Symbol: 205R (Base Mounted, 3 Port, Universal), Function: Y (Power-saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material/Port Size: w/o Sub-plate, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 205R (Base Mounted, 3 Port, Universal), Function: Y (Power-saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material/Port Size: 1N (NPT1/8, PVDF), Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 205R (Base Mounted, 3 Port, Universal), Function: Y (Power-saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material/Port Size: w/o Sub-plate, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 205R (Base Mounted, 3 Port, Universal), Function: Y (Power-saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material/Port Size: w/o Sub-plate, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 205R (Base Mounted, 3 Port, Universal), Function: Y (Power-saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material/Port Size: P (Reverse Mounting Prevention Pin), Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: Q (CE Compliant)

Symbol: Base Mounted, 3 Port, Universal, Function: Power-saving Circuit, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material/Port Size: w/o Sub-plate, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 3 Port, Universal, Function: Power-saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material/Port Size: Rc1/8, PVDF, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 3 Port, Universal, Function: Power-saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material/Port Size: w/o Sub-plate, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 3 Port, Universal, Function: Power-saving Circuit, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material/Port Size: NPT1/8, PVDF, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 3 Port, Universal, Function: Power-saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material/Port Size: Reverse Mounting Prevention Pin, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: CE Compliant

constructionValve typeNumber of portsFluid Note 1)Operating pressure rangeOrifice diameterResponse timeLeakageProof pressure Note 2)Ambient temperatureFluid temperatureVolume of valve chamber Note 3)Mounting orientation Note 4)EnclosureWeightRated voltageAllowable voltage fluctuation Note 5)Type of coil insulationPower consumption (When rated voltage is at 24 V)Coil switching noise Note 6)

2

6 (For mounting) Plug side 50 Panel mounting hole Component Parts t q No.

1

Connector for unit (Plug) 6 y t y t EX600-DXB EX600-DYB EX600-DXC q w q w e q w er e y t y t y t EX600-DXD EX600-DXE EX600-DYE EX600-DME EX600-DXF EX600-DYF EX600-DMF Analog Unit q w e q w e No.

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ZP

-6 U4 For 4 soft tubing M-5AU-4 U6 For 6 soft tubing M-5AU-6 H Model A B C D 2 E F G H J K Vacuum inlet direction q Pad dia.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Note Description SY940 M2: 0.16 Nm M3: 0.8 Nm M4: 1.4 Nm Aluminum die-casted 1 4 3 8 3 8 1 2 SY5000-27-1 (-Q) : SY7000-27-1 (-Q) : SY7000-27-2 (-Q) SY3000-27-1 (-Q) : SY9000-27-1 (-Q) : SY9000-27-2 (-Q) Sub-plate Note) 6 Pilot valve assembly Refer to How to Order Pilot Valve Assembly on page 130.

CATALOG

37 42 15 21 24 7 10 17 14.5 5 28 5 14 6 12 6h9 -0.03-0 3 Part No P Q R SA SB SC TB UA UB VA VB WA MHS3-16D M3x0.5 6 25 3.4 6.5 8 5 M3x0.5 4.5 2H9 0~0.025 2 17H9 0~0.043 MHS3-20D M5x0.8 7 29 3.4 6.5 9.5 6 M3x0.5 6 2H9 0~0.025 2 21H9 0~0.052 MHS3-25D M5x0.8 8 34 4.5 8 10 6 M4x0.7 6 3H9 0~0.025 3 26H9 0~0.052 Part No XA XB MHS3-16D 2H9 0~0.025 2 MHS3-20D 2H9 0~0.025 2 MHS3-25D 3H9 0~0.025 3

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Pressure 0.7 MPa PM: Raised up to 0.43 MPa 6 x 6 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 10 pcs. Flow rate Q (Nl) Flow rate Q (Nl) Tube 2,000 Tube 2,000 mm 500 mm 6 x 8 pcs. 6 x 8 pcs. 500 mm 500 mm mm 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

SYJ7000-22-1(-Q) SYJ7000-22-2(-Q) V111(T)No. 1 2 3 4 5 6 Aluminum die-casted 1/8 1/4 Body Piston plate End cover Piston Spool valve assembly Spool spring Sub-plate Note) 7 8 Pilot valve Note) Add suffix -Q for the CE-compliant product.

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