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3 1(P) 3(R) (P)1 VV061 Flow rate characteristics Flow Rate Characteristics/Weight VV100 Weight (g) 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Operating pressure range (MPa) Port size Valve model C [dm3/ (sbar)] C [dm3/ (sbar)] C [dm3/ (sbar)] C [dm3/ (sbar)] V100 Grommet b Cv b Cv b Cv b Cv S070 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.44 0.27 0.27 0.44 0.27 0.26 0.24

3 R 3 P 1 1 P A 4 X A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 2-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n2-One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 6 U side D side (L4) Applicable connector: 26 pin MIL type with strain relief (conforms to MIL-C-83503) L3 Connector entry direction switch 101.2 (3.2)

demand = 1000 n/min (N)VBA2, (N)VBA4 C H A R G E C H A R A C T E R I S T I C S NVBA1 C H A R G E C H A R A C T E R I S T I C S Charging time for 10l t(s) Charging time for 10l t(s) Pressure increase ratio (P2/P1) Pressure increase ratio (P2/P1) These graphs illustrate the time required to inrease pressure in a closed tank e.g.

A) 2 1 (A P) Flow characteristics Weight (g) Operating pressure range (MPa) 1 2 (P A) 2 3 (A R) Port size Valve model C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet 0.44 0.40 0.40 0.44 0.40 0.41 0.63 0.63 0.41 0.63 0.13 0.10 0.10 0.13 0.10 0.20 0.14 0.14 0.20 0.14 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.47 0.38 0.38 0.47

Single vane type Double vane type , , 0 -5 Chamfer 0 +4 0 9 a 0 a r r n n e n n g g g o o e e n i i 0 t t 1 a a 2 a 8 r t 1 t 7 +4 0 o o 0 0 n R R +4 0 +4 0 e o 0 i g t a 9 n t a o e r R g n n o a ti r a n t o o ti R a t o R Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer. +5 0 +

Single vane type Double vane type , , 0 -5 Chamfer 0 +4 0 9 a 0 a r r n n e n n g g g o o e e n i i 0 t t 1 a a 2 a 8 r t 1 t 7 +4 0 o o 0 0 n R R +4 0 +4 0 e o 0 i g t a 9 n t a o e r R g n n o a ti r a n t o o ti R a t o R Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer. +5 0 +

Single vane type Double vane type , , 0 -5 Chamfer 0 +4 0 9 a 0 a r r n n e n n g g g o o e e n i i 0 t t 1 a a 2 a 8 r t 1 t 7 +4 0 o o 0 0 n R R +4 0 +4 0 e o 0 i g t a 9 n t a o e r R g n n o a ti r a n t o o ti R a t o R Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer. +5 0 +

Female thread type (M3) is available by option [C] for PE port of the vacuum pump system. When option [C] is selected for valve type R, operating conditions below apply. Select the type with release pressure supply port (PD) as an option.

Symbol Name Initial value Unit PC02 *ZTY Home position return type 0h PC03 *ZDIR Home position return direction 0001h PC04 ZRF Home position return speed 500 r/min PC05 CRF Creep speed 10 r/min PC06 ZST Home position shift distance 0 m PC07 *ZPS Home position return position data 0 10STM m PC12 JOG Jog speed 100 r/min PC24 *COP3 Function selection C-3 0h PC30 *DSS Remote register-based position

Please change the parameter in the initial setting. *3 The minimum unit of the travel distance of the actuator should be 1 [m]. *4 When the motor mounting position is right side parallel (LEY*R / LEYG*R) or left side parallel (LEY*L / LEYG*L), the rotation direction selection is 0(+: Counter motors side). -28- LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) 20 10 5 20 10 5 (Including

All data given in a technical specification sheet is based on 25[C]. The temperature range is dependent on the product series. Normally SMC products are rated from 0 to 50[C] or 0 to 60[C].

When the motor mounting position is right side parallel (LEY*R / LEYG*R) or left side parallel (LEY*L / LEYG*L), the rotation direction selection is 0(+: Counter motors side). 29 - LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) (Including pulley 20 10 5 20 10 5 (Pulley ratio) ratio 4/7) Parameter *1,*2 Para.

Stations 1 station MADE IN JAPAN C US TYPE1 R EX500-IE1 (PNP) 1 24VDC/60mA/IP65 8-point integrated type, M8 connector, PNP specifications C US TYPE1 R EX500-IE1 (PNP) 24VDC/60mA/IP65 TYPE1 EEX500-IB1-M6 1 set EX500-IE1 4 sets EX500-IE3 2 sets 24VDC/60mA/IP65 MADE IN JAPAN C US TYPE1 R EX500-IE1 (PNP) MADE IN JAPAN C US TYPE1 8-point integrated type, M8 connector, NPN specifications R MADE

Symbol: A0 Symbol: A1 Symbol: A2 Symbol: A3 DA C0.5 C 30 30 H H W1 T H A H Symbol: A4 Symbol: A5 Symbol: A6 Symbol: A7 RD B RD AL MM AL MM 30 H L 30 30 30 H L W H H Symbol: A8 Symbol: A9 Symbol: A10 Symbol: A11 C0.5 file chamfer AL B MM Made to Order Auto Switch WA C R sphere TP R sphere DC 30 H W1 T H H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 R sphere C0.5 DA DA AL MM DA C

(A) 4 (B) 2 (A) 4 (B) 2 C: Locking type (Manual) C Note) 5 (R1) 3 (R2) 1 (P) Function 5 (R1) 3 (R2) 1 (P) N.C N.O Standard type (1 W) High pressure type (1.0 MPa) Negative COM External pilot Low wattage type (0.5 W) Nil K N R Y Seal type 3 position closed center Note) For rubber seal type only.

It is necessary to set it on the PLC side according to the kind of PLC. 38 - 6.3 The recommended value of the parameter [LEY] LEY25/ LEYG25 LEY25D/ LEYG25D LEY32/LEYG32 LEY32D/ LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Initial value Recommended value Parameter *1,*2 Para.

Be aware that there is an increase in the leakage voltage particularly if a C-R element (surge voltage protector) is used for protecting the switching element, because the leakage current flows through the C-R element.

EXH) Valve stations 4(A), 2(B) port location Port size 1(P), 3/5(R) port 4(A), 2(B) port M5 x 0.8, C4, C6 Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size 1(P), 5/3(R) port Manifold 2 (B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200