Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only)

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)

Rated Flow Range: 2 to 200 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: NPT1/4, Output Specification: Out 1: PNP; Out 2: PNP, Lead Wire: Lead Wire w/Connector + Rubber Cover for Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/Flow Adjustment Valve, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 200 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: NPT1/4, Output Specification: Out 1: PNP; Out 2: PNP, Lead Wire: Lead Wire w/Connector + Rubber Cover for Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Panel Mount Adapter, w/Flow Adjustment Valve, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 200 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/4, Output Specification: Out 1: PNP; Out 2: PNP, Lead Wire: Lead Wire w/Connector + Rubber Cover for Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: Calibration Certificate, Made to Order: -

Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: NPT1/4, Output Specification: Out 1: PNP; Out 2: PNP, Lead Wire: Lead Wire w/Connector + Rubber Cover for Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/Flow Adjustment Valve, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 200 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/4, Output Specification: Out 1: PNP; Out 2: PNP, Lead Wire: Lead Wire w/Connector + Rubber Cover for Connector, Unit Specification: SI Unit Only, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 200 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/4, Output Specification: Out 1: PNP; Out 2: PNP, Lead Wire: Lead Wire w/Connector + Rubber Cover for Connector, Unit Specification: SI Unit Only, Bracket/Panel Mount Adapter: Bracket, w/o Flow Adjustment Valve, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: L2 (Out 1: IO-Link or NPN/PNP, Out 2: NPN, PNP, or Input), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: None, Made to Order: X731 (Compatible

Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/4, Output Specification: Out 1: IO-Link or NPN/PNP, Out 2: NPN, PNP, or Input, Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/o Flow Adjustment Valve, Calibration Certificate: None, Made to Order: Compatible with Argon and Carbon

DOC1003077

Sep W AW BW CW DW EW FW . Danger In extreme conditions, there is a possibility of serious injury or loss of life. When the circulating fluid temperature is low, do not operate it at a low Oct X AX BX CX DX EX FX . flow rate. It may freeze circulating fluid in the product when used at low temperature and low flow rate. Nov y Ay By Cy Dy Ey Fy .

HEC-OM-Y008

If the fluid is left inside, an accident and damage can result during transportation. 700 Warning If instructions are not followed there is a possibility of serious injury or loss of life. 700 Sep W yW ZW AW BW CW DW . Ambient temp. 35 deg.C Heating Capacity W Heating Capacity W Ambient temp. 35 deg.C 600 600 Oct X yX ZX AX BX CX DX . Nov y yy Zy Ay By Cy Dy .

HEC-OM-S019

ZW AW BW . Mar Q QQ RQ SQ . ZQ AQ BQ . Feb P QP RP SP . ZP AP BP . May S QS RS SS . ZS AS BS . Aug V QV RV SV . ZV AV BV . Jan o Qo Ro So . Zo Ao Bo . Nov y Qy Ry Sy . Zy Ay By . 2012 2013 2014 . 2021 2022 2023 . Year Jun T QT RT ST . ZT AT BT . Dec Z Qz RZ SZ . ZZ AZ BZ . Apr R QR RR SR . ZR AR BR . Jul U QU RU SU . ZU AU BU . Month Q R S . Z A B . Oct X QX RX SX . ZX AX BX .

CEx-OMI0064

10100ms (+150ms) ms 300ms 150ms ON ON OFF 10~100ms 10100ms *8 RS-232C ,CEU5 CEU5 2 , ,2 *9 () ,DC 1 , 2.5s ,3s *10 30ms ON 24 - ,,, ,, , 2ROM) 7-4 (E 2ROM (1)E / 2ROM ,E RS-232C NO. 2ROM , ON,E 2ROM ,E 2ROM 80 ,LCD E2FUL SMC (2)E , (3),,LCD E2Err 25 - 8 RS-232C 8-1 RS-232C 1200,2400,4800,9600,19200bps ASCII 1 7 1 8-2 (1) VR DR DW PR PW FR FW SR SW OR OW IR IW BR BW

CEx-OMB0060

DW Writing preset data PR Reading pre-scale setting PW Writing pre-scale setting FR Reading indication offset setting FW Writing indication offset setting SR Reading cylinder stop output setting SW Writing cylinder stop output setting OR Reading output type setting OW Writing output type setting IR Reading input type setting IW Writing input type setting BR Reading count backup setting BW

HEC-OM-U015

ZW AW BW . Oct X TX UX VX . ZX AX BX . Output shut off alarm function If installing a tank externally, only a sealed tank should be used. Do not The product has a self-check function that can detect faults with the product and interrupts the output to the thermo modules, stopping operation (However, operation continues with ERR 15 and ERR 18).

HEC-OM-R008

ZW AW BW . Oct X TX UX VX . ZX AX BX . Nov y Ty Uy Vy . Zy Ay By . Normal When high head pump option selected Dec Z Tz UZ VZ . ZZ AZ BZ . 5 Installation Continued 5 Installation Continued 6 Operation Continued 7 Outline Dimensions (mm) 6.3.1 Level 1Settings HECR002 HECR002-A5-E(option) No.

Copper-free Actuators

cylinder Series CDQS (Note 2, 3) 20-CDQS Standard 2.2-2 20-CDQS Standard long stroke SCQSl 2.2-10 20-CDQSW Double rod 2.2-30 20-CDQSlS Anti-lateral load Air cylinder Series C(D)M2 20-CM2l Standard 1.4-3 20-CM2lA Standard with air cushion SCM2l 1.4-22 20-CM2W Double rod 1.4-50 20-CM2K Non-rotating rod 1.4-66 20-CM2R Direct mounting Air cylinder Series M(D)B 1.7-6 20-M(D)B Standard 20-M(D)BW