Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: Others, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 2, Insulation Class: B, Pipe opening type (details): Base Mounted Type, Voltage: 24 V DC, Power
Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: Others, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 2, Insulation Class: B, Pipe opening type (details): Base Mounted Type, Voltage: 24 V DC, Power
Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Normally Closed, Body Material: Resin, Connection Type: Others, Tube Diameter: -, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 2, Insulation Class: B, Pipe opening type (details): Base Mounted Type, Voltage: 12 V DC, Power
Symbol: 20R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material/Port Size: w/o Sub-plate, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: Q (CE Compliant)
Symbol: 20R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material/Port Size: w/o Sub-plate, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: Q (CE Compliant)
Symbol: 20R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material/Port Size: w/o Sub-plate, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: Q (CE Compliant)
Symbol: 20R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material/Port Size: w/o Sub-plate, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: Q (CE Compliant)
Symbol: 20R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material/Port Size: 1N (NPT1/8, PVDF), Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: Q (CE Compliant)
Symbol: 20R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material/Port Size: P (Reverse Mounting Prevention Pin), Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: Q (CE Compliant)
Symbol: 20R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material/Port Size: P (Reverse Mounting Prevention Pin), Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: Q (CE Compliant)
Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material/Port Size: NPT1/8, PVDF, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: CE Compliant
Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material/Port Size: Reverse Mounting Prevention Pin, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: CE Compliant
Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material/Port Size: Reverse Mounting Prevention Pin, Lead Wire Length, Electrical Entry, Light/Surge Suppressor: 300mm, CE Compliant: CE Compliant
constructionValve typeNumber of portsFluid Note 1)Operating pressure rangeOrifice diameterResponse timeLeakageProof pressure Note 2)Ambient temperatureFluid temperatureVolume of valve chamber Note 3)Mounting orientation Note 4)EnclosureWeightRated voltageAllowable voltage fluctuation Note 5)Type of coil insulationPower consumption (When rated voltage is at 24 V)Coil switching noise Note 6)
2 6 (For mounting) Plug side 50 Panel mounting hole Component Parts t q No.
Connector for unit (Plug) 6 y t y t EX600-DXB EX600-DYB EX600-DXC q w q w e q w er e y t y t y t EX600-DXD EX600-DXE EX600-DYE EX600-DME EX600-DXF EX600-DYF EX600-DMF Analog Unit q w e q w e No.
5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !
-6 U4 For 4 soft tubing M-5AU-4 U6 For 6 soft tubing M-5AU-6 H Model A B C D 2 E F G H J K Vacuum inlet direction q Pad dia.
Note Description SY940 M2: 0.16 Nm M3: 0.8 Nm M4: 1.4 Nm Aluminum die-casted 1 4 3 8 3 8 1 2 SY5000-27-1 (-Q) : SY7000-27-1 (-Q) : SY7000-27-2 (-Q) SY3000-27-1 (-Q) : SY9000-27-1 (-Q) : SY9000-27-2 (-Q) Sub-plate Note) 6 Pilot valve assembly Refer to How to Order Pilot Valve Assembly on page 130.
37 42 15 21 24 7 10 17 14.5 5 28 5 14 6 12 6h9 -0.03-0 3 Part No P Q R SA SB SC TB UA UB VA VB WA MHS3-16D M3x0.5 6 25 3.4 6.5 8 5 M3x0.5 4.5 2H9 0~0.025 2 17H9 0~0.043 MHS3-20D M5x0.8 7 29 3.4 6.5 9.5 6 M3x0.5 6 2H9 0~0.025 2 21H9 0~0.052 MHS3-25D M5x0.8 8 34 4.5 8 10 6 M4x0.7 6 3H9 0~0.025 3 26H9 0~0.052 Part No XA XB MHS3-16D 2H9 0~0.025 2 MHS3-20D 2H9 0~0.025 2 MHS3-25D 3H9 0~0.025 3