KJ

26.5 25.0 D MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T Elbow Socket Module: KBV H (width across flats) T Connection thread M5 x 0.8 M6 x 1 M5 x 0.8 M6 x 1 A Weight (g) VMG L3 L4 L2 D1 D2 D3 L1 Model KBV1-M5 KBV1-M6 KBV2-M5 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2

Table of Contents

26.5 25.0 D MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T Elbow Socket Module: KBV H (width across flats) T Connection thread M5 x 0.8 M6 x 1 M5 x 0.8 M6 x 1 A Weight (g) VMG L3 L4 L2 D1 D2 D3 L1 Model KBV1-M5 KBV1-M6 KBV2-M5 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2

Series KC Self-seal Fittings

T Connecting thread KBB1-M5 KBB1-M6 KBB3-R1 KBB4-R2 Rc(PT) 1 4 T Connecting thread Part No.

IDX-OM-U022

[IDFA125F-38/40] () (10 2m) (100.7m) 20 4x R2 1/2 R2 1/2 1130 78 9351 267 1120 655 75 64 (17 ) 40 1276 1375 R ) (14~18) () P.1-5 P.1-5 P.1-5 7122 20 350 700 752 IDFA100F150F 6 4 6.3 IDX-OM-U022 6.

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

76

Signal cable outlet (Electric wire diameter 0.67 (17) or less) Grommet with membrane Power cable holder (Electric wire diameter 0.71 (18) to 0.91 (23) Drain tube for drain pan of condensed water Ventilation air inlet (with dustproof filter) Top view 4 x 0.79 (20) 27.6 (700) 0.039 (1) 4.21 (107) 28.0 (712) 0.079 (2) 13.2 (335) 0.79 (20) Air inlet R2 18.1 (460) 10.5 (267) Air inlet R2 5 Refrigerated

C76

Built-in magnet MB1 Double rod Option Type Mounting style CA2 Stainless steel piston rod, rod end nut and mounting nut Standard R Nil Mounting Symbol Non-rotating rod K Stainless steel piston rod and rod end nut R2 Double end Front nose Front nose in line port E CS1 (Rubber cushion only) F Note) Please refer to page 6-10-46 for additional options. Only one option can be selected.

Smooth Cylinder/Low Speed Cylinder

ND hole H10 Axis d9 MM NX2 H A L R2 U2 Z (Min.)

C76

MB1 Double rod Option Type Mounting style CA2 Stainless steel piston rod, rod end nut and mounting nut Standard Non-rotating rod (Rubber cushion only) R Nil Mounting Symbol K Stainless steel piston rod and rod end nut R2 Double end Front nose Front nose in line port E CS1 F Note) Please refer to page 6-10-46 for additional options. Only one option can be selected.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

or less Multiple (2 pcs. or more) secure mounting Panel mount example 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 24 or more Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less Multiple (2 pcs. or more) secure mounting Panel fitting dimensions (Bottom ported) Individual mounting 36 x n pcs. +

Shock Absorbers and Rate Controls

.63 (l.R)0tl{l l.l 5x2 8.54 8.74 174-t2lJNF .38 l . t 3 1.20 5.43 t.l0 .55 .21 l . t 2 .63 (LR)OIl{ll.25r I 5.92 6.12 r%-r2 UNF .38 t . t 3 1.20 3.81 t.l0 .55 .2t 1.25 .0J (LR)Otlll|.25r2 8.54 8.7 4 r%-r2 UNF .38 t . t 3 1,20 5.43 t . t 0 .55 .21 t.25 .63 ^otesr 1 Alrshdk absorbrs wr]] ldnclro. satistiiCof,t dt 5% of the r narimum raied ener4y per c!

High Vacuum Angle Valve, XL Series

time s Note 2) 0.05 0.1 0.21 0.24 0.26 0.28 Flange type KF (NW), K (DN) KF (NW) Body: Aluminum alloy Bellows: Stainless steel Seal: FKM (fluoro rubber) Principle materials Exterior: Hard anodized Interior: Machined for clean environment Surface treatment 0.4 to 0.7 (58 to 101psi) Actuation pressure MPa M5 (10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2

Series VQ Base Mounted Metal Seal/Rubber Seal

P.1.10-144 O A B C D E F1 G H J1 J2 K Q R1 R2 V Without SI unit With general type, Series EX300 SI unit for MELSECNET/MINI-S3 Data Link System (Mitsubishi Electric) SI unit for SYSBUS Wire System (OMRON) SI unit for Satellite I/O Link System (Sharp) SI unit for MEWNET-F System (Matsushita Electric Works Ltd.)

XL

time s Note 2) 0.05 0.1 0.21 0.24 0.26 0.28 Flange type KF (NW), K (DN) KF (NW) Body: Aluminum alloy Bellows: Stainless steel Seal: FKM (fluoro rubber) Principle materials Exterior: Hard anodized Interior: Machined for clean environment Surface treatment 0.4 to 0.7 (58 to 101psi) Actuation pressure MPa M5 (10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2

Possible to transfer a workpiece at low-speed.

Next, B is entered to find A the moment of inertia for the rotation of shaft (A) as r r2 2 = m A = 2B a b No. of teeth = b D5. Solid sphere Position of rotational axis: Passing through the diameter r 2 r2 5 = m 303 CRQ2X/MSQX Series Load Type Calculation method of necessary torque depends on the load type. Refer to the table below.

VK3000

Port size (P, A and B port) Rated voltage M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz R1, R2: M5 4 Option 5 6 24 VDC 12 VDC Nil None With bracket (Not assembled) 7 240 VAC, 50/60 Hz 9 Other Option F Option Part No. Description Part no.

C85

R2 Note) Please refer to page 6-11-47 for additional options. Only one option can be selected.

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, same diameters connection, Pipe-to-Pipe Equal Diameter Connection Type: Union Tees, Applicable Tube Outer Dia. (in) D (D1): 3/4, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 5

Fitting Type: T (Tee Union), Size Combination: 5A (3/4" x 5/8")

Air Cylinder

M14 x 1.5 12 +0.070 0 16 0.1 0.3 20 14 13 92 CM2 CM2 CM3 With Double Knuckle Joint CG1 (mm) Y(MAX) ND hole H10 Axis d9 CG3 MM JMB MB NX2 L R2 U2 A H Z MB1 CA2 Bore size A H L MM ND NX2 R2 U2 Y Z 20 18 41 25 M8 x 1.25 9 9 +0.2 +0.1 10 14 11 66 25, 32 22 45 25 M10 x 1.25 9 9 +0.2 +0.1 10 14 14 69 40 24 50 49.7 M14 x 1.5 12 16 +0.3 +0.1 13 25 13 92 CS1 CS2 Double Knuckle Joint (mm) Y-020B/032B