Series VQ Base Mounted Metal Seal/Rubber Seal P (2) AXT100-2-F (2) AXT100-2-TB1 (4) AXT100-2-TB2 (4) SY SYJ q SX VK VZ VF U S U S U S w e r t U S VFR Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PU20) of q SI unit and q P kit (20 pin).
13.3 24 SV 36.7 16.2 17 34 SZ 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA
0.76 (A)4 2(B) 1 (P) (EA)5 3(EB) 2 position double VFA1000 VFA3000 (B)2 4(A) 5(EA) 1 (P) (EB)3 Body ported Base mounted VFA3000 VFA5000 1/8 1/4 4.0 P.1498 2(B) (A)4 (EA)5 1 (P) 3(EB) Upward 3 position closed center 2(B) (A)4 VFA5000 (EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 1/4 3/8 8.8 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 Lateral (EA)5 1 (P) 3(EB) VFA3000 2
2 1 IDX-OM-W011 2 2 2 2 6 6-2 IDF4E15E1 IDF-AB500 14 1 IDF4EIDF15E1 2 2 3 50 50 (IN) (OUT) (IN) (OUT) (IN) (OUT) IN OUT 2-2 IDF Series 2 2 IDX-OM-W011 2 2 2 4 10mm 2 2 5 6-1 IEC ()2 IDF1E-1015E1-10100V 100V 30mA 10A IDF3E-2015E1-20200V AC200V IDF3E11E-20:30mA 5A IDF15E1-20:30mA 10A 2-2 IDF Series 2 3 IDX-OM-W011 2 1.25 216AWG 3 812 0.1m 30m M3 1.25-3 6.5mm
OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.
OO 3.24 5 . 1 2 8.01 Technic Vacuum System Specification (continued) 2.
Stainless steel Types 10, 20 VVDW 2 0 5A Series 1 2 10 20 Type 30 VVCW20-5A 12 Compact Direct Operated 3 Port Solenoid Valve for Water and Air Series VDW100/200 How to Order Valves (Single Type) VD W 2 50 1 G 2 01 For water, air and vacuum Series Option 2 3 200 300 None Foot type bracket Nil F Note) Foot brackets are packed with valves. Materials and insulation type C.O.
TABLE 2-1 DIVISION OF DANGER, WARNING, CAUTION, AND NOTE -2-2 TABLE 2-2 MEANING OF A SYMBOLS -2-2 TABLE 2-3 SAFETY INTERLOCK LIST(PART 1) -2-6 TABLE 2-4 SAFETY INTERLOCK LIST(PART 2) -2-6 TABLE 3-1 QUALITY STANDARD FOR WATER(TAP WATER) -3-4 TABLE 5-1 FUNCTION OF COMPONENTS -5-3 TABLE 6-1 SPECIFICATIONS OF HEC006 -6-1 TABLE 6-2 SPECIFICATIONS OF HEC012 -6-2 TABLE 8-1 AVAILABLE MODE IN LEVEL
IDFA4E15E1 L N PE M3 6.5mm 1.25mm 2 1-1 IDFA Series 1 4 IDX-OM-W017 2 2 , 2 1 IDFA4E15E 20kg 2 2 2 2 2 1 2000m 240 050 600mm 600mm 600mm ( 600mm ) 600mm 2-1 IDFA Series 2 1 IDX-OM-W017 2 2 2 2 6 6-2 IDFA4E15E 2 2 3 50 50 2 2 4 10mm 2-2-2 IDFA Series 2 2 IDX-OM-W017 2 ( 2 2 5 6-1 IEC AC230V 30mA 5A 216AWG,3 ,812 1.25 0.1m 30m M3 1.25-3 6.5mm ()M3 0.61Nm
Single unit 1/8 to 3/4 2, 3, 4, 5, 7, 10 0 to 2 (1) 17-2-36 VV2CL2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C.
*s*rfu'*rs Non-Adjustable Hydraulic Series @$rc^ PM Series Sizing Gurves lmperial ro gf; N : " , d \ E o 9 N Fl E i ' o < n ToTAL ENEFGY (inbs) r 2 0 PA a t o g . o N 7 t O S o o t { q E ! o o o . I 3 o = t o Io | o 5 o o r t 9 = i * o g ! . 0 = 2 0 . . , . . o l:.1:/ 0 a 0 2 0 4 0 . 6 0 8 1 . 0 1 2 1 . 4 1 6 1 . 4 2 . 0 1 . 0 1 . 5 2 0 2 5 3 . 0 0 0 5 TOTAL ENERGY (i IbS/C) (Tho!
and their components *2) JIS B8370 URLhttps://www.smcworld.com/ i i-1 . i-1 i-1-1 . i-1 i-2 . i-2 i-2-1 . i-2 i-2-2 . i-3 i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-5 i-2-8 . i-6 i-2-9 . i-6 i-3 . i-7 i-4 / . i-8 1 1-1 . 1-1 2-1 . 2-1 2-2 . 2-2 2-2-1 . 2-2 2-2-2 . 2-3 2-2-3 . 2-3 2-2-4 . 2-3 2-2-5 . 2-4 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3
LVN Types 10, 20 Stainless steel VVDW 2 0 5A TI/ TIL Series PA 1 2 10 20 PAX PB Type 30 VVCW20-5A 17-2-73 14 For details about certified products conforming to international standards, visit us at www.smcworld.com.
Stainless steel Types 10, 20 VVDW 2 0 5A Series 1 2 10 20 Type 30 VVCW20-5A 12 Compact Direct Operated 3 Port Solenoid Valve for Water and Air Series VDW100/200 How to Order Valves (Single Type) VD W 2 50 1 G 2 01 For water, air and vacuum Series Option 2 3 200 300 None Foot type bracket Nil F Note) Foot brackets are packed with valves. Materials and insulation type C.O.
Total Land Area: 55,647m 2 Floor Space: 23,022m 2 Total Land Area: 124,227m 2 Floor Space: 17,204m 2 Tohno Factory (Iwate Prf.) Total Land Area: 60,638m 2 Floor Space: 10,622m 2 Tsukuba Factory (Ibaragi Prf.)
4.8A 10A 5A 5A 15A 10A 10A 180/200W 50/60Hz 385/440W 50/60Hz 220W 420W 0.01m (99.9%) 6) 2 0.3m3.5/LANR PID / R134a/0.14g R134a/0.26g ()7) 52dB (A) 55dB (A) () 26kg 37kg 10mm 12 CE 1 ANR2065% 2 3 4 0.5 5-5%+10% 6 7 1m1m 6.2 GWP ( G W P) GWP ) Regul at i on ( EU ) N o 517/2014 I PCC AR4 ) R134a 1, 430 1, 430 R404A 3, 922 3, 920 R407C 1, 774 1, 770 R410A 2, 088 2, 090 1 2
of equipment to transmission and control systems. *2) JIS B8370 URLhttp://www.smcworld.com/ IDX-OM-W093 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.2.6 . 1-5 1.3 . 1-6 1.4 / . 1-7 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-
//www.smcworld.com/ IDX-OM-W094 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.3 . 1-5 1.4 / . 1-6 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6 . 4-2 5 . 5-1 5.1 . 5
://www.smcworld.com/ IDX-OM-W095 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.3 . 1-5 1.4 / . 1-6 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6 . 4-2 5 . 5-1 5.1 .