Rated Flow Range: 12 (120 to 12000 l/min), Thread Type: Rc, Port Size: 20 (2), Output Specifications: DS (Out: NPN; Func: Analog Current Output <-> External Input), Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: M (SI Unit Only)

Rated Flow Range: 12 (120 to 12000 l/min), Thread Type: Rc, Port Size: 20 (2), Output Specifications: CS (Out: NPN; Func: Analog Voltage Output <-> External Input), Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: M (SI Unit Only)

Rated Flow Range: 12 (120 to 12000 l/min), Thread Type: Rc, Port Size: 20 (2), Output Specifications: FS (Out: PNP; Func: Analog Current Output <-> External Input), Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: M (SI Unit Only)

Rated Flow Range: 120 to 12000 l/min, Thread Type: Rc, Port Size: 2, Output Specifications: Out: NPN; Func: Analog Current Output <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 120 to 12000 l/min, Thread Type: Rc, Port Size: 2, Output Specifications: Out: NPN; Func: Analog Voltage Output <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 120 to 12000 l/min, Thread Type: Rc, Port Size: 2, Output Specifications: Out: PNP; Func: Analog Current Output <-> External Input, Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: SI Unit Only, Calibration Certificate: -

Rated Flow Range: 12 (120 to 12000 l/min), Thread Type: Rc, Port Size: 20 (2), Output Specifications: ES (Out: PNP; Func: Analog Voltage Ouput <-> External Input), Lead Wire: w/Lead Wire and M12 Connector, 3m, Unit Specification: M (SI Unit Only), Calibration Certificate: A (Made to Order)

Table of Contents

Material Polyolefin (Equivalent to UL-94 standard V-0) 0 20 0 20 40 60 Note) The color of all inner tubing is black.

Thermo-chiller/Rack Mount Type

0 5 10 15 20 25 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] HRR050-A-20, HRR050-W-20 0.5 Circulating fluid pressure [MPa] Outlet: 60 Hz 0.4 0.3 Outlet: 50 Hz Return port Return port (Option Z) 0.2 Allowable operating range 0.1 0 0 10 20 30 40 Circulating fluid flow rate [L/min] Required Facility Water Flow Rate 012 018 024 030 HRR -W HRR010-W-20 30 20 Facility

energy saving effect

-A-20/40HRSH150-W-20/4025 25 Facility water temperature 32C Ambient temperature 32C 20 20 Cooling capacity [kW] Cooling capacity [kW] 15.7 15.7 15 15 Ambient temperature 43C 10 10 Facility water temperature 40C Ambient temperature 45C 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH200-A-20/40HRSH200-W-20/4030 30 Ambient

Thermo-chiller

25C Ambient temperature 2C 0.5 0.5 Ambient temperature 2C 0 0 15 20 25 Circulating fluid temperature [C] 15 20 25 Circulating fluid temperature [C] HRLE050-W-20 HRLE050-W-20 [50 Hz] [60 Hz] 2 2 Heating capacity [kW] Heating capacity [kW] 1.5 1.5 Facility water temperature 25C, 32C, 40C Facility water temperature 25C, 32C, 40C 1 1 0.5 0.5 0 0 15 20 25 Circulating fluid temperature [C] 15

HRL

-Am-20 (CH1) HRL100-Am-20 (CH1) 0.6 0.6 60 60 0.5 0.5 50 50 Circulating fluid outlet Circulating fluid outlet 0.4 0.4 40 40 Usable flow rate range Usable flow rate range 0.3 0.3 30 30 0.2 0.2 20 20 Circulating fluid return port 0.1 0.1 10 10 Circulating fluid return port 0 0 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump

Thermo-chiller

x Width 925 x Depth 955] HRS150-W -20-A 459 [208] HRS150-A-20 4.

HRS100/150

[C] HRS100-W-20/40(60 Hz) HRS100-W-20/40(50 Hz) 14 14 Facility water temperature 32C 12 12 Cooling capacity [kW] Cooling capacity [kW] Facility water temperature 32C 10 10 8 8 6 6 4 4 Facility water temperature 40C Facility water temperature 40C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRS150-A-20/40(50 Hz) HRS150-

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

53

time 1 min 30 s 20 s Max.

Lightweight and Compact

min 30 s 20 s Max.

SMC Basic Pneumatics

6 1 20 o.174 o.2t7 0.260 0.304 0.347 25 o.272 0.340 0.408 0.476 0.543 32 0.446 0.557 0.668 0.779 0.890 40 0.697 0.870 !.

%silltr

6 1 20 o.174 o.2t7 0.260 0.304 0.347 25 o.272 0.340 0.408 0.476 0.543 32 0.446 0.557 0.668 0.779 0.890 40 0.697 0.870 !.