Modular F.R.L. Unit

AR60 AF + AFM + AR AC20C 1/8, 1/4 AF20 AR20 AFM20 AC25C 1/4, 3/8 AF30 AR25 AFM30 AC30C 1/4, 3/8 AF30 AR30 AFM30 AC40C 1/4, 3/8, 1/2 AF40 AR40 AFM40 AC40C-06 3/4 AF40-06 AR40-06 AFM40-06 AW + AFM AC20D 1/8, 1/4 AW20 AFM20 AC30D 1/4, 3/8 AW30 AFM30 AC40D 1/4, 3/8, 1/2 AW40 AFM40 AC40D-06 3/4 AW40-06 AFM40-06 Table of Contents Air Filter AF10 to 60 .

ZP

2 !0 !1 Component Parts o No.

Modular F.R.L. Unit

1 AF + AFM + AR 1/8, 1/4 AF20 AR20 AFM20 AC20C 1/4, 3/8 AF30 AR25 AFM30 AC25C 1/4, 3/8 AF30 AR30 AFM30 AC30C 1/4, 3/8, 1/2 AF40 AR40 AFM40 AC40C 3/4 AF40-06 AR40-06 AFM40-06 AC40C-06 AW + AFM 1/8, 1/4 AW20 AFM20 AC20D 1/4, 3/8 AW30 AFM30 AC30D 1/4, 3/8, 1/2 AW40 AFM40 AC40D 3/4 AW40-06 AFM40-06 AC40D-06 Table of Contents F.R.L.

Modular F.R.L. Units

to AFD40-06-A 0.01 m (99.9% filtered particle size) Outlet side oil mist concentration AFM20-A to AFM40-06-A Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) 2 3 AFD20-A to AFD40-06-A Max. 0.1 mg/m3 (ANR) (Before saturated with oil 0.01 mg/m3 (ANR) or less 0.008 ppm) 2 3 Rated flow [L/min (ANR)] 1 AFM20-A to AFM40-06-A 200 450 1100 AFD20-A to AFD40-06-A 120 240 600 Drain capacity [cm3] 8 25 45 Bowl material

ZP

tubing: 4 Width across flat 14 Applicable tubing: 4 Width across flat 14 Applicable tubing: 4 2 2 5 7 2 2 5 7 2 2 5 7 12 18 12 18 12 18 M12 x 1 M12 x 1 M12 x 1 33 33.2 33 33 Width across flat 14 Width across flat 14 Width across flat 14 1.8 11 10 1.8 17 16 1.8 1 1.2 1.2 13 14 ZP3-T10UM;-A12-06 [Weight: 18.1 g] ZP3-T13UM;-A12-06 [Weight: 18.2 g] ZP3-T16UM;-A12-06 [Weight: 18.3 g] Applicable

ZP

tubing: 4 Width across flat 14 Applicable tubing: 4 Width across flat 14 Applicable tubing: 4 2 2 5 7 2 2 5 7 2 2 5 7 12 18 12 18 12 18 M12 x 1 M12 x 1 M12 x 1 33 33.2 33 33 Width across flat 14 Width across flat 14 Width across flat 14 1.8 11 10 1.8 17 16 1.8 1 1.2 1.2 13 14 ZP3-T10UM;-A12-06 [Weight: 18.1 g] ZP3-T13UM;-A12-06 [Weight: 18.2 g] ZP3-T16UM;-A12-06 [Weight: 18.3 g] Applicable

Table of Contents

-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5

Table of Contents

How to Order Symbol 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D.

ZP

tubing: 4 Width across flat 14 Applicable tubing: 4 Width across flat 14 Applicable tubing: 4 2 2 5 7 2 2 5 7 2 2 5 7 12 18 12 18 12 18 M12 x 1 M12 x 1 M12 x 1 33 33.2 33 33 Width across flat 14 Width across flat 14 Width across flat 14 1.8 11 10 1.8 17 16 1.8 1 1.2 1.2 13 14 ZP3-T10UM;-A12-06 [Weight: 18.1 g] ZP3-T13UM;-A12-06 [Weight: 18.2 g] ZP3-T16UM;-A12-06 [Weight: 18.3 g] Applicable

CATALOG

110V No/2 Wire ACCESSORIES SWITCH BANDS FOR SWITCHES D-B7, D-B8, D-G7 ACCESSORIES SWITCH BANDS FOR SWITCHES D-B5, D-B6, D-G5, D-K5 ACCESSORIES SWITCH BANDS FOR SWITCHES D-C75, D-C8, D-H7 BM1-01 3/4 BM1-02 1 BM1-32 1 1/4 BM1-04 1 1/2 BM1-05 2 BM1-06 2 1/2 BA-01 3/4 BA-02 1 BA-32 1 1/4 BA-04 1 1/2 BA-05 2 BA-06 2 1/2 BMA1-020 3/4 BMA2-025 1 BMA2-032 1 1/4 BMA2-040 1 1/2 BMA2-050 2 BMA2-063

Table of Contents

KBE2-06 1 KBP2 1 KBP2 KB P 1 KBE2-06 Body size KBE2-06 KBV2-06 Model Plug: KBP Cap: KBC Component module KBV2-06 2 KBE2-06 2 KBN2 1 Model Model Bracket mounting thread M6 x 1 x 8 l KBC1 KBC2 KBC3 KBC4 KBP1 KBP2 KBP3 KBP4 KBN2 KBV1-06 Bracket mounting thread M6 x 1 x 8 l KBE2-06 KBV2-06 5 Bracket: KBX (P . 15-3-117) Component module KBP1 KBV2-06 1 KBV1-06 1 KBR2-1 1 KBH2-R2S 1 KBP1

Vacuum Pad

tubing: 4 Width across flat 14 Applicable tubing: 4 Width across flat 14 Applicable tubing: 4 2 2 5 7 2 2 5 7 2 2 5 7 12 18 12 18 12 18 M12 x 1 M12 x 1 M12 x 1 33 33.2 33 33 Width across flat 14 Width across flat 14 Width across flat 14 1.8 11 10 1.8 17 16 1.8 1 1.2 1.2 13 14 ZP3-T10UM;-A12-06 [Weight: 18.1 g] ZP3-T13UM;-A12-06 [Weight: 18.2 g] ZP3-T16UM;-A12-06 [Weight: 18.3 g] Applicable

Modular F.R.L. Unit

AR60 1 AF + AFM + AR 1/8, 1/4 AC20C AF20 AR20 AFM20 1/4, 3/8 AC25C AF30 AR25 AFM30 1/4, 3/8 AC30C AF30 AR30 AFM30 1/4, 3/8, 1/2 AC40C AF40 AR40 AFM40 3/4 AC40C-06 AF40-06 AR40-06 AFM40-06 AW + AFM AC20D 1/8, 1/4 AW20 AFM20 AC30D 1/4, 3/8 AW30 AFM30 AC40D 1/4, 3/8, 1/2 AW40 AFM40 AC40D-06 3/4 AW40-06 AFM40-06 Table of Contents F.R.L.

KJ

KBE2-06 1 KBP2 1 KBP2 KB P 1 KBE2-06 Body size KBE2-06 KBV2-06 Model Plug: KBP Cap: KBC Component module KBV2-06 2 KBE2-06 2 KBN2 1 Model Model Bracket mounting thread M6 x 1 x 8 l KBC1 KBC2 KBC3 KBC4 KBP1 KBP2 KBP3 KBP4 KBN2 KBV1-06 Bracket mounting thread M6 x 1 x 8 l KBE2-06 KBV2-06 5 Bracket: KBX (P . 15-3-117) Component module KBP1 KBV2-06 1 KBV1-06 1 KBR2-1 1 KBH2-R2S 1 KBP1

1

3 2 B 2 B 2 B 2 B 2 B PCI BUS IN BUS OUT 8 7 1 2 3 4 5 Valve stations For N, sizes are in inches.

Table of Contents

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

Speed Controller with Indicator

1F 0 U01 S 06 2 Applicable tubing O.D.

VM

VH421-02 to 06 VH431-02 to 06 3 (Exhaust center) Rc 3/4: 58 2 position 3 position 3 4 2 1 Flow direction 4(B) 90 45 45 Flow direction 2 (A) Flow direction 4(B) Flow direction 2 (A) VH422-02 to 06 VH432-02 to 06 2 (Position) N Rc 3/4: 185 1 2 VH6 VH600-06/10 9.7 3 (Exhaust center) 3/4, 1 Rc 1: 194 3 4 5-8-7 2 Series VH How to Order VH 2 0 1 02 1(P) port location Hand valve R L 1(P) port 180

Proposals for Energy Saving

with M5 thread Flow direction: Right to left With element service indicator Size 1/8 1/4 3/8 1/2 3/4 1 1 1/2 2 01 02 03 04 06 10 14 20 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B, 650 75B, 850 Rc NPT G 1/8 1/4 3/8 1/2 3/4 1 1 1/2 Nil J M R T Nil B C D Option Accessory Size Bore size RT T R JR JRT MR J MRT JT MT M 03 06 04 01 02 20 14 Size 10 2B, 150 4B, 250 8B, 350 11B, 450 22B, 550 37B

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5