C76

Without magnet, Built-in magnet Bore Stroke B C95 CP95 NCM NCA D-X 20Data S + Stroke ZZ + Stroke (mm) AM 20 24 C 12 14 D 37.5 46.5 EE G 1/8 G 1/4 F 42.4 52.4 FF M6 x 1 depht 11 FX 30 36 G1 22 27 G2 9 12 H 36 40 K 10 12 KK M10 x 1.5 M12 x 1.75 N1 29 38 N2 17 22 NB 34.5 42.5 NDh8 S 80 105 SW 17 19 WH 16 16 ZZ 116 145 Bore 26 0 0.033 32 40 32 0 0.039 M8 x 1.25 depht 14 6-10-39 40 Series C76R

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

to 150) Atmospheric pressure to 1 x 10-6 Operating pressure Pa Conductance l/s Note 1) 14 45 80 160 200 5 1.3 x 10-10{1 x 10-10} at ambient temperature, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperature, excluding gas permeation External Operating time s 0.05 0.1 0.21 0.24 0.26 0.28 KF (NW), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF

XM, XY

x 10-6 up to atmospheric pressure Operating pressure (Pa)(abs) Conductance (L/s) Note 1) 14 45 80 160 200 5 1.3 x 10-10 {1 x 10-10} at ambient temperature, excluding gas permeation (Standard material: FKM) Internal Leakage (Pam 3/s) 1.3 x 10-11 {1 x 10-11} at ambient temperature, excluding gas permeation (Standard material: FKM) External Operating time (s) 0.1 0.21 0.24 0.26 0.28 0.05 KF

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

N1: 1/8 N3: 5/32 N7: 1/4 Y Note 2) Note 1) When specifying two or more options, enter symbols in alphabetical order.

1

Example: Full scale reading 100 [kPa] Setpoint for output 50 [kPa] Repeatability 1 [% F .S.] F.S. = 100 [kPa] 0 [kPa] = 100 [kPa] 1 [% F .S.] = 100 [kPa] x 0.01 = 1 [kPa] The deviation from the setpoint is 1 [kPa]. This means that the output can become energized anywhere between 49 to 51 [kPa]. (Refer to the chart below.)

VK300

Solenoid direction Port size Opposite side of A port Nil 1 8 Rc G NPT NPTF 01 Rc Nil C4 4 cassette F N T Same side of A port S C6 6 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station CE-compliant VV061 20 20 stations Q CE-compliant Nil P port: Rc 1/8 R port: Rc 1/8 VV100 Note) Applicable only for DIN terminal

VK300

side of A port Nil 1 8 01 Rc VFN Nil Rc G NPT NPTF C4 4 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 F N T Same side of A port S C6 6 cassette Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station 20 20 stations P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH How to Order Type 21: Body ported (A port top ported) Applicable solenoid valve

A

1 Drain Port 3/4 3/4, 1 D I M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT

Table of Contents

unit) Size S Nil 1 pc. 20 30 40 With angle adjuster 2 pcs.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Number of auto switches S Nil 1 pc. With auto switch (With switch unit) 2 pcs. Right-hand auto switch will be used for actuators with 1 auto switch.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

unit) Size S Nil 1 pc. 20 30 40 With angle adjuster 2 pcs.

AC Servo Motor Driver (Pulse input type/Positioning type)

[PA06] [PA05]100P [PA07] Actuator lead L[mm] n1/n2 1 Ex.)

VQC

A Station 1 1 SOL. A Station 2 14 SOL. A Station 3 2 VQD 1 SOL. A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 8 9 10 11 12 13 Station 5 16 17 18 19 20 21 22 23 24 25 SOL. B 16 SOL. A 4 Station 6 SOL. B DIN rail mounting bracket [-D] VVQ1000-57A for {F, L, M, P, S (EX500) kit} VVQC1000-57A-S for {S (EX250) kit} VVQC1000-57A-T for {T, S (EX126) kit} 17 SOL. A 5 Station 7 SOL. B 18 SOL.

AC Servo Motor Driver (CC-Link Type)

Symbol Name PA06 CMX Electronic gear numerator 1 0 to 65535 PA07 CDV Electronic gear denominator 1 1 to 65535 Set the values as follows. 1 [PA06] M = 1000 [PA07] Actuator lead (L) [mm] n1/n2 M : [Servo motor resolution : 262144(Pulse/rev)] n1/n2: Pulley ratio *1 EX.)

AC Servo Motor Driver (CC-Link Type)

Symbol Name PA06 CMX Electronic gear numerator 1 0 to 65535 PA07 CDV Electronic gear denominator 1 1 to 65535 Set the values as follows. 1 [PA06] M = 1000 [PA07] Actuator lead (L) [mm] n1/n2 M : [Servo motor resolution : 262144(Pulse/rev)] n1/n2: Pulley ratio *1 EX.)

AC Servo Motor Driver (Pulse input type)

Travel amount per 1 command pulse (P=10m) Actuator lead (L = 6mm) Pulley ratio (n1/n2 = 1/1) [PA05] = 0(Initial value) 1 26214410 1000 [PA07] [PA06] = 6 1/1 1 = = 26214410 [PA07] [PA06] 1 61000 32768 [PA07] [PA06] 75 1 *1 For pulley ratio, refer to Lead of LECSB Operation Manual (Simplified Edition), section 5.3.4.

Serial Transmission System Series EX250 Series EX500

(SD0) Without input block With 1 input block 0 1 Ports 2, 4 size (inch) Ports 2, 4 Symbol N7 N9 N11 NM Ports 1, 3, 5 1/4" One-touch fitting 5/16" One-touch fitting 3/8" One-touch fitting Mixed 8 With 8 input blocks 1: 1/2 3, 5: 3/4 Note) When an AS-i compatible S kit is used, there is a limit on the maximum number of stations.

Vacuum Unit

is available in units of 1 piece.)

AC Servo Motor Driver (MECHATROLINK-III type)

resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)

AC Servo Motor Driver (MECHATROLINK-II type)

resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)