HRX-OM-W038

6000 Ambient Ambient temperature temperature 5000 5000 or or Cooling capacity[W] facility water temperature Cooling capacity[W] facility water temperature 4000 4000 3000 25 25 3000 32 32 40 40 2000 2000 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz *The cooling capacity will be reduced by 300W when option: T and

HRX-OM-O021

6000 or or facility water facility water 5000 5000 temperature temperature 4000 4000 25 25 3000 3000 32 32 2000 2000 40 40 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500

HRX-OM-R005

6000 temperature temperature 5000 5000 25 25 4000 4000 32 3000 3000 32 2000 2000 40 40 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-4 Cooling capacity(HRS060--20-(BJM)) 1. 5 1. 5 1. 5 1. 5 1. 5 1. 5 kW kW kW kW kW kW 1 1 1 1 1 1 0. 5 0. 5 0. 5 0. 5 0. 5 0. 5 0 0 0 0 0 0 9.5 Heating capacity 0 2 0 2 0 2

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

min 2 200 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PFMC(-L) Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PF2A 1 10 0.1 L/min 0.5 L/min 5 50 Thermal type Air N2 1 L/min 10 100 (Thermistor) 2 L/min 20 200 5 L/min 50 500 PF3A H(-L) 30 3000 Body ported type 2 L/min Thermal type (Platinum sensor) 6000

3

L/min 10 Air N2 Argon CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 20 2000 PFMC 5 500 Thermal type (MEMS) New New Dry air N2 1 L/min 10 1000 Bypass flow type 20 2000 PF2A 1 10 0.1 L/min 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal type (Thermistor) Air N2 5 L/min 50 500 5 L/min 150 3000 300 6000

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Angle Seat Valve

For Air 1.6 1.4 Upstream pressure of valve P1 Downstream pressure P2 [MPa] 1.5 MPa 1.6 MPa 1.2 1.3 MPa 1.4 MPa Subsonic 1.0 Critical pressure 1.2 MPa 1.1 MPa 0.8 1.0 MPa 0.9 MPa 0.8 MPa Sonic 0.6 0.7 MPa 0.6 MPa 0.5 MPa 0.4 0.4 MPa 0.3 MPa 0.2 0.2 MPa 0.1 MPa 0 VXB215A D(H) 10 12000 14000 8000 2000 4000 6000 VXB215B E(H) 16000 14000 10 12000 8000 2000 4000 6000 VXB215C F(H) 10 2000 6000 8000

AC Servo Motor Driver

30 AP 1 1 1 1 Minimum command unit 1pulse AL 1 1 1 1 QD75 AM 1 1 1 1 Electronic gear AP 4000 20 6000 30 Minimum command unit 0.1 m AL 100.0[ m] 100.0[ m] 100.0[ m] 100.0[ m] AM 10 10 10 10 Note.

Modular F.R.L. Unit

6000 8000 2000 10 0 0 Flow rate L/min (ANR) Flow rate L/min (ANR) AC40 Rc 1/2 Specific Product Precautions 0.6 0.5 Outlet pressure MPa Mounting and Adjustment Air Supply 0.4 Caution 1.

Modular Type Lubricator Series AL

Drip failure can cause damage to the components that need lubrication. 0.04 0.02 0 0 2000 4000 6000 8000 Flow rate L/min (ANR) 51 Lubricator AL10 to 60 Construction AL10 AL20 w w e q q t IN OUT IN OUT y y r u u AL30, 40 AL50, 60 w w q t q e e t IN OUT OUT IN y r i r u y u Parts list Description Material Note No.

Delivery Pressure: P [50 to 6000 psig (0.34 to 41.4 MPa)], Relieving: 1 (Self-relieving, Standard), Material: B (Brass), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: 60 [6000 psig (41 MPa)], Gauge Port, Outlet: 60 [6000 psig (41 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material: VitonÂ

Compact

Acceleration [mm/s2] 0 250 1 500 2 1000 3 1500 4 2000 5 2500 6 3000 7 4000 8 5000 9 6000 10 7500 11 10 12 12500 13 15000 14 17500 15 20 Note) The factory default setting for the switch is No.0.

Modular Type Lubricators Series AL

Note that the numbered scale markings are guidelines for adjusting the position, and not indicators of the dripping amount. 0.1 Pressure drop (MPa) 0.08 P1 = 0.7 MPa P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.1 MPa 0.06 0.04 0.02 0 0 2000 4000 6000 8000 Flow rate (L/min (ANR)) Caution 1. Check the dripping amount once a day.

Micro-Mist Separator with Prefilter Series AMH

--"i,, _ , .. " ... .::;::.. , 0 3000 6000 9000 12000 15000 Air flow rate Qlmin (ANR) rr ---:--~!'--.. -. .,.. -_---0.7MPa .:':: .,.' ..".'

CLA

Retaining Force Of Air Pressure Lock-up 0100 1574 (7000) 1346 (6000) / ~?p>. .-~ --_1 124 (5000) ,/ /. / --/./-.P: 2 ;;; 900 (4000) !

Angle Seat Valve /

For Air 1.6 1.4 Upstream pressure of valve P1 Downstream pressure P2 [MPa] 1.5 MPa 1.6 MPa 1.2 1.3 MPa 1.4 MPa Subsonic 1.0 Critical pressure 1.2 MPa 1.1 MPa 0.8 1.0 MPa 0.9 MPa 0.8 MPa Sonic 0.6 0.7 MPa 0.6 MPa 0.5 MPa 0.4 0.4 MPa 0.3 MPa 0.2 0.2 MPa 0.1 MPa 0 VXB215A D(H) 10 12000 14000 8000 2000 4000 6000 VXB215B E(H) 16000 14000 10 12000 8000 2000 4000 6000 VXB215C F(H) 10 2000 6000 8000

Delivery Pressure: P [50 to 6000 psig (0.34 to 41.4 MPa)], Relieving: 1 (Self-relieving, Standard), Material: C (300 SS Series), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: 60 [6000 psig (41 MPa)], Gauge Port, Outlet: 60 [6000 psig (41 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material

Delivery Pressure: P [50 to 6000 psig (0.34 to 41.4 MPa)], Relieving: 0 (Non-relieving), Material: C (300 SS Series), Ports: 4P (4 Ports), Connections: 4 (NPT 1/4 Inch), Gauge Port, Inlet: 60 [6000 psig (41 MPa)], Gauge Port, Outlet: 60 [6000 psig (41 MPa)], Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Main Valve Seat Material: Vespel®, Standard, O-ring Material: Viton®,

Digital Flow Switch ( compatible)

0x04C4 P1H(n1H) (Upper limit of window comparator) Setting of OUT1 output set value (Upper limit of window comparator) S16 2400 Y Setting range -200 to 4200 4 R/W WH1 (Window comparator hysteresis) Setting of OUT1 hysteresis (Window comparator) S16 400 Y Setting range 0 to 2200 5 R/W 6 R/W dtH1 (Delay time at ON) S16 0 Y Setting of OUT1 delay time at ON 10 ms increment Setting range 0 to 6000

Digital Flow Switch ( compatible)

0x04C4 P1H(n1H) (Upper limit of window comparator) Setting of OUT1 output set value (Upper limit of window comparator) S16 2400 Y Setting range -200 to 4200 4 R/W WH1 (Window comparator hysteresis) Setting of OUT1 hysteresis (Window comparator) S16 400 Y Setting range 0 to 2200 5 R/W 6 R/W dtH1 (Delay time at ON) S16 0 Y Setting of OUT1 delay time at ON 10 ms increment Setting range 0 to 6000