Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 100mm, Motor Option: w/Lock, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: Robotic Flexible Cable, Actuator Cable Length: 3m, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication

Size: 16, Bearing Type: Ball Bushing Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 100mm, Motor Option: with Lock, Guide Option: w/o Guide, Actuator Cable Type: Robotic Cable - Flexible cable, Actuator Cable Length: 3m, Controller Type for (LEC, JXC): -, I/O Cable Length for LEC: -, Controller

Size: 25, Bearing Type: Sliding Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 100mm, Motor Option: with Lock, Guide Option: w/o Guide, Actuator Cable Type: Robotic Cable - Flexible cable, Actuator Cable Length: 3m, Controller Type for (LEC, JXC): -, I/O Cable Length for LEC: -, Controller Mounting

Size: 32, Bearing Type: Ball Bushing Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 100mm, Motor Option: with Lock, Guide Option: w/o Guide, Actuator Cable Type: Robotic Cable - Flexible cable, Actuator Cable Length: 3m, Controller Type for (LEC, JXC): -, I/O Cable Length for LEC: -, Controller

Size: 32, Bearing Type: Sliding Bearing, Motor Mounting: Top Mounting Type, Motor Type: Step Motor (Servo/24VDC), Lead: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 100mm, Motor Option: with Lock, Guide Option: w/o Guide, Actuator Cable Type: Robotic Cable - Flexible cable, Actuator Cable Length: 3m, Controller Type for (LEC, JXC): -, I/O Cable Length for LEC: -, Controller Mounting

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 100mm, Motor Option: w/Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Robotic Flexible Cable, Actuator Cable

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm, Stroke: 100mm, Motor Option: w/Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Robotic Flexible Cable, Actuator Cable Length

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Mounting Position: Right Side Parallel, Motor: A [Servo Motor (24 VDC)], Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 100mm, Motor Option: w/Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Robotic Flexible Cable, Actuator

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Mounting Position: Right Side Parallel, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 100mm, Motor Option: w/Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Robotic Flexible Cable, Actuator

Size: 40, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: C (LEY25, 3; LEY32/40, 4), Stroke: 100mm, Motor: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 3m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug

Size: 32, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: C (LEY25, 3; LEY32/40, 4), Stroke: 100mm, Motor: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 3m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug

Size: 25, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: A (LEY25, 12; LEY32, 16), Stroke: 100mm, Motor: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: C (LEY25, 3; LEY32, 4), Stroke: 100mm, Motor: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector

Size: 40, Motor Mounting: In-line Type, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 3; LEY32/40, 4, Stroke: 100mm, Motor: w/Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 3m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector

Size: 32, Motor Mounting: In-line Type, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 3; LEY32/40, 4, Stroke: 100mm, Motor: w/Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 3m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector

Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 3; LEY32, 4, Stroke: 100mm, Motor: w/Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): w/o Controller, I/O Cable Length for LEC: w/o Cable, Controller Mounting: Screw Mounting, Communication Plug Connector or

Fluoropolymer Piping Equipment

LQ1E41-R4 LQ1E51-R2 LQ1E51-R3 LQ1E51-R4 LQ1E51-R5 LQ1E61-R2 LQ1E61-R3 LQ1E61-R4 LQ1E61-R5 3 8 x 6 6 x 4 4 x 2 10 x 8 8 x 6 6 x 4 4 x 3 12 x 10 10 x 8 8 x 6 6 x 4 LQ1E3A-R3 LQ1E4A-R2 LQ1E4A-R3 LQ1E4A-R4 LQ1E5A-R2 LQ1E5A-R3 LQ1E5A-R4 LQ1E6A-R2 LQ1E6A-R3 LQ1E6A-R4 LQ1E6A-R5 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/16" x 0.127" 1/2" x 3/8" 3/8" x 1/4

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

2

Symbol Size 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3/8, Rc3/8 04 R1/2, Rc1/2 Thread connection Fittings Applicable tubing O.D.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.