Table of Contents

) Steam system (Boiler water) Steam system (Condensate) Insulation oil Parachloroetylene Brake oil Water (up to 99C) Ethyl alcohol Ethylene glycol Caustic soda (25% ) Gas oil Silicon oil Fuel oil (up to 60C) Fuel oil (up to 100C) Steam system (Boiler water) Steam system (Condensate) Insulation oil Naphtha Parachloroetylene Brake oil Water (up to 99C) Note) If using for other fluids, please

Series VCL

(-4 to 212F) Ambient temperature Note 1) 10 to 60 (14 to 140F) (with no freezing) 10 to 100C (14 to 212F) Fluid temperature Splash-proof (equivalent to IP65) Enclosure Location without corrosive or explosive gases Environment 0 (with oil pressure) Valve leakage cm3/min Unrestricted Mounting position 24VDC, 12VDC, 100VAC, 110VAC, 200VAC, 220VAC, 230VAC (50/60Hz) 100VAC, 200VAC, 220VAC, 230VAC

Soft Nylon Tubing TS/TISA Series

There is a possibility of plasticizer and other materials precipitating on the tube surface and detracting from the cleanliness level of the room. 40 to +100C, Water: 0 to +50C (No freezing) Nylon 12 Operating temperature Note 2) Material Note 1) Refer to the Printing/Fluid.

T/TIA

(mm) 2.5 3 4 4.5 6 7.5 9 13 2.18 3.48 4.57 6.99 9.56 Black (B) Max. operating pressure (MPa) White (W) TIA Series Red (R) Blue (BU) T1613 Yellow (Y) Green (G) T0403 Other metric size Nominal size (inch) 5 32" 5 16" 1 4 3 8 " 3 16" 1 8 " 1 2 " " Nominal size (mm) 0.0 40 20 0 20 40 60 80 100 Specifications 3.2 Operating temperature (C) Fluid Air/Water 20C or less 40C 60C 80C 100C 3.3 2.3 1.65

HAW

(Example) Inlet air temperature: 100C, Cooling water temperature: 20C, Cooling water flow: 17 l/min Air flow: 2000 l/min (ANR), Air pressure: 0.7 MPa, Model: HAW22-14 Outlet air temperature at above conditions Use outlet air temperature of 37C from outlet air temperature table. At this time correction factor line becomes .

Booster Relay Series IL100

How to Order IL 100 02 Suffix Booster relay Nil Standard Thread type T High temperature (5 to 100C) Nil Rc N NPT* L Low temperature (30 to 60C) F G* * Semi-standard S Copper-free ST Copper-free/ High temperature (5 to 100C) Port size 02 1/4 03 3/8 SL Copper-free/ Low temperature (30 to 60C) Accessories Nil None B With bracket Standard Specications Flow-rate Characteristics Supply pressure

The VC enclosure is IP65 equivalent.Multipurpose valve for oil, Withstand pressure: 5.0MPa, Ambient temperature: -20 to 60C (Standard) -20 to 100C (High temp.), Fluid temperature: -10 to 60C (Standard) -10 to 100C (High temp.), Valve leakage cm¦/min: 0 (with oil pressure), VALVE, COMPACT FOR OIL, VALVE, VC* VALVE, 2-PORT SOLENOID, 2A, VC* NO SIZE RATING, 0.97003 lb

Process Pump <Fluororesin Type> Series PA3000

(with no freezing or heat cycle) Ambient temperature 0 to 100C (with no freezing or heat cycle) Pilot air pressure 0.2 to 0.5MPa Proof pressure 0.75MPa Mounting orientation Horizontal (with mounting hole on the bottom) Weight 2.1kg (without foot) PA: Standard Assembled and packaged in a standard environment Assembling environment PAP: Clean room Assembled and double-packaged in clean-room

Air/Manually Operated High Purity Chemical Valve Series LV

Table symbols : Can be used : Depends on conditions X: Cannot be used Compatibility is indicated for fluid temperatures of 100C or less. Consult P/A regarding fluids other than the above. Consult P/A regarding operating conditions. 1.12-6

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

(-4 to 212F) Ambient temperature Note 1) 10 to 60 (14 to 140F) (with no freezing) 10 to 100C (14 to 212F) Fluid temperature Splash-proof (equivalent to IP65) Enclosure Location without corrosive or explosive gases Environment 0 (with oil pressure) Valve leakage cm3/min Unrestricted Mounting position 24VDC, 12VDC, 100VAC, 110VAC, 200VAC, 220VAC, 230VAC (50/60Hz) 100VAC, 200VAC, 220VAC, 230VAC

212

Regulator for Chemical Liquids New New Compatible with acid, alkali and DI water Fluid temperature MAX.212F (100c) Set pressure range 2.9 to 58 psi (0.02 to 0.4 MPa) Material Body New PFA Diaphragm PTFE Housing/End plate PVDF No-slide diaphragm eliminates particle generation. Integral fittings type/ tube extensions type are available.

Lock-Up Valve IL201/211/220 Series

How to Order IL 02 201 Action Suffix 201 Single acting 211 Double acting 220 3 Port Accessories Nil Standard T High temperature (5 to 100C) L Low temperature (30 to 60C) S External parts copper-free Nil None B With bracket Thread type Port size ST External parts copper-free/ High temperature (5 to 100C) Nil Rc N NPT* 02 1/4 IP F G* SL External parts copper-free/ Low temperature (30 to 60C

Precision Regulator

Pressure gauge is shipped together, but not assembled. 811 IR1000/2000/3000 Series How to Order IR 2 0 0 02 0 Precision regulator Thread type Body size Nil N Note 2) Rc NPT Suffix 1 1 2 3 IR1000 series IR2000 series IR3000 series Nil G F For high temp. environments (5 to 100C) For low temp. environments (30 to 60C) T Note 4) Semi-standard Type of setting L Note 5), 6) 0 1 Note 1) Basic

Safety Instructions

TD1075 10 7.5 TD1209 12 9 4 2.5 H 10 m 20 m Roll KK Color Fluid Note 1) D Flexibility: Improved by approx. 20% * SMC comparison (Fluoropolymer tubing, Series TL/TIL) Insert fitting Miniature fittings M, MS series (Hose nipple type) Fluoropolymer fitting LQ1 series MS Applicable fittings Note 2) Applications: Food, semiconductor, medical, automobile and machine tools fields LQ 20C 100C

Magnet: D (Built-in), Mounting: B (Through Hole), Overall Length: Standard, Bore Size: 056 (9/16"), Stroke: 200 (2"), Body Option: Standard (Rod End Female Thread), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Through Hole), Overall Length: Standard, Bore Size: 056 (9/16"), Stroke: 062 (5/8"), Body Option: Standard (Rod End Female Thread), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: Built-in, Mounting: Through Hole, Overall Length: Standard, Bore Size: 9/16", Stroke: 2", Body Option: Standard (Rod End Female Thread), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, X Option: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Magnet: Built-in, Mounting: Through Hole, Overall Length: Standard, Bore Size: 9/16", Stroke: 5/8", Body Option: Standard (Rod End Female Thread), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, X Option: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

RS2H-OM0045P

DC AC 0.5 1 3 5 () (M) (L) (Z) M9NV M9N IC 3 NPN 5V 3 PNP M9PV M9P 12V 2 12V M9BV M9B M9NWV M9NV IC 3 PNP M9PWV M9PW 3 NPN 5V 12V 2 2 12V M9BWV M9BW 24V M9NAV M9NA IC 3 PNP M9PAV M9PA PLC 3 NPN 5V 12V 2 2 12V M9BAV M9BA 2 2 P3DW 3 NPN A96V A96 IC 12V 100V A93V A93 2 24V 5V 100V A90V A90 IC PLC 12V 0.5m D-M9N M 1m D-M9NM L 3m D-M9NL Z 5m D-M9NZ 1 17 - 7-2. -1516

MHC2

Electrical entry direction Lead wire length (m) Flexible lead wire (-61) Applicable load 0.5 (Nil) 3 (L) 5 (Z) DC AC Special function Electrical entry Indicator light Wiring (Output) Perpendicular In-line Type Grommet Yes 3-wire (NPN) 3-wire (PNP) 2-wire 24 V M9NV M9PV M9BV M9N M9P M9B Relay PLC Standard 12 V Solid state switch Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL