0.15 50 50 63 63 MGPA -150 50 63 MGPA -150 50 63 MGPA -100 50 63 MGPA -50 0.2 50 50 63 63 MGPA -100 0.1

V100

/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz External pilot Nil VT N.C.

Shock Absorbers and Rate Controls

O[il%r3(ltl(S) 3.0 I 1.84+.010/ 7 ( ,;in1 -.dibz .t 50 +.m0/' 010 1.00 {n{ + 0m/.0m2.00 2.88 1.001.00l.0l .87 N/A .56 {.3 lbs. LR0Hfitl6xl(Il(5) t.0 10.07 12.06 +.0 l . +.mt,q, 50 :010 1.501.501.401.06il/A .90 | 1.7 lbs. (LR)0tMI tfx2(ltll(Sl 2.0 q.o 1.50 !

HRX-OM-M090

HRS 10 A 012 Cooling capacity Option 012 1100W/1300W (50/60Hz) Null None 1500W/1700W(50/60Hz)(1) 018 1700W/1900W (50/60Hz)(2) B Earth leakage breaker 024 2100W/2400W (50/60Hz)(3) G High temperature type(4) 1 Power supply-10(100V Type) 2 Power supply-20(200V Type) 3 Power supplyOnly -20(200V Type)can be chosen.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

With(Wihtout light) Note) Standard lead wire length: 300mm Coil voltage 1 2 3 4 5 6 9 100VAC(50/60Hz) 200VAC(50/60Hz) 110VAC(50/60Hz) 220VAC(50/60Hz) 24VDC 12VDC Others 23 Series VQZ 3 Port Solenoid Valve Manifold Options Manifold Options Blank plate VVQZ100-10A-2 VVQZ200-10A-2 VVQZ300-10A-2 Used to reserve a valve mounting space on the manifold for future use.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] 600 600 600 m

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Note) For the special voltages, please consult with SMC.

SMC Basic Pneumatics

The cost of producing a volume flow of .| r3"hin is then ffififW = 40 cents / hr. In our example: 0.336 m3ry'min 1mg/min . 40 cents / hr = 13.4 cents per hour.

%silltr

The cost of producing a volume flow of .| r3"hin is then ffififW = 40 cents / hr. In our example: 0.336 m3ry'min 1mg/min . 40 cents / hr = 13.4 cents per hour.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

With (1) Without (1) Coil voltage 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others (1) With With (Without light) 1 (1) 2 Note 1) DIN is applicable to VQZ 200 and 300.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx. 0. 102 kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100

Turntable Cylinder Series MGT

75st Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1N: Approx. 0. 102kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63

PFxx-OMJ0005CN

(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Refer to back page 50 for Safety Instructions, pages 543 to 546 for Flow Control Equipment Precautions, and pages 573 to 575 for Specific Product Precautions. Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Air Pilot Operated Series NVSA

The standard output pressur for moving part air logic is 50 PSIG (3.44 Bar). The 25 PSIG pllot pr$sure required to shlft this valve gives approximately th samo response lo shitl and to return when the pllot pressure applled is 50 PSIG (3.44 Bar). The minimum volume of iho pilol chamber and the small swept volume disptaced by the short.slroke apool also aid in tast response.