High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

M L H A M W E LQ1H11-M LQ1H12-M LQ1H21-M LQ1H22-M LQ1H23-M LQ1H24-M LQ1H31-M LQ1H32-M LQ1H33-M LQ1H34-M LQ1H35-M LQ1H36-M LQ1H41-M LQ1H42-M LQ1H43-M LQ1H44-M LQ1H51-M LQ1H52-M LQ1H53-M LQ1H54-M LQ1H61-M LQ1H62-M LQ1H63-M LQ1H64-M 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 1/8 21 1/8" 25 10 11.5 10 Class 1 31.5 1/8" 15 35 16.5 14 14 H (A) L 29 1/4" W M 36.5 1/4" 20 42.5

ZP

5AU-4-X83 [Weight: 1.6 g] 2 M-5AU-6-X83 [Weight: 1.8 g] 2 M-5AU-2 [Weight: 1.5 g] 2 ZP3-T10UM;-A12-02 ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

ZP

Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 25 40 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10

Table of Contents

amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.

ZP

M-5AN-4 N6 For 6 nylon tubing M-5AN-6 U4 For 4 soft tubing M-5AU-4 U6 For 6 soft tubing M-5AU-6 M8 x 1 (Buffer body) Model A B C Vacuum inlet direction q Pad dia.

smcmaintenancepartslist

Pressure Control Equipment Air Preparation Equipment High precision filter for liquids Built-in elements Filtration accuracy Element classification Applicable body Symbol J002T J004T J006T J013T DX20T DX40T 2 m 4 m 6 m 13 m 0.2 m 0.4 m FGH100 FGH200 FGH300 Filtration efficiency 99% HEPO2 Series EJ Body size Element length L117 L246 L496 Applicable element EJ701S EJ801S, ED801S EJ901S, ED901S

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Lead wire length symbols: 0.5 m Nil (Example) A73C 3 m L (Example) A73CL 5 m Z (Example) A73CZ None N (Example) A73CN D-P5DWL type is available from 40 up to 100 only. There are other applicable auto switches other than the listed above. For details, refer to page 7-6-23.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Terminal number Dimensions Applicable fittings size d 4 Model A L D 10-KQ2P-04 16 32 6 10-KQ2P-06 18 35 8 10-KQ2P-08 20.5 39 10 10-KQ2P-10 22 43 Connector Assembly for Flat Ribbon Cables 6 8 10 12 5 6 8.5 10 Cable length (L) 1.5 m 3 m 5 m AXT100-FC20-1 Assembly part no.

Table of Contents

x 4 Detection nozzle: 1.5 Supply pressure: 100 kPa Set distance: 0.15 mm Detection side piping: 6 x 4 Detection nozzle: 2.0 Supply pressure: 100 kPa Set distance: 0.3 mm IF Data 3 1.5 Piping tubing length Piping tubing length 10 m 2.5 10 m 1.2 Response time (sec) Response time (sec) 8 m 2 0.9 5 m 8 m 1.5 0.6 5 m 1 3 m 3 m 0.3 0.5 1 m 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 1 m 0 0 0 0.05

Smooth Cylinder/Low Speed Cylinder

W W X Y X Y Z LX (Knock pin position) 4 x LD LZ Axial Foot Style (mm) Y 7 7 8 8.5 11 13 14 16 X 15 15 16 16.5 22 22 28.5 30 W 10 10 10 10 17.5 17.5 20 20 M 3 3.5 3.5 4 5 5 5 7 LZ 44 49 58 71 86 106 125 150 LX 32 36 44 54 66 82 100 120 LT 3 3 3 3 4.5 4.5 4.5 6 LS 53 53 53 60 67 67 74 74 LH 20 22 25 30 40 45 55 65 LD 6 6 7 7 10 12 11 14 LC 4 4 4 4 5 5 6 6 Bore size (mm) B 34 38.5 45 54.5 70.5

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Conditions Body ported Tube bore x Length Speed controller Silencer Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 Series MB 6 x 1 m AS2301F-06 AN110-01 VZ5120-01 3-3-55 55 Series VZ5000 Construction 2 position single 2 position double De-energized De-energized Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

Made to Order

H4 4/2.5 CJ-5H-4 With a fixed orifice (0.8) H6 6/4 CJ-5H-6 MH4 4/2.5 M-5H-4 Without fixed orifice MH6 6/4 M-5H-6 Dimensions (Dimensions other than below are the same as standard type.) Hose nipple Width across flats 8(7) (12) The above figure shows the 6/4 hose nipple mounting dimensions.

Auto Switch Guide

16-28 Grommet 6-16-29 Connector 6-16-30 Band 6-16-31 Terminal conduit 6-16-32 6-16-33 Grommet 6-16-34 Rail 6-16-35 Connector 6-16-36 Grommet Tie-rod 6-16-37 Terminal conduit 6-16-38 6-16-39 Grommet Direct Connector This auto switch can be mounted by tie-rod with using mounting bracket.

F

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture

ZP

5AU-4-X83 [Weight: 1.6 g] 2 M-5AU-6-X83 [Weight: 1.8 g] 2 M-5AU-2 [Weight: 1.5 g] 2 ZP3-T10UM;-A12-02 ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

ISO Cylinder

15 12 10 7 6 16 10 12 M12 x 1.25 4 4 M5 x 0.8 8 12 5 28 14.2 M4 x 0.7 19 6 15 12 10 7 6 16 12 16 M16 x 1.5 6 6 M5 x 0.8 12 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 14 10 9 22 16 16 M16 x 1.5 6 6 M5 x 0.8 12 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 13 10 9 22 20 20 M22 x 1.5 8 8 G1/8 16 20 8 44 17 6 M8 x 1.25 32 11 24 22 11 13 12 24 25 22 M22 x 1.5 10 8 G1/8 16 22 8 50 20 8 M10 x 1.25 32 11 30 22 11

MY1

orientation Ceiling m Wall m Vertical m Note) Static load m Horizontal m M M m x g x X m x g x X m x g x Z M Static moment z y Y m x g x Y m x g x Y m x g x Z M Z m x g x X m x g x Y m x g M Note) m is a mass movable by thrust.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

6 17 17 15 1/8 (P, R port) 45.5 32 24 L plug connector (L): 10-SYJ5143-L-01 M plug connector (M): 10-SYJ5143-M-01 DIN Terminal (D): 10-SYJ5143-D-01 M8 connector (WO): 10-SYJ5143-WO-01 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.9 82.6 MAX.10 75.4 50.1[57.1] 64.1 34.7 54.6 M8 x 1 49 37.1 61.2[68.2] Approx. 300 (Lead wire length) 6 Pg7 6 6 6 73.5[75.7] 63.7[65.9] 83.5 65.2

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

1.0 Communication speed [bps] 156 k/625 k/2.5 M /5 M/10 M 125 k/250 k/500 k 9.6 k/19.2 k/45.45 k/ 93.75 k/187.5 k/500 k/ 1.5 M/3 M/6 M/12 M 10 M/100 M Configuration file Note 2) EDS file GSD file EDS file Communication specifications Input 896 points 108 words 4 stations occupied (8 times setting) Input 200 bytes Output 200 bytes Input 57 words Output 57 words Input 256 bytes Output 256

V

M Type Plug with Lead Wire MN M Type Plug without Connector MO M Type Plug without Connector Internal Pilot R External Pilot V O LTA G E *1 100VAC *2 200VAC 3 110VAC *4 220VAC (D, DO Only) 5 24 VDC 6 12 VDC *2 200VAC (L M Only) *4 220VAC (L, M Only) * Special Order Courtesy of Steven Engineering, Inc. !