Symbol: 3 Port, Universal, Function: Standard, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Reverse Mounting Prevention Pin: None, Lead Wire Length: Plug Connector, 300mm, CE Compliant: -

Symbol: 3 Port, Universal, Function: Standard, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: None, Lead Wire Length: Plug Connector, 300mm, CE Compliant: -

Symbol: 3 Port, Universal, Function: Standard, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Reverse Mounting Prevention Pin: None, Lead Wire Length: Plug Connector, 300mm, CE Compliant: -

Symbol: 3 Port, Universal, Function: Standard, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Reverse Mounting Prevention Pin: None, Lead Wire Length: Plug Connector, 300mm, CE Compliant: -

Symbol: 3 Port, Universal, Function: Standard, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: None, Lead Wire Length: Plug Connector, 300mm, CE Compliant: -

VFR

MPa Pressure (2) switch IS1000P-2-1 0.1 to 0.6 MPa Plug-in type MP2-2 MP3-2 AXT625-18A For filter regulator For pressure switch For air release valve 0.08 MPa 1a LED (RED) Blanking plate Filter element Max. switch capacity Max. operating current Inside voltage drop Air release valve (Single only) Operating pressure range 2 VA AC, 2 W DC 24 VAC, DC or less: 50 mA 100 VAC, DC: 20 mA 111511-5B

VFS

manual drain) Filtration degree Regulator U side Air release (2) valve spacer 5 m VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Set pressure (Outlet pressure) Pressure switch(1) 0.05 to 0.85 MPa Pressure(3) switch VZS MP2-3 MP3-2 VVFS3000-24A-10 INA-13-854-12-5B

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

mounting) VVFS2000-24A-2R (D side mounting) VVFS2000-24A-2L (U side mounting) (1) 5 m Air release valve spacer VP4 0.05 to 0.85 MPa S0700 (2) Pressure switch 0.1 to 0.6 MPa VQ IS1000P-2-1 Plug-in type 0.08 MPa 1a LED (RED) MP2-2 MP3-2 AXT625-18A For filter regulator For pressure switch For air release valve VQ4 Blanking plate VQ5 2 VA AC, 2 W DC Filter element 111511-5B

Table of Contents

AF800 AF900 11345-5B No. Description Material w e Bronze Element 11352-5B Bowl assembly AF11-4 AF11-4 JIS B2401 G130 r O-ring NBR 630332 t NBR 113136 113136 O-ring 11217 112310 NBR u Gasket for element Bowl (polycarbonate), drain cock, bowl guard and clamp ring are assembled. Assembly part no. for bowl (polycarbonate) and drain cock is 11316A (for AF800/900).

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

1R (D side mounting) VVFS3000-24A-2R (D side mounting) IS1000P-2-1 Filter regulator Pressure switch Release valve Air filter (With auto-drain/With manual drain) Filtration degree Regulator SYJ Air release valve spacer Plug-in type 5 m (2) SZ Set pressure (Outlet pressure) Pressure switch(1) 0.05 to 0.85 MPa Pressure switch (3) MP2-3 MP3-2 VVFS3000-24A-10 INA-13-854-12-5B

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

250 29 45 49 11.3 0A 225 2A 43 4A 10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D 9.7 0E 160 2E 37 4E 9.4 0F 150 2F 36 4F 9.1 10 140 30 35.2 50 8.8 11 132 31 33.1 51 8.3 12 125 32 31.3 52 7.8 13 118 33 29.6 53 7.4 14 112 34 28.1 54 7.0 15 107 35 26.8 55 6.7 16 102 36 25.6 56 6.4 17 97 37 24.5 57 6.1 18 93 38 23.4 58 5.9 19 90 39 22.5 59 5.6 1A 86 3A 21.6 5A 5.4 1B 83 3B 20.8 5B

LEC-OM07605CN

250 29 45 49 11.3 0A 225 2A 43 4A 10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D 9.7 0E 160 2E 37 4E 9.4 0F 150 2F 36 4F 9.1 10 140 30 35.2 50 8.8 11 132 31 33.1 51 8.3 12 125 32 31.3 52 7.8 13 118 33 29.6 53 7.4 14 112 34 28.1 54 7.0 15 107 35 26.8 55 6.7 16 102 36 25.6 56 6.4 17 97 37 24.5 57 6.1 18 93 38 23.4 58 5.9 19 90 39 22.5 59 5.6 1A 86 3A 21.6 5A 5.4 1B 83 3B 20.8 5B

Filter Regulator IW Series

Description Material y Stainless steel 1301-002 1301-1202 1301-2502 1301-902 6 Pilot valve Stainless steel/NBR 1301207#1 1301207#1 u 7 Element Bronze 1301-5B 1301-5B !

With Factory Installed

AW2001 AW3001 AW4001 6) Valve ass'y Brass NBR 1349160 131521 6A 13 16212A e Filter element Bronze 11 294-5B 11 1511-5B 11 104-5B Baffle ABS resin 11295 111522 111622 0 Diaphragm ass'y NBR 131445A 131 52 15A 1316211A Deflector ABS resin 112961 11158 11167 Ci) Bowl ass'y 1'<0'., Polycarbonate C200F C300F C400F 0 Valve spring Stainless steel 13491 58 131525 131625 C!!)

Stability of suction position,

Description Material (Surface treatment) Note XT661 1 Vacuum pad NBR, Silicone rubber, Urethane rubber, FKM, Mark-free NBR 1 Vacuum pad NBR, Silicone rubber, Urethane rubber, FKM, Mark-free NBR Pad form: Flat type with groove, Bellows type with groove 2 Plate Aluminum alloy (Clear anodized) 3 O-ring FKM 4 Shaft Stainless steel 5a Shaft ring A Stainless steel 5b Shaft ring B Stainless steel

Symbol: 092R (3 Port, Universal), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Lead Wire Length: 3 (300mm), CE Compliant: Q (CE Compliant)

Symbol: 092R (3 Port, Universal), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 092R (3 Port, Universal), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Lead Wire Length: KO (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)

Symbol: 092R (3 Port, Universal), Function: Standard, Voltage: 5 (24VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Lead Wire Length: KOZ (Plug Connector, w/o Connector), CE Compliant: Q (CE Compliant)