Table of Contents

-X210 Non-lubricated exterior specifications RZQ -X324 Non-lubricated exterior specifications (With dust seal) -X431 Switch rail mounting on both sides (With 2 pcs.)

REA/REB

-X210 Non-lubricated exterior specifications RZQ -X324 Non-lubricated exterior specifications (With dust seal) -X431 Switch rail mounting on both sides (With 2 pcs.)

Environment

150 Lead 5: LEY63C LEC Y Lead 10: LEY63B 100 Lead 20: LEY63A Motorless 50 LAT 0 0 200 400 600 800 1200 1000 Speed [mm/s] LZ Allowable Stroke Speed [mm/s] LC3F2 Model AC servo motor Lead Stroke [mm] Symbol [mm] 30 50 100 150 200 250 300 350 400 450 500 600 700 800 A 12 900 600 B 6 450 300 C 3 225 150 LEY25 Motor mounting position: Top/Parallel, In-line 100 W /40 (Motor rotation speed) (4500

KT10

series Vespel (Option: PEEK) PCTFE Wetted Parts Body Surface finish Inlet filter Piston and trim Seat, main valve Seat, vent valve 2500 17.2 13.8 2000 Delivery pressure (MPa) Delivery pressure (psig) Viton (Option:Polyurethan, Buna-N, Ethylene propylene) O-ring 1500 10.3 Rings, back up PTFE 1000 6.9 Dimensions inch (mm) KT10 3.4 500 2.25 (57.2) 0.0 0 0 500 1000 1500 2000 2500 3000 3500 4000 4500

Slider Type Ball Screw Drive/11-LEFS Series

Operating condition Model LC3F2 A LEC-MR-RB-032 B LEC-MR-RB-12 Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 B 6 450 360 270 210 160 LEFS25 100 W /l40 (Motor rotation speed) (4500 rpm

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 Up to 1300 Up to 1400 Up to 1500 H 24 1800 1580 1170 910 720 580 480 410 A 16 1200 1050 780 600 480 390 320 270 LEJS40 100 W/ m40 B 8 600 520 390 300 240 190 160 130 (Motor rotation speed) (4500 rpm

Micro-Mist Separator with Prefilter Series AMH

---I -~ _:_::-::: : ::-0.7ipa ~,,:-~~.'. "". 0~~1~00 ~~2~0~~~ ~ 0 30~0-4~OLO-~50~0~~60~0 0 1500 3000 4500 6000 7500 Air flow rate Qlmin (ANR) Air flow rate Qlmin (ANR) AMH350 AMH850 0.5MPa )7MPa I I // ",0.06I-Air pressure 0.3MPa '" 0.06 Inlel air pressure 0.3MPa / a. V o/pa ~pa ::;; a. V~V ::;; Q) /-Y :; ~0 . 04 '// ~ / /,/ ~ 0.04

Series AP3100

Specifications AP3100 AP3102 AP3150 AP3157 AP3125 Select compatible materials of construction for the gas Operating Parameters Gas Vacuum to 3000 psig (20.7 MPa) 1) Vacuum to 1300 psig (9.0 MPa) Vacuum to 3000 psig (20.7 MPa) 1) Operating pressure Vacuum to 1300 psig (9.0 MPa) Proof pressure Burst pressure Ambient and operating temperature Cv 3) 4500 psig (31 MPa) 10 psig (69 MPa) -40 to

Series AP3500

Select compatible materials of construction for the gas Operating Parameters Status Gas Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv 2) Vacuum to 3000 psig (20.7 MPa) 1) Vacuum to 1300 psig (9.0 MPa) 4500 psig (31 MPa) 10 psig (69 MPa) 14 to 149F (10 to 65C) (No freezing) 1.0 0.7 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 3) Ra max

Cooling Capacity: 050 [Cooling Capacity: 4500/5000 W (50/60 Hz)], Pipe Thread: N (NPT with PT-NPT Conversion Fitting Set), Option: V (Stainless Steel Panel Specification)

Cooling Capacity: 050 [Cooling Capacity: 4500/5000 W (50/60 Hz)], Pipe Thread: Rc, Option: V (Stainless Steel Panel Specification)

Cooling Capacity: 050 [Cooling Capacity: 4500/5000 W (50/60 Hz)], Pipe Thread: N (NPT with PT-NPT Conversion Fitting Set), Option: None

Cooling Capacity: 050 [Cooling Capacity: 4500/5000 W (50/60 Hz)], Pipe Thread: N (NPT with PT-NPT Conversion Fitting Set), Option: LTV (L + T + V)

Cooling Capacity: 050 [Cooling Capacity: 4500/5000 W (50/60 Hz)], Pipe Thread: F (G with PT-G conversion Fitting Set), Option: V (Stainless Steel Panel Specification)

Cooling Capacity: 050 [Cooling Capacity: 4500/5000 W (50/60 Hz)], Pipe Thread: N (NPT with PT-NPT Conversion Fitting Set), Option: LV (L + V)

Cooling Capacity: 050 [Cooling Capacity: 4500/5000 W (50/60 Hz)], Pipe Thread: N (NPT with PT-NPT Conversion Fitting Set), Option: BV (B + V)

AC

AL5000 AF2000 AR2000 AL2000 Air filter Combination equipment AR4000-06 Regulator AL4000-06 Lubricator 1/8 1/4 1/4 3/8 1/4 3/8 3/4 1 1/4 3/8 1/2 1/8 1/8 1/4 1/4 1/4 1/4 1/4 3/4 1 1 M5 X 0.8 Port size 1/8 1/16 Gauge port size Fluid Air 1.5 MPa 1.0 MP Proof pressure Max. operating pressure 0.05 to 0.85 MPa 0.05 to 0.7 MPa Set pressure range 90 (M5 X 0.8) 500(1/4) 1500(3/8) 2000(3/8) 4000(1/2) 4500

IDU/IDF

320 375 IDF11C 650 750 IDF15C 1025 1200 50Hz 60Hz (131) (68) Motor operated auto drain Model Air flow capacity (l/min (ANR)) 50/60Hz IDF22C1 1575 1850 IDF75C 5250 6200 [Condition IDF1D] Pressure: 0.7MPa, Saturation: 35C Ambient temperature: 32C, Outlet air temperature: 10C [IDF2D to 75C] Pressure: 0.7MPa, Saturation: 40C, Ambient temperature: 32C, Outlet air temperature: 10C IDF55C 3825 4500

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

NVFR4100 NVFB4200 NVFR4300. 4400. 4500 o Gasket NBR vF4000-20 vF4000-20 vF4000-20 Valve mounting bolt Steel MT335-1-1 1 {M4X40) AXT335-1-11 (M4X40) MT335-1-11 {M4X40) Pilot Ass'y SF4KFx-70 (E Series NVFR40O0:Base Mounted Tlpe 2 position single:NvFF4100-OF 3 PositionlDimensians PIug-in 2 Position 2 position double:l{VFR4200-oF 3 posilion closed center:NVFRrBoo-OF 3 position exhaust center

AC Servo Motor Driver (SSCNET /H Type)

. -20 to 120 C 16 Settling time The settling time are displayed. 0 to 32767 ms 17 Oscillation detection frequency The frequency at oscillation detection is displayed. 100 to 4500 Hz 18 Number of tough drive operations The times moving to the tough drive is displayed. 0 to 65535 times 19 Unit power consumption The unit power consumption is displayed. -2147483648 to 2147483647 W 20 Unit total