Precision Regulator

6000 0 1000 2000 3000 4000 5000 Flow rate (L/min (ANR)) Relief flow rate (L/min (ANR)) Supply pressure P1 (MPa) IR3120-03 IR3120-03 IR3120-03 Supply pressure: 1.0 MPa Back pressure: 1.0 MPa 0.8 0.204 1.0 0.7 0.9 Set pressure (MPa) Set pressure (MPa) 0.202 0.8 0.6 0.7 0.5 0.200 0.6 Set point 0.4 0.5 0.198 0.4 0.3 0.3 0.196 0.2 0.2 0.1 0.194 0.1 0 1000 2000 3000 4000 5000 6000 0 0.2 0.1 0.3

IR1000/2000/3000

0.3 0.196 0.2 0.2 0.1 0.194 0.1 0 1000 2000 3000 4000 5000 6000 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 6000 0 1000 2000 3000 4000 5000 1.0 Relief flow rate l/min (ANR) Flow rate l/min (ANR) Supply pressure P1 MPa 7 Series IR1000/2000/3000 Order Made Specifications Contact SMC regarding detailed dimensions, specifications and delivery times.

IR1000/2000/3000

5000 6000 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 6000 0 1000 2000 3000 4000 5000 1.0 Flow rate ( /min (ANR)) Relief flow rate ( /min (ANR)) Supply pressure P1 (MPa) 14-5-12 12 Series IR1000/2000/3000 Made to Order Specifications: Please contact SMC regarding detailed dimensions, specifications, and delivery times.

Floating Joint

9.5 11.5 14 16 6 6 7 8 11 14 19 24 30 36 5 5 7 8 11 13.5 16 20 22 24 10 10 13 17 22 27 32 41 46 55 13 15 19.5 22.5 29 35.5 47.5 59 71.5 83 0.02 0.02 0.04 0.07 0.15 0.29 0.56 1.04 2.6 4.5 0.5 0.7 0.8 1 1.25 1.5 2 2.5 2.5 3 24.5 26.5 33 38 51 62.5 80.5 101 129 149 7 7 8 9 13 15 18 24 38 42 0.5 0.5 0.5 0.5 0.75 1 1.25 2 2.5 3 112 200 300 500 1300 3100 5000 7900 15300 20 112 200 1100 2500 6000

Thermo-chiller/Rack Mount Type

6000 25C Cooling capacity [W] Cooling capacity [W] 5000 5000 32C 32C 4000 4000 40C 3000 3000 40C 2000 2000 1000 1000 Ambient temperature Ambient temperature Ambient temperature Ambient temperature 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR050-W-20 [50 Hz] [60 Hz] 7000 7000 25C 25C 6000 6000 Cooling capacity [W] Cooling capacity

4-channel Flow Monitor ( compatible)

(page 72) Y U16 0x0064 5 R/W (100) Setting of OUT1 delay time at ON. 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment dtH1 (OUT1 delay time at ON) Y U16 0x0 6 R/W (0) dtL1 (OUT1 delay time at OFF) Setting of OUT1 delay time at OFF. 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment Y U16 0x0 7 R/W (0) OUT1 Accumulated threshold value setting (L) Consider the accumulated inclination when reading or writing

smcmaintenancepartslist

Recommended torque: 12 to 14 Nm. 231 MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Replacement Procedure is P.448 Construction !1 t OUT IN u MC cartridge element Flow hole A Separation element i y Auto-drain type o !0 r Port size 1/4 Drain The numbers are the same as the "Construction" of the Best Pneumatics No.5 Series AMR.

OMU0023

Address Description of bytes tion unit range Input Mode D0410 4 Target position [m] Note 1) 1 Note 1) No D0412 2 Positioning time [0.01s] 1 0 to 6000 No D0413 2 Speed [mm/s] 1 0 to 400 No D0414 2 Acceleration [mm/s2] 1 0 to 60 No D0415 2 Deceleration [mm/s2] 1 0 to 60 No 1 to 20, Pushing speed [mm/s] D0416 2 1 No 32768 to Note2) 32788 Thrust setting value Note 3) More than D0417 2 1 Yes [

CLA

Retaining Force Of Air Pressure Lock-up 0100 1574 (7000) 1346 (6000) / ~?p>. .-~ --_1 124 (5000) ,/ /. / --/./-.P: 2 ;;; 900 (4000) !

Angle Seat Valve /

For Air 1.6 1.4 Upstream pressure of valve P1 Downstream pressure P2 [MPa] 1.5 MPa 1.6 MPa 1.2 1.3 MPa 1.4 MPa Subsonic 1.0 Critical pressure 1.2 MPa 1.1 MPa 0.8 1.0 MPa 0.9 MPa 0.8 MPa Sonic 0.6 0.7 MPa 0.6 MPa 0.5 MPa 0.4 0.4 MPa 0.3 MPa 0.2 0.2 MPa 0.1 MPa 0 VXB215A D(H) 10 12000 14000 8000 2000 4000 6000 VXB215B E(H) 16000 14000 10 12000 8000 2000 4000 6000 VXB215C F(H) 10 2000 6000 8000

Compact

Acceleration [mm/s2] 0 250 1 500 2 1000 3 1500 4 2000 5 2500 6 3000 7 4000 8 5000 9 6000 10 7500 11 10 12 12500 13 15000 14 17500 15 20 Note) The factory default setting for the switch is No.0.

Modular Type Lubricators Series AL

Note that the numbered scale markings are guidelines for adjusting the position, and not indicators of the dripping amount. 0.1 Pressure drop (MPa) 0.08 P1 = 0.7 MPa P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.1 MPa 0.06 0.04 0.02 0 0 2000 4000 6000 8000 Flow rate (L/min (ANR)) Caution 1. Check the dripping amount once a day.

Micro-Mist Separator with Prefilter Series AMH

--"i,, _ , .. " ... .::;::.. , 0 3000 6000 9000 12000 15000 Air flow rate Qlmin (ANR) rr ---:--~!'--.. -. .,.. -_---0.7MPa .:':: .,.' ..".'

PF3A7xxH.eng

(Press the and buttons simultaneously for 1 second or longer) [ P] Select input switch operation [3000] 3000 L/min (PF3A706H) Accumulated flow error Sub display In measurement mode, the display of the sub display can be temporarily changed by pressing the or buttons. [6000] 6000 L/min (PF3A712H) [F 1] Installation Direct mounting Install the product with 4 screws suitable for the product

PF3A7xxH-L.eng

Only air, N2, are applicable. [6000] 6000 L/min (PF3A712H) [F 1] [ 150] 150 L/min (PF3A703H) The accumulated flow has exceeded the accumulated flow range. (For accumulated increment) [H_1 ] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.

HRX-OM-W038

6000 Ambient Ambient temperature temperature 5000 5000 or or Cooling capacity[W] facility water temperature Cooling capacity[W] facility water temperature 4000 4000 3000 25 25 3000 32 32 40 40 2000 2000 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz *The cooling capacity will be reduced by 300W when option: T and

HRX-OM-O021

6000 or or facility water facility water 5000 5000 temperature temperature 4000 4000 25 25 3000 3000 32 32 2000 2000 40 40 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500

HRX-OM-R005

6000 temperature temperature 5000 5000 25 25 4000 4000 32 3000 3000 32 2000 2000 40 40 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-4 Cooling capacity(HRS060--20-(BJM)) 1. 5 1. 5 1. 5 1. 5 1. 5 1. 5 kW kW kW kW kW kW 1 1 1 1 1 1 0. 5 0. 5 0. 5 0. 5 0. 5 0. 5 0 0 0 0 0 0 9.5 Heating capacity 0 2 0 2 0 2

Modular F.R.L. Unit

6000 8000 2000 10 0 0 Flow rate L/min (ANR) Flow rate L/min (ANR) AC40 Rc 1/2 Specific Product Precautions 0.6 0.5 Outlet pressure MPa Mounting and Adjustment Air Supply 0.4 Caution 1.

Modular Type Lubricator Series AL

Drip failure can cause damage to the components that need lubrication. 0.04 0.02 0 0 2000 4000 6000 8000 Flow rate L/min (ANR) 51 Lubricator AL10 to 60 Construction AL10 AL20 w w e q q t IN OUT IN OUT y y r u u AL30, 40 AL50, 60 w w q t q e e t IN OUT OUT IN y r i r u y u Parts list Description Material Note No.