Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: 1/4, Output Specification: Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V, Lead Wire: w/o Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/Flow Adjustment Valve, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: NPT1/4, Output Specification: Out 1: PNP; Out 2: PNP, Lead Wire: w/o Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/Flow Adjustment Valve, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: NPT1/4, Output Specification: Out 1: PNP; Out 2: PNP, Lead Wire: Lead Wire w/Connector + Rubber Cover for Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/Flow Adjustment Valve, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: NPT1/4, Output Specification: Out 1: IO-Link or NPN/PNP, Out 2: NPN, PNP, or Input, Lead Wire: w/M12 Conversion Lead Wire and Connector, 0.1m, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/Flow Adjustment Valve, Calibration Certificate: -, Made to

Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: 1/4, Output Specification: Out 1: NPN; Out 2: NPN, Lead Wire: Lead Wire w/Connector + Rubber Cover for Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/Flow Adjustment Valve, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: ø8, Output Specification: Out 1: PNP; Out 2: PNP, Lead Wire: w/o Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/Flow Adjustment Valve, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: ø8, Output Specification: Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V, Lead Wire: Lead Wire w/Connector + Rubber Cover for Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/Flow Adjustment Valve, Calibration Certificate: -, Made

Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: ø8, Output Specification: Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V, Lead Wire: w/o Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/Flow Adjustment Valve, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: F2 (G1/4), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

2/3 Port Valve

Solenoid valve (Port size) D, T G, C S S L, Z S L, Z T 1 (2mm) 2 (3mm) 3 (4.5mm) 4 (6mm) 5 (8mm) 6 (10mm) VX21 VX22 VX23 (1) 01( ) 02( ) 02( ) 03( ) 04( ) 02( ) 03( ) 04( ) 1 8 1 4 1 4 1 4 3 8 1 2 AC 3 8 1 2 Ordering Example (Example) Series VX21, Orifice size 2 mm, Rc(PT)1/8, 100V AC Grommet. With surge voltage suppressor.

Series SV

For 3 stations Internal pilot specification Internal pilot/Built-in silencer External pilot specification External pilot/Built-in silencer Nil S R RS ... ... 20 For 20 stations Valve stations Series SV1000 Series SV2000 P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins 02 02 02 02 2 stations 2 stations 2 stations 2 stations

ZP3

L N S U F GN GS 02 13 5.5 2 KQ2H02-M3G Width across flats K ZP3 T 015 02 035 U J K 3 6 1.2 04 14.5 8 4 KQ2H04-M3G J Dimensions Per Vacuum Inlet: Barb Fitting Model J K Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

02 03 1 4 S 5 VDC 5 3 position pressure center Note 1) : Enter a symbol for cable length.

AC

Y60 Interface G36-10-01 G36-10-01G46-10-02 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G36-10-01 1.0MPa G27-10-R1 Pressure gauge (G27-10-R1)(4) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 0.2MPa AD43 AD43 AD44 AD44 AD44 AD44 AD44 N.O.

Table of Contents

ZF Symbol S Pad dia. 02 to 16 L 20 to 50 ZP ZCU With buffer AMJ Misc.

Speed Controller with One-touch Fitting

03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19

Table of Contents

ASR430F-02-08S(-F20) ASR430F-02-10S(-F20) ASR530F-02-06S(-F20) ASR530F-02-08S(-F20) ASR530F-02-10S(-F20) ASR530F-02-12S(-F20) ASR530F-03-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

P port 20 20 stations A, B port S Mount (Separated type) Top ported/Common EXH type Type 60 Applicable solenoid valve VF360-01 02 VV5F3 05 60 1 CYL (A, B) port VF363-01 02 Stations Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 02 2 stations 10 20 stations EXH