2 i e !0 o w !6 !5 !4 !3 y r t !1 RE A B REC CX CY A A MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G Enlarged view of A Component Parts RS H A Description No.
OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).
Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.
) Delivery pressure (psig) Delivery pressure (psig) 0.14 20 40 0.28 0.10 30 0.21 15 20 0.14 0.07 10 0.03 10 0.07 5 0.00 0 0.00 0 0 20 40 60 80 100 120 Flow rate (slpm, N2) 0 1 2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
Displays exact the same pressure values for all channels. kPa MPa Auto identification function (page 14) Can automatically identify the pressure range of a connected P/A sensor. CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.
M5 x 0.8 Axial port Side Ported [E] Auto switch mounting groove (4 locations) (except 10) End boss assembly D2 D1 B 5 A E Auto switch mounting groove (both sides) Refer to the dimension table.
Description Material Note 1 Body Aluminum alloy Anodized 2 Branch passage PPS 3 Gasket HNBR 4 Sensor base PPS 5 Gasket HNBR 6 Sensor Au, Pt, Al2O3 Dimensions A B 70 H F E D 1.5 OUT IN 4 x P L K 2 x Port size N Symbol Model Port size A B D E F H K L N P PF3A703H Rc1, NPT1, G1 130 45 79.1 55.3 22.5 25 35 60 30 M4 x 0.7 depth 7 PF3A706H Rc1 1/2, NPT1 1/2, G1 1/2 170 60 94.1 70.3 30 68 45
Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.
Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)
Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)
Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: NPT1/4, Output Specification: Out 1: NPN; Out 2: NPN, Lead Wire: Lead Wire w/Connector, Unit Specification: SI Unit Only, Bracket/Panel Mount Adapter: Bracket, w/Flow Adjustment Valve, Calibration Certificate: -, Made to Order: -
B 5 A E Auto switch mounting groove (Both sides) Refer to the dimension table. When auto switches are used, side mounting with through-holes is not possible.
Do not use a screwdriver with a large grip or with a tip that does not fit into the trimmer groove.
Applications $ Flow control of N2 gas to prevent lead frame oxidation $ Accumulated indication shows the operating flow rate or residual amount (of N2 etc.) in a gas cylinder. $ N2 blow prevents distortion of camera image due to air turbulence.
Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.
Fluid Name and Option Fluid Name and Option Option symbol and body material Brass or BC6 Stainless steel J A H A H A H D N G, J E P A H A H B J E N, P Option symbol and body material Brass or BC6 Stainless steel F, B L, J B J J A H A H A H D N G, J E P A H A H A H B J D, E N, P Fluid (Application) Fluid (Application) Caustic soda (25% ) Gas oil Silicon oil Fuel oil (up to 60C) Fuel oil (
A fire or explosion can result. Only dry air, N2, CO2 and Ar are applicable. Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.
During Auto tuning Auto tuning failure A T 1 E R R 1 9 P V < 2 3 . 0 C # 1 A T F a i l u r e A u t o T u n i n g M O D E S h u t O f f C a n c e l : A T k e y <4> External sensor sampling cycle setting: Mode indication External Sensor Sampling Cycle. Default value: 180 sec. Setting range 10 to 999 sec.
(Different side) 60+30(n2) n=2, 4, 6, 8 75+30(n2) n=2, 4, 6, 8 80+30(n2) n=2, 4, 6, 8 85+30(n2) n=2, 4, 6, 8 95+100(n2) n=2, 4, 6, 8 Other qty. (Same side) 90+100(n2) n=2, 4, 6, 8 100+100(n2) n=2, 4, 6, 8 105+100(n2) n=2, 4, 6, 8 110+100(n2) n=2, 4, 6, 8 65 1 switch 60 75 80 85 70 70 2 switches (Different side) 75 80 85 2 switches (Same side) 75 80 85 70+30(n2) n=2, 4, 6, 8 Other qty.