AC Servo Motor Driver (CC-Link Type)

power supply input terminal (U, V, W) to the driver power terminal (U, V, W) Connect the motor ground terminal to the driver ground terminal.

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) 1 5+ 40 ('=<') 15 (n >2) 45 23.5 25 25 bAs B6.type B (n ~ 2.4 _ l) 0.5 50.5 :"'Hs 43.5 15 +50( 0" ) 75 +55(n2) 15 75 ~ ' B6lype I><>S'KSlype 3.5 3.5 A 2 ( n ~ 2 . 4.~--' ) 10 26.5 25 26.5 D-G5 K5 type G 35+30(n-2) 35 100 100+ loo(n2) i D-A31ype 1><>3 ' K3 type 50.5 ~Hs 38 43.5 1.5 1.5 A 0 DA3 type 24.5 24.5 23 B 35+3O (n2) 5O+5O(n 2) 35 55 D-A4 type D-G3K3 type !

CV/MVGQ

A34 A44 B59W G59 G5P K59 G39 K39 G59W G5PW K59W G59F 100 V Relay, PLC PLC Yes Yes Relay, PLC 100 V, 200 V 12 V Terminal conduit PLC 24 V 2-wire 100 V 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) 24 V 5 V,12 V IC circuit 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 2-wire IC circuit Terminal conduit

CV/MVGQ

A34 A44 B59W G59 G5P K59 G39 K39 G59W G5PW K59W G59F 100 V Relay, PLC PLC Yes Yes Relay, PLC 100 V, 200 V 12 V Terminal conduit PLC 24 V 2-wire 100 V 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) 24 V 5 V,12 V IC circuit 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 2-wire IC circuit Terminal conduit

VXA21/22

Applicable Fluids Standard Option (1) Water (Standard, Up to 40C) Air (Standard, dry), Turbine oil Vacuum (Up to 1 Torr) Carbon dioxide (CO2), Nitrogen gas(N2) Freon11, 113, 114 Vacuum (Up to 103 Torr) (V, M) Non-leak (105 atm cc/sec or less) (V, M) Symbol N.C.

PFxx-OMP0001CN

(UP) (SET) (DOWN) LCD (OUT1)/ OUT1OUT2 ON ON/OFF (UP) (SET) ON/OFF (DOWN) -11No.PF-OMP0001CN-F F.S. () 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)( ) 90 () (0100) ()90ON(OFF) () 10 L/min 10 L ON OFF ON ()OFF () 0 -12No.PF-OMP0001CN-F , ,2 5 10 L/min 5 ,51050 L ON-OFF () 1 L/min ,101112 1 L/min SI SI ON-OFF ON 0 ripple -13No.PF-OMP0001CN-F

PFxx-OMS0001CN

F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)() 90 () (0100) ()90ON(OFF) 0 1 atm()[nor] () 10 L/min 10 L ON OFF ON OFF 0 -12No.PF-OMS0001CN-A , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L/min ,10 11 12 1 L/min SI SI ON-OFF ON 0 20 1 atm()[Anr] ripple -13No.PF-OMS0001CN-A 9022545 -14No.PF-OMS0001CN-A 2 0.50.7 Nm M4 (4 ) (71 ) M4 -15No.PF-OMS0001CN-A

PFxx-OMO0004CN

) ZS-33-JS () ZS-33-M () (3.02 ) ZS-33-MS () (3.03 ) ZS-33-R DIN 1 2 3 4 5 DIN F02(G/14)DIN -12No.PF-OMO0004CN-E (OUT) (IN) 1 2 2 INOUT DIN 1 2: LCD LED (UP) (SET) SET (DOWN) UP DOWN 3 ON/OFF (UP) 3 ON/OFF (DOWN) LED (OUT1)/ (SET) OUT1OUT2 OUT1ON OUT2ON 3 -13No.PF-OMO0004CN-E F.S. () 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF ()

PFxx-OMJ0005CN

NPN(1 )(15 V) PFM7--CNPN(1 )(420 mA) PFM7--DDC(+) OUT1 DC(-) Max.28 V80 mA 1 V C15 V 1 k D420 mA 600 50 NPN(1 ) PFM7--GDC(+) OUT1 DC(-) Max.28 V80 mA 1 V ()30 ms -18No.PF-OMJ0005CN-I PNP(2 ) PFM7--BDC(+) OUT1 OUT2 DC(-) Max.80 mA 1.5 V PNP(1 )(15 V) PFM7--EPNP(1 )(420 mA) PFM7--FDC(+) OUT1 DC(-) Max.80 mA 1.5 V E15 V 1 k F420 mA 600 50 PNP(1 ) PFM7--HDC(+) OUT1 DC(-) Max.80 mA

Proposals for Energy Saving

(equivalent to UL-94 Standard V-0) Inner tube I.D.

KT10

4 ports 4 ports V 4) Pressure gauge unit MPa or psig/bar selectable.

AC Servo Motor Driver (MECHATROLINK-II type)

Sink Circuit Source Circuit 24 V 24 V + DRIVER input + DRIVER input Input Signal Polarities Input Signal Polarities Level Voltage Level Voltage Signal Contact Signal Contact Level Level ON Low (L) ON High (H) 0 V Close 24 V Close level level OFF High (H) OFF Low (L) 24 V Open 0 V Open level level 14 - 2.3.3 Sequence Output Circuit Incorrect wiring or incorrect voltage application to the

AC Servo Motor Driver (MECHATROLINK-III type)

Sink Circuit Source Circuit 24 V 24 V + DRIVER input + DRIVER input Input Signal Polarities Input Signal Polarities Level Voltage Level Voltage Signal Contact Signal Contact Level Level ON Low (L) ON High (H) 0 V Close 24 V Close level level OFF High (H) OFF Low (L) 24 V Open 0 V Open level level 14 - 2.3.3 Sequence Input Circuit Incorrect wiring or incorrect voltage application to the

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: N2 (NPT1/4), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA)

Rated Flow Range: 1 to 100 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Rear Ported, Port Size: NPT1/4, Output Specification: Out 1: PNP; Out 2: Analog 4 to 20 mA, Lead Wire: -, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: W (With Flow Adjustment Valve, Rear Ported), Port Size: N2 (NPT1/4), Output Specification: A (Out 1: NPN; Out 2: NPN)

Clean Air Module

blow to prevent lead frame oxidation, N2 blow to prevent detection camera blur Prevents traces of water droplets.

AC Servo Motor Driver (Pulse input type)

Connect the motor power supply input terminal (U, V, W) to the driver power terminal (U, V, W).

Series AP3500

How to Order (Inlet) (Outlet) AP 3 S FV4 FV4 M 571 2PW 050 Size Code Cv 0.29 0.5 Metered flow 3 4 Metered adjusted flow in slpm Code Metered adjusted flow in slpm at 80 psig (0.55 MPa) N2.

Air Cylinder Series MB

2,4,6,8... 85 + 30 (n2) n = 2,4,6,8... 95 + 100 (n2) n = 2,4,6,8... 100 + 100 (n2) n = 2,4,6,8... 105 + 100 (n2) n = 2,4,6,8... 110 + 100 (n2) n = 2,4,6,8... 90 + 30 (n2) n = 2,4,6,8...