CATALOG

, 1800, 2000 32 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1200, 1400, 1600, 1800, 2000 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1200, 1400, 1600, 1800, 2000 O P T I O N S T R O K E A D J U S T M E N T U N I T Stroke Adjustment Unit 25 MY-A25L 32 MY-A32L 40 MY-A40L 25 MY-S25L MY-S25B 32 MY-S32L MY-S25B 40 MY-S40L MY-S32B M O R E H O W T O O R D E R S E E N E X T P A G

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

A Work load [kg] Work load [kg] LEJ LEJ 40 Lead 20: LEJS63A Lead 16: LEJS40A Lead 30: LEJS63H 30 Lead 24: LEJS40H LEL A 20 A LEM 10 A A 0 LEY 0 200 400 600 800 1000 1200 1400 1600 1800 0 200 400 600 800 1000 1200 1400 1600 1800 Speed [mm/s] Speed [mm/s] LES Vertical Vertical LEPY LEPS 10 20 Lead 10: LEJS63B Lead 8: LEJS40B A Area where the regeneration option is required.

MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

15

0 200 400 600 800 1000 1200 1400 1600 Stroke [mm] Stroke [mm] [Graph 7] Allowable load mass by stroke 40 100 y, z + A = 0 y, z + A = 50 Load mass [kg] y, z + A = 100 y, z + A = 200 10 y, z + A = 300 1 0 200 400 600 800 1000 1200 1400 1600 If load center of gravity exceeds the value of y, z + A on the graph, please consult SMC.

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

Table of Contents

IDG100H (Type A products group) P1 = 0.3 MPa 0 Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 30 40 50 0 400 800 1200 1600 Outlet air flow rate (l/min (ANR)) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Refer to pages 14-19-28 to

IDG

IDG100H (Type A products group) P1 = 0.3 MPa 0 Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 30 40 50 0 400 800 1200 1600 Outlet air flow rate (l/min (ANR)) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Refer to pages 14-19-28 to

HRX-OM-W002

/1800 1000/1200 1600/1800 2000/2400 2500/3000 Heating capacity(50/60Hz)4 W 400/500 450/500 550/700 Temperature stability 5 0.1 0.13(at 7L/min)/0.18(at 7L/min) Pump capacity (50/60Hz) 6 MPa For option T : 0.42(at 10L/min)/0.4(at 14L/min) 0.13at 7L/min/0.18(at 7L/min) For option MT : 0.32(at 10L/min)/0.32(at 14L/min) For option -T/MT0.36at 7L/min/0.42(at 10L/min) For option T1 : 0.28(at 10L

Electric Actuator / Slider Type 《 AC Servo Motor 》

PA06 1 262144 (Position control mode) 2000 1200 600 2400 1600 800 3000 2000 1000 Electronic gear denominator *3.

Series IDG

Performance Charts IDG100H P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C P1 = 0.5MPa 10 P1 = 0.7MPa 20 30 40 50 0 400 800 1200 1600 Outlet air flow rate l/min (ANR) Note: F = (1.8 x C) + 32; 1MPa = 145psi; 1l/min = 0.0353SCFM 7 8 Series IDG Membrane Air Dryer Single Style/Standard Dew Point 40C (40F) Specifications How to Order 1l/min = 0.035SCFM IDG 50 L 03 Flow rate by size

Electric Actuator Triple Axis P&P Unit

1600 15 7.5 1000 15 5 1600 kg mm/s mm 250 500 250 500 0.05 When axes are combined, select each axis considering the weight of the work piece and the body.

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

5

or less -XC27 Double clevis and double knuckle pins made of stainless steel -XC30 Rod side trunnion 140 1000 or less 1000 or less 1600 or less 160 1200 or less 1200 or less 1600 or less -XC68 Made of stainless steel (with hard chrome plated piston rod) -XC86 With rod end bracket Accessories/For details, refer to page 221.

Made to Order

1600 1000 1400 w-1 From P. 470 Standard type CA2 Double acting, Double rod Smooth cylinder w-3 From P. 198 w-1 From P. 530 Double acting, Single rod CS1 Standard type Double acting, Single rod Double acting, Single rod Standard type CS2 w-1 From P. 568 Double acting, Double rod Smooth cylinder Double acting, Single rod How to Order XC68 Standard model no.

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0001

/80 1600/80 XLA-63-2 XLA-80-2 AC90240V XL1A25-60S-2 XL1A25-60S-3 1 1 H4 AC100V 400/100 600/150 / AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2

XL-OMV0002

XL-25 XL-40 XL-50 XL-63 AC90240V Ass'y XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 Ass'y 1 1 1 H4 AC100V 200/40 200/50 400/100 / AC200V 800/40 800/50 800/100 Ass'y XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 Ass'y 1 1 1 1 H5 AC100V 200/40 400/70 400/80 600/130 / AC200V 800/40 1600/80 1600/80 2400/130 XL-80 XL-100 XL-160 AC90240V Ass'y XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 Ass'y

XL-OMY0002

/80 1600/80 2400/130 XLD-80 XLD-100 XLD-160 AC90240V XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 1 2 3 H4 AC100V 600/150 800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12

AIR CYLINDER

Maximum stroke (mm) Basic Bracket Head side flange, Foot, Single clevis Rod side flange Double clevis Bore size Center trunnion 125 1000 or less 1600 or less 140 1000 or less 1600 or less 160 1200 or less 1600 or less Caution Cylinder should be operated within the max. usable stroke. Operation at the stroke beyond the max. stroke could cause breakage of piston rod.

l

1400 or less 1600 or less Order Made Made to Order Mounting Bracket Part No.