Specification: Standard Type (Not Clean Room), Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 15mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Specification: Standard Type (Not Clean Room), Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 15mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Specification: Standard Type (Not Clean Room), Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 15mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m, M8-3 Pin)

Specification: Standard Type (Not Clean Room), Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 15mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Lightweight and Compact

During transportation/storage: 15C to 50C, 15% to 85% (But as long as water or circulating fluid are not left inside the pipings) During operation: 5C to 45C, 30% to 70% (However, use a 15% ethylene glycol aqueous solution if operating in a place where the ambient temperature or circulating fluid temperature is 10C or less.) 6. In locations where condensation may occur. 7.

HRS100/150

1.00 4.19 x 103 1.00 1 x 103 15C 1.02 3.91 x 103 1.02 0.93 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 20C 1.01 3.91 x 103 1.01 0.93 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 25C 1.01 3.91 x 103 1.01 0.93 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18 x 103 0.99 1 x 103 35C 1.01 3.91 x 103 1.01 0.94 x 103 40C 0.99 4.18 x 103 0.99 1 x 103 40C 1.01 3.92 x

energy saving effect

1.00 4.19 x 103 1.00 1 x 103 15C 1.02 3.91 x 103 1.02 0.93 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 20C 1.01 3.91 x 103 1.01 0.93 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 25C 1.01 3.91 x 103 1.01 0.93 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18 x 103 0.99 1 x 103 35C 1.01 3.91 x 103 1.01 0.94 x 103 40C 0.99 4.18 x 103 0.99 1 x 103 40C 1.01 3.92 x

53

During transportation/storage: 15C to 50C, 15% to 85% (But as long as water or circulating fluid are not left inside the pipings) During operation: 5C to 45C, 30% to 70% (However, use a 15% ethylene glycol aqueous solution if operating in a place where the ambient temperature or circulating fluid temperature is 10C or less.) 6. In locations where condensation may occur. 7.

NCQ8

Z M9NZ 1 Series NCQ8 Specifications 106 (1-1/16") 200 (2") 250 (2-1/2") 056 (9/16") #10-32UNF 075 (3/4") 150(1-1/2") Bore size #10-32UNF NPT1/8 NPT1/8 NPT1/8 NPT1/4 Piping size Pneumatic (Non-lube) Type Double acting, Single rod Action Air Fluid 300PSI (2.1MPa) Proof pressure 200PSI (1.4MPa) Maximum operating pressure 056 11PSI (0.07MPa) Minimum operating pressure 075 to 250 8PSI (0.05MPa

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

76

energy saving function series Winter Ambient temperature: 36F (2C) Inlet air temperature: 50F (10C) Set dew point: 50F (10C) Conditions Summer 104F Energy saving operation mode 38% reduced 38% reduced Double energy saving function series (40C) Ambient temperature: 104F (40C) Inlet air temperature: 122F (50C) Set dew point: 86F (30C) Conditions Refer to page 3 for dew point change. 59C (15C

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Note 2) Series IDF Inlet air temperature: Saturated at 35C (IDF1D), saturated at 40C (IDF2D to 240D), Ambient temperature: 32C Note 3) Series IDG Inlet air temperature: Saturated at 25C, Ambient temperature: 25C Note 4) Series IDU Inlet air temperature: 60C (IDU3D to 6D), 55C (IDU8D to 37C1), 50C (IDU55C, 75C), Ambient temperature: 32C Note 5) means voltage indication symbol (IDF3D to 15C

Refrigerated Air Dryers

IDF6E to 15E1 Max. operating pressure *4 1.0 MPa Max. operating temperature 60C Conversion bypass piping set [When there is no bypass piping] For ensuring conversion to the former models (IDF6D to 15C) air piping.

HRL

Water Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Conventional units Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 10C 1.00 4.19 x 103 1.00 1 x 103 15C 1.00 4.19 x 103 1.00 1 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 35C 0.99 4.18 x 103 0.99 1 x 103 40C

Thermo-chiller/Rack Mount Type

1.00 4.19 x 103 1.00 1 x 103 15C 1.02 3.91 x 103 1.02 0.93 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 20C 1.01 3.91 x 103 1.01 0.93 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 25C 1.01 3.91 x 103 1.01 0.93 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18 x 103 0.99 1 x 103 35C 1.01 3.91 x 103 1.01 0.94 x 103 40C 0.99 4.18 x 103 0.99 1 x 103 40C 1.01 3.92 x

33

1.00 4.19 x 103 1.00 1 x 103 15C 1.02 3.91 x 103 1.02 0.93 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 20C 1.01 3.91 x 103 1.01 0.93 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 25C 1.01 3.91 x 103 1.01 0.93 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18 x 103 0.99 1 x 103 35C 1.01 3.91 x 103 1.01 0.94 x 103 40C 0.99 4.18 x 103 0.99 1 x 103 40C 1.01 3.92 x

LEC-OM02904

(2) DC24V NFB MC M (3) IEC60664-12 (IP54) A 10 (4) (a) YIEC60664-1 400V (b) DC24V (5) (a) (PE) () (PE) (b) (PE) () 1 PE PE PE PE (c) (PE) () (6) (a) (b) EN (7) (a) EN/IEC B() A B (b) EN60204-15C 40 PVC() (c) EMC (8) EMC EMC () EMCEMC(IB()67303) A 11 UL/C-UL (1) LECSSLE-S5-LE-S6-LE-S7-LE-S8() .

TABLE OF CONTENTS

Valve Temperature Range: Standard Valves 5F ( 15C) to 122 F (50 C) ambient; media. .63 (16.0) .86 (21.8) BOTTOM VIEW Maximum Operating Pressure Differentials: See catalog listings Burst Pressure: 1500 PSI Leakage: Bubble tight for standard valves Vacuum: To 5 Microns Consult factory Coil Voltage: 6 to 220 VAC 50-60 Hz. 2 to 150V DC.

Vacuum

ul tt1-:d6-l E P t B 9 vAc -i Connector type: ZSP1-@0X-15C Adsorptlon contirmation switch: ZSPI-@0X-15 I E 9 9 6 ; ) Fllter: NZX1 -F Roquird aloarano lior cowl Emoval: 15mm ) a(1-oBA Note) *DmemiontFor filountrng Br*tt A tuuseniesl For Ejector System Use / Eiector + Valve + Vacuum Pressure Switch (ZSE2) (Dimensions in millimters ildule Applicable valve: NVJ1(Xl (N.C.)/ NZX1OO-Kl&-E S9rcar

ZSE1/ISE1

Connector Socket Lead wire Hook 16-6-4 5 Compact Pressure Switch Series ZSE1/ISE1 Dimensions Grommet type: ZSE1-00-14/-15/-18/-19 Connector type: ZSE1-00-14C/-15C/-18C/-19C 23.4 Indicator light (Red) Indicator light (Red) 23 23 15 15 H HYS SET L H L H HYS SET L H Hysteresis setting trimmer Pressure setting trimmer Pressure setting trimmer Hysteresis setting trimmer ZSE ISE 23.4 23.4 Indicator