Electric Actuators

LJ1 LG1 LC1 LX LC6D/LC6C Switches LC6C Power Connector Cable LC6D Connector Cable Model LC6-1-C2--X252 Model LC6-1-C1--X258 Electric actuator LC6D Electric actuator LC6C Cable length 1 1m 3 3m 5 5m Cable length 1 1m 2 2m 5 5m Power connector Cable length: 1 to 5m Motor cable b Cable length: 1 to 5m 13 12 11 10 6 5 4 3 2 1 a Motor cable 7 13 12 11 10 9 8 6 5 4 3 2 1 Switch cable 14 15 16 17

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

SMC Electronic Switch Series Variations

102 1.0197 X 102 9.8692 X 103 1.0197 X 102 1 7.5006 1 X 106 1 X 103 1.0197 X 105 7.5006 X 103 1.4503 X 102 1 1 X 10 1.0197 X 10 9.8692 1 X 105 1 X 102 1 X 101 9.8692 X 101 1.0197 X 104 7.5006 X 102 1 1.0197 1.4503 X 10 9.8067 X 104 9.8067 X 102 9.8067 X 101 9.6784 X 101 1 X 104 7.3556 X 102 1 1.4217 X 10 9.8067 X 10 1.0133 X 105 1.0133 X 102 1.0133 X 101 1.0332 X 104 7.6000 X 102 1.0332 1.4706

2–4

5 15 10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 25 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 25 15 Besides the models listed in How to Order, the following auto switches are applicable.

Compact Type

Therefore, the graph used for your model selection should be the one for CXSJL25-75 14 ). 32 8 mm 3 Compact Type Dual-Rod Cylinder Series CXSJ Vertical Mounting CXSJM CXSJL CXSJM CXSJL Graph V = up to 200 mm/s 1 Graph V = up to 400 mm/s 2 20 10 32 25 1 20 32 Weight m (kg) Weight m (kg) Weight m (kg) 25 15 1 20 15 10 0.1 10 0.1 6 6 0.03 5 5 10 20 30 40 50 100 10 20 30 40 50 100 Overhang L

MY2

6 Single axis type/MY2H w @2 t @1 @9 #8 MY2H16 MY2HT16 !3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !

Magnetically Coupled Rodless Cylinder

5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R25

Electromagnetic Digital Flow Switch

Lead wire color *1 q q DC (+) 1 Brown w N.C./IN 2 Not used e DC () 3 Blue r INPUT 4 White (Flow sensor 1 to 5 V input) e w 1 2 3 4 r *1 When using the lead wire and M12 connector included with the LFElJ series. Do not connect black. Power supply/output connection lead wire Cable Specifications Pin no.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Note MXP6-5 MXP-AD6-5 MXP6-10 MXP10-10 MXP-AD10-10 With magnet and MXP10-20 MXP-AD10-20 mounting screw MXP12-15 MXP-AD12-15 MXP12-25 MXP-AD12-25 MXP16-20 MXP-AD10-20 MXP16-30 MXP-AD12-25 Note) MXP16-20 and MXP10-20 are common. MXP16-30 and MXP12-25 are common. 8-8-11 11 Series MXP Construction MXP6 @1 @0 @2 !2 !1 t e y !9 !8 !7 r !4 !6 u !5 !0 !

CE

9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

8 1/4 M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 31.5 35.5 39.5 34 39 43 43.5 47.5 52.5 54 57 59.5 8 10 14 8 10 14 12 14 15.3 21.1 25.5 15.8 22.3 26.7 23.5 27.9 29.4 30.8 32 36.2 6 13 19 7 14 20 14 22 29 39 41 68 D1 M 4 17 4 4 19.7 10.4 KQB2 M L1 10 L2 A 8 D1 KS KX 6 D2 18.5 10 10 21.8 12.8 10 H Connection threads 8 15.2 20.5 26 18 25.3 12 KM (R) (R) 2 x Applicable tubing 10 18.5 23 41 29

MQQ

M 0.2 D E K B + Stroke L M 0.2 A + Stroke E 25, 28 H effective thread depth C 2-Rc 1/8 2 x 4-OA effective depth RA Y Q F 2 x 4-OB Depth of counter bore RB E J I 4-N through M 0.2 D W B + Stroke K L M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) A B F H C D E Y OA I J K L M N OB Q RA W RB 10 to 40 M3 x 0.5 M4 x 0.7 69.5 61.5 6 6 29 9 38 5 8 20 10 3.5 6.5 39.5 7 5 4 10 to 60 M4

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

HRX-OM-W060

temperature C 2 to 45 Circulating fluid CH1 : Clear water / CH2 : Clear water,DI water (pure water) 1 Set temperature range C CH1 : 15 to 25 / CH2 : 20 to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.5 1 6.5 1 Temperature stability 4 C CH1 0.1 CH2 0.5 Rated flow rate (Outlet) L/min 45 10 45 10 125 10 (0.43MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa

VQ7-6/7-8

Other Nil 1 2 3 4 9 ... ... 10 10 stations Note) When equipped with control unit, 1 or 2 stations are used for mounting.

CXS

400mm/s 2 20 50 CXSM CXSL CXSM CXSL 10 Weight m (kg) Weight m (kg) 10 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph V = up to 800mm/s 4 Graph V = up to 600mm/s 3 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph

0.4

Power consumption Temperature rise 4 W type 5C 10 W type 14C Required time for attachment/detachment: Approx. 5 seconds (per unit) Reduces installation time for multiple numbers of valves. During continuous operation at 24 VDC, 0.25 MPa, 300 Hz Filter is mounted to port 1 (IN). Filter is mounted to port 1 (IN) for quick disconnect type as well.

MLGP

50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 1 1 50mm stroke or less V = 400mm/s 1 2 Over 50mm stroke V = 400mm/s 100 50 100 100 80 80 10 63 63 Load weight m (kg) Load weight m (kg) 50 50 10 40 40 1 32 32 0.1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Features 7 Low Profile Guide Cylinder with Lock Series MLGP Vertical

MLGP

50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 1 1 50mm stroke or less V = 400mm/s 1 2 Over 50mm stroke V = 400mm/s 100 50 100 100 80 80 10 63 63 Load weight m (kg) Load weight m (kg) 50 50 10 40 40 1 32 32 0.1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Features 7 Low Profile Guide Cylinder with Lock Series MLGP Vertical

MY1

10 1.