Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

2 3 Without cable With cable (1.5 m) With cable (3 m) With cable (5 m) VQ1000 VQ2000 1 2 N R Note 5) With name plate External pilot VQ1000 VQ2000 Symbol C3 Note 1) C4 Note 1) C6 Note 1) C8 Note 1) M5 CM Note 2) Note 3) MM Note 4) Note 1) When two or more symbols are specified, indicate them alphabetically.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

2 3 Without cable With cable (1.5 m) With cable (3 m) With cable (5 m) VQ1000 VQ2000 1 2 N R Note 5) With name plate External pilot VQ1000 VQ2000 Symbol C3 Note 1) C4 Note 1) C6 Note 1) C8 Note 1) M5 CM Note 2) Note 3) MM Note 4) Note 1) When two or more symbols are specified, indicate them alphabetically.

Table of Contents

Flat Ribbon Cable Assembly D-sub Connector Cable Assembly 10P 16P 20P Pins Cable length (L) 1.5 m 15P AXT100-FC10-1 AXT100-FC16-1 AXT100-FC20-1 Pins Cable length (L) 1.5 m 3 m AXT100-FC10-2 AXT100-FC16-2 AXT100-FC20-2 AXT100-DS15-1 5 m AXT100-FC10-3 AXT100-FC16-3 AXT100-FC20-3 3 m AXT100-DS15-2 17.2 24.8 30 5 m AXT100-DS15-3 Connector width (W) For other commercial connectors, use a type

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

SY

SS5Y71, #1 L type plug connector . SS5Y71, #1 + #10 M type plug connector .

CRB2/CRBU2/CRB1

P611070-1 P611090-1 P611060-1 P611080-1 P612010-1 P611010-1 P611070-1 P611090-1 P611060-1 P611080-1 P612010-1 P411020-1 P411030-1 P411040-1 P411050-1 Model Series Vane type Model CRB2BWU10 CRB2BWU15 CRB2BWU20 CRB2BWU30 Unit part no.

XM, XY

Standard lead wire length is 0.5 m. Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Ex.)

Cylinder with Lock

Bore size Dd9 L l m d (Drill through) Applicable split pin CD-M03*1 32, 40 10 0.040 0.076 44 36 4 3 3 x 18L CD-M05*1 50, 63 14 0.050 0.093 60 51 4.5 4 4 x 25L CD-M08*1 80, 100 22 0.065 0.117 82 72 5 4 4 x 35L Part no.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

1 N1 1 N1 11221122112211222 N2 2 N2 2 N2 2 N2 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D 1 N1 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D Specifications and dimensions other than the above are the same as the basic type (including narrow type).

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Note q w e Material Body Aluminum die cast Body Aluminum die cast Spool/Sleeve Stainless steel Spool valve Aluminum/NBR Piston Resin Piston Resin Replacement Parts Replacement Parts (1) L M G VQ110P --1 (H) (Y) Voltage1 to 6 (1) L M G VQ110P --1 (H) (Y) Voltage1 to 6 Pilot valve assembly r Pilot valve assembly r Note 1) (Y): 0.5W, (H): 1.5W DC only for G type.

VQC

Stations M8 connector M12 connector M8 and M12 mixed E T M 1 station 1 Note) When ordering an input block manifold, enter the Input manifold part no. + Input block part no. together.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

C76

1 !2 !3 !4 !5 !6 !7 1 1 1 1 1 1 1 q 2B 2D e r t y u i o !

C76

1 !2 !3 !4 !5 !6 !7 1 1 1 1 1 1 1 q 2B 2D e r t y u i o !

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

: Stations n2: Number of supply/exhaust blocks m : Weight of DIN rail Main valve, pilot valve common exhaust type W = 3.2n1 + 53n2 + m + 126.5 Pilot system Not required Lubrication Unrestricted Mounting orientation Note 1) Available with up to 16 solenoids.

5 Port Solenoid Valve, Series VQC

Kit type Thread type Port size F T Rc G NPT/NPTF 1 2 S Kit T Kit Symbol C3 C4 C6 C8 C10 C12 N1 N3 N7 N9 N11 M5 02 03 B T02 T03 G02 G03 VQC4000 Port size VQC2000 VQC1000 3.2 One-touch fitting 4 One-touch fitting 6 8 10 12 1/8" 5/32" 1/4" 5/16" 3/8" M5 thread Rc 1/4" Rc 3/8" Rc 1/4" bottom ported 1/4" NPT/NPTF 3/8" NPT/NPTF 1/4" G 3/8" G U-side end plate assembly 12 U-side end plate assembly

Table of Contents

D-LC05: Lead wire 0.5 m D-LC30: Lead wire 3 m D-LC50: Lead wire 5 m For the applicable auto switch model, refer to the table below. Applicabie Auto Switch/Refer to page 11-1-1 for further information on auto switches.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

D-LC05: Lead wire 0.5 m D-LC30: Lead wire 3 m D-LC50: Lead wire 5 m For the applicable auto switch model, refer to the table below. Applicabie Auto Switch/Refer to page 11-1-1 for further information on auto switches.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

D-LC05: Lead wire 0.5 m D-LC30: Lead wire 3 m D-LC50: Lead wire 5 m For the applicable auto switch model, refer to the table below. Applicabie Auto Switch/Refer to page 11-1-1 for further information on auto switches.

A

8 02 1/ 4 03 3/ 8 04 1/ 2 06 3/ 4 10 1 12 1 1/ 4 14 1 1/ 2 20 2 (A1 only) One Touch C06 6 (B1 only) C08 8 C10 10 C12 12 (A1 only) S Y M B O L S S E R I E S A1 Noise Reduction at 40dB(A) B1 Noise Reduction at 38dB(A) D I M E N S I O N S MODEL (THREAD CONNECTION) Model Port Size Effective Weight Dimensions (mm) orifice (mm2) (g) A B C ANA1-01 1/8 10 4 37 16 ANA1-02 1/4 15 14 64 22 18 ANA1