XM, XY

range D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) H0 5 to 60C 5 to 150C Nil M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch y Number of auto switches/Detecting position Detecting position Valve open/closed Valve open Valve closed Symbol Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Cylinder with Lock

C DA 30 30 30 H A A H H A H W1 T C Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM AL DA MM 30 30 30 30 MM MM H A H A H A C H A 36 MWB Series Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 RD 30 30 MM 30 DA MM 30 DA MM L DB DB C H A T H A T H A B W H A L K Symbol: A24 Symbol: A25 Symbol: A26 Symbol: A27 DA MM DA MM MM MM 30 30 H AL A H L A H AL H AL L K LB K Symbol: A28 Symbol: A29

5 Port Solenoid Valve, Series VQC

Polarity Terminal no. () L SOL. A SOL. A (+) () (+) 1 1 Station 1 Station 1 SOL. B SOL. B (+) () () (+) 2 2 SOL. A SOL. A (+) () () (+) 3 3 Flat ribbon cable connector assemblies (optional) Station 2 Station 2 SOL. B SOL. B (+) () () (+) 4 4 SOL. A SOL. A Cable length (L) Part no. (+) () () (+) 5 5 Station 3 Station 3 SOL. B SOL.

Rated Flow Range: 25 (0.3 to 25 L/min), Flow Adjustment Valve: None (Straight), Port Size: N7 (1/4), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration Certificate), Made to Order: X731 (Compatible with Argon and Carbon Dioxide Mixed

Rated Flow Range: 0.3 to 25 L/min, Flow Adjustment Valve: None (Straight), Port Size: 1/4, Output Specification: Out 1: IO-Link or NPN/PNP, Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: Calibration Certificate, Made to Order: Compatible with Argon and Carbon Dioxide Mixed Gas

C76

B A B 32 8 7 7 6 40 14 12 13 11 Aim at this number.

C76

reed switch and 1 mm or less in a solid state switch.

VK300

) 2 x Rc 1/8 (P port) 2 x Rc 1/8 (P port) Pg7 n1 x Rc 1/8 (A port) 2 x 4.5 (Mounting hole) 2A 2A 2A 35 19 (Pitch) 44.5 11 (Station 1) (Station n) (Pitch) n x Rc 1/8 (R port) L Dimension n L n: Stations 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369

VK300

tubing T0604 (A port) (A port) Refer to the above drawing for DIN terminal dimensions.

A

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

Vacuum Unit

VVQZ2000 CP ZK2 MP1C6 A L Dimensions No. 1 2 3 4 5 6 7 8 9 10 L Dimension 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 One-touch fitting assembly (Purchasing order is available in units of 10 pieces.)

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN

Table of Contents

ti n ti a g g n o a r ti a t e a e o n t t o g o r 1 1 Key e r r y 0 9 y y e 2 0 + 4 0 0 e e K 8 + 4 0 K K 0 + 4 0 + 4 0 0 0 Key Key 1 (40) e Key g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws Model CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 L Screw M6 48 M8 52 M8 60 M10 80 11-4-4 70 Series CRB1 Rotary

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

ti n ti a g g n o a r ti a t e a e o n t t o g o r 1 1 Key e r r y 0 9 y y e 2 0 + 4 0 0 e e K 8 + 4 0 K K 0 + 4 0 + 4 0 0 0 Key Key 1 (40) e Key g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws Model CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 L Screw M6 48 M8 52 M8 60 M10 80 11-4-4 70 Series CRB1 Rotary

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

ti n ti a g g n o a r ti a t e a e o n t t o g o r 1 1 Key e r r y 0 9 y y e 2 0 + 4 0 0 e e K 8 + 4 0 K K 0 + 4 0 + 4 0 0 0 Key Key 1 (40) e Key g n a r n o ti a t o r y e K (85) (40) (40) A port B port A port B port A port B port A port B port Direct Mounting of Body L 4 screws Model CRB1BW50 CRB1BW63 CRB1BW80 CRB1BW100 L Screw M6 48 M8 52 M8 60 M10 80 11-4-4 With One-touch Fittings

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

L-Bracket DIN Rail Mounting Bracket Adapter Brackets on both sides Brackets on both sides Direct mounting For use when the mounting surface interferes with the bonnet. L8 L8 x n pcs. + L16 x 2 + L26 x (n1) pcs. L8 x n pcs. + L17 x 2 + L26 x (n1) pcs. L8 L8 x n pcs. + L25 x 2 + L26 x (n1) pcs. L27 + L8/2 Bonnet Mounting surface Refer to page 6 for L8.

AC Servo Motor Driver (Pulse input type/Positioning type)

[PA06] [PA05]100P [PA07] Actuator lead L[mm] n1/n2 1 Ex.)

AC Servo Motor Driver (MECHATROLINK-III type)

No Servomotor Rotation Direction can Pn000 0 0001 (+Counter motors side ) Tuning-less Function Related Switch Pn170 1401 1401 Electronic Gear Ratio (Numerator) *1 Pn20E 4 65536 Electronic Gear Ratio (Denominator) *3 Pn210 1 1250 750 375 1500 1000 500 1875 1250 625 LEFS25(L,R) LEFS32(L,R) LEFS40(L,R) Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para.

AC Servo Motor Driver (MECHATROLINK-II type)

Initial value Recommended value No Servomotor Rotation Direction can Pn000 0 0001 (+Counter motors side ) Tuning-less Function Related Switch Pn170 1401 1401 Electronic Gear Ratio (Numerator) *3 Pn20E 4 65536 Electronic Gear Ratio (Denominator) *3 Pn210 1 1250 750 375 1500 1000 500 1875 1250 625 LEFS25(L,R) LEFS32(L,R) LEFS40(L,R) Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8

AC Servo Motor Driver (CC-Link Type)

Reset (RES) Keeping RY(n 1)A or RY(n 3)A (RES) ON for 50ms or longer RY(n 1)A RY(n 3)A 1 allows an alarm to be deactivated. Some alarms cannot be deactivated by Reset RY(n 1)A or RY(n 3)A (RES). (Refer to section 10.4.1.) If RY(n 1)A or RY(n 3)A (RES) is turned ON with no alarm occurring, the base circuit will not be shut off.