SMC

Cn: ISO Class 3 ISO Class 2 ISO Class 1 1 N: Class no.(1 to 9), intermediate class (1.1 to 8.9) D: Measured particle diameter (m) 0.1:Constant number (m) 0.1 1 10 Particle diameter, D (m) Front matter 24 Series MXS 1322Air slide table 6, 8, 12, 16, 20, 25 How to Order Port type Bore size Symbol Type 6 to 16 M-thread Nil Clean series 20, 25 Rc 13 Vacuum suction type (Special treatment on guide

SMC Pneumatic Clean Series

Number of samplings Sampling method 0.5 to 5 m: Correction possible when it is sucked at a nonconstant velocity 108 Maximum concentration limit (particles/m 3) Considered particle diameter (m) 0.1 0.2 0.3 0.5 1 5 10 100 1000 10 10 10 Cleanliness class (N) 107 Airborne particle concentration, Cn (particles/m3) 106 2 24 237 2370 23700 237000 1 2 3 4 5 6 7 8 9 4 35 352 3520 35200 352000 3520

SMC Pneumatic Clean Series

Cn: ISO Class 3 ISO Class 2 ISO Class 1 1 N: Class no.(1 to 9), intermediate class (1.1 to 8.9) D: Measured particle diameter (m) 0.1:Constant number (m) 0.1 1 10 Particle diameter, D (m) Front matter 24 10-/1121-/22Series CM2 Air cylinder / 20, 25, 32, 40 How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2

SMC Pneumatic Clean Series

Cn: ISO Class 3 ISO Class 2 ISO Class 1 1 N: Class no.(1 to 9), intermediate class (1.1 to 8.9) D: Measured particle diameter (m) 0.1:Constant number (m) 0.1 1 10 Particle diameter, D (m) Front matter 24 Mini-free mount cylinder 6, 8, 10 1011Series CUJ How to Order Double acting 6 8 F8N 10 D C D UJB Number of auto switches Clean series Nil 2 pcs.

Dedicated Controller

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

44

M L M 17 17 33.6 7.6 17 17 37 8.5 22 22 39.4 9.3 Union Tee: KFG2T Applicable tubing size (mm) O.D.

Rotary Actuator/Vane Type

0 w y t q With auto switch (With auto switch unit and built-in magnet) * Refer to page 99 when the auto switch unit is needed separately. e Shaft type r Size o Electrical entry/Lead wire length 10 15 20 30 40 Nil Grommet/Lead wire: 0.5 m M Grommet/Lead wire: 1 m L Grommet/Lead wire: 3 m CN Connector/Without lead wire C Connector/Lead wire: 0.5 m CL Connector/Lead wire: 3 m * Connectors are

LEC-OM07605CN

5 1) () 4) CN3 CN 3 CNP1 (1) (1) 6) 6) CN8 CN 8 CN1A CN1A CNP2 2) CN1B CN1B CNP3 CN2 CN2 () CN4 CN4 (10m IP65) 15)16)17)18) 11)12)13)14) DC24V LE-7)8)9)10) 1.

A

S E R I E S E40-N04 4000 S E R I E S E40-N06 4000 S E R I E S E60-N06 5/6000 S E R I E S E60-N10 5/6000 S E R I E S mm Model Port size A B C E10-M5 M5x0.8 16 17.5 14 E20-N01 18 E20-N02 14 23 22 22 E20-N03 38 E30-N02 14 26 34.2 29 E30-N03 38 D I M E N S I O N S P I P I N G A D A P T O R E30-N04 12 40 34.2 29 E40-N03 38 33 42.2 35 E40-N04 12 E40-N06 34 50 42.2 35 E50-N06 34 36 44 46.2 E60-

Profile Design ISO/VDMA Air Cylinder Series CP95

Piping length [m] Air consumption Q [Nl/min.] 4 3 100 cylinder [mm] 40 50 63 80 2 2 100 100 Stroke [mm] Air consumption Q [Nl/min.]

Information

Bore size 12 to 25 Without auto switch, With auto switch CD hole H10 0.4 0.2 CX CL 4 x CN R M CT A + Stroke CW CZ Applicable Cylinders/Double Clevis Pivot Bracket Part No. (mm) Hexagon socket A CN part no.

2

Applicable thread Gasket M-3G2 M3 M-5G2 M5 M-6G M6 Brass Description Part no.

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m. Example) -2M9NL !

Aluminum High Vacuum Angle Valve

Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m.

XL

Operation of the main exhaust When pressure is applied the the actuation port M (7) on model XLD, or the main exhaust solenoid valve (26) is turned ON with port P in a pressurized state on model XLDV, the piston M (8) moves upward opening valve M (13). Port S (10) remains pressurized and valve S (18) remains open.

High Vacuum Angle Valve, XL Series

Operation of the main exhaust When pressure is applied the the actuation port M (7) on model XLD, or the main exhaust solenoid valve (26) is turned ON with port P in a pressurized state on model XLDV, the piston M (8) moves upward opening valve M (13). Port S (10) remains pressurized and valve S (18) remains open.

Ejector Valve Unit Series ZYY/ZYX 1

Z S 15 M ZX Series Wiring specifications (Vacuum switch) X3 SX3000 ZR Lead wire length 0.6 m Nil L C CL CN Grommet type Lead wire length 3 m Rated voltage ZM Lead wire length 0.6 m DC specifications Connector type Lead wire length 3 m Connector type 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC ZH Output specifications (Vacuum switch) ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

SMC Electronic Switch Series Variations

Hysteresis (m) Hysteresis (m) 0.1MPa 40 40 40 Supply pressure 30 30 30 0.1MPa 20 20 20 0.15MPa 0.15MPa 0.15MPa 10 10 10 0.2MPa 0.2MPa 0.2MPa 100 200 300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

TMH ASD AS Maximum return speed (mm/s) 100 200 300 Speed Controller Cylinder Solenoid valve Tubing Silencer AS-FE 6 ASD230FG CJ2 SYJ500 TU0604 1 m AN11001 KE 10 16 Cylinder size AS-FG AS-FG 20 ASD330FG CM2 SYJ700 TU0604 1 m AN11001 Cylinder size 25 AS-FP 32 Values at 0.5 MPa and 20C.