3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

: VQZ2 2(R)Y -N3T, N7T, M5T Indicator light 87 MAX.10 300 (Lead wire length) 83 Applicable cord O.D.

V

(N)VV4Z1 20 S TAT I O N S 1 T H R E A D T Y P E 02 2 Stations to 20 20 Stations PT 00T NPTF D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D M P L U G T Y P E F Bracket O P T I O N D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D G R O M M E T T Y P E Lead Wire Length ACCESSORIES M A N I F O L D T Y P E 20 T O P P O R T E D DXT170-25-1A Blanking Plate Assembly

ISO Cylinder

7.5 18 25 29 15 30 26 0 0.033 79 17 14 26 115 Front side mounting: Cl85RBF/Y B 20/25 Stroke Width across flats SW G1 EE KK (WH) EE G2 4 x FF ND h8 NA NA F FX Width across flats K C 3 AM F FX N2 NA NA H N1 ZZ + Stroke S + Stroke Head cover axial port Boss-cut/Basic [mm] Dimensions Bore size AM C EE F FF FX G1 G2 H K KK N1 N2 NA ND S SW (WH) ZZ 20 20 8 G 1/8 30.4 M5 x 0.8 depth 9 22 22 8 30

CM2

CA2 ND hole H10 Axis d9 CS1 C76 C85 C95 MM A H L NX2 ND U2 Y Z R2 Bore size (mm) 20 25, 32 40 +0.2 +0.1 9 18 41 25 M8 x 1.25 9 10 14 11 66 CP95 +0.2 +0.1 9 22 45 25 M10 x 1.25 9 10 14 14 69 +0.3 +0.1 16 24 50 49.7 M14 x 1.5 12 13 25 13 92 NCM Double Knuckle Joint NCA Y-020B, Y-032B Material: Rolled steel Y-040B Material: Cast iron D-X ND hole H10 Axis d9 ND hole H10 Axis d9 20Data Applicable

Table of Contents - Tubing

Color indication Longer lengths available upon request Color Black White Red Blue Yellow Green Symbol B W R BU Y G The inner tubing are all black.

SZ3000

1 i q w t y e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3C60K/With back pressure check valve 4(A) 2(B) SOL.b 5(R) SOL.a 3(R) 1(P) o 5 (R) 1 (P) 3 (R) Component Parts SZ3A60K/With back pressure check valve Material Note For N.C. (Normally closed) Description No. q w e r t y u i o Resin/HNBR Spool valve assembly e r t !0 !1 i q q u y For N.O.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

When an electric current is applied to the molded coil r, the armature t is attracted to the core y, and through the push rod u, it pushes down the spool valve w. Then, port P and port A are connected. At this time, there will be gaps between the armature t and the core y, but the armature will be magnetically attracted to the core y. Caution 1.

Table of Contents

1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

Sine Cylinder Series REC

R2 U2 Y Z A Bore (mm) 20 25, 32 40 0.2 0.1 9 18 41 25 M8 x 1.25 9 10 14 11 66 0.2 0.1 9 22 45 25 9 10 14 14 69 M10 x 1.25 0.3 0.1 16 24 50 49.7 12 13 25 13 92 M14 x 1.5 Double Knuckle Joint Y-020B, Y-032B Material: Rolled steel Y-040B Material: Cast iron REA Shaft hole hole REB Shaft REC CY (mm) Retaining ring Cotter pin Applicable pin part no.

Sine Cylinder Series REC

R2 U2 Y Z A Bore (mm) 20 25, 32 40 0.2 0.1 9 18 41 25 M8 x 1.25 9 10 14 11 66 0.2 0.1 9 22 45 25 9 10 14 14 69 M10 x 1.25 0.3 0.1 16 24 50 49.7 12 13 25 13 92 M14 x 1.5 Double Knuckle Joint Y-020B, Y-032B Material: Rolled steel Y-040B Material: Cast iron REA Shaft hole hole REB Shaft REC CY (mm) Retaining ring Cotter pin Applicable pin part no.

LEC-OM02704CN

)0 RX(n1)1 RY(n1)9 RX(n1)9 RY(n1)A RES RX(n1)A ALM 15 RX(n1)B Ready CRD RY(n1)B RX(n1)C RY(n1)F RX(n1)F (RWwn) (RWrn) RWwn 1 RWrn 1 RWwn1 2 RWrn1 2 RWwn2 RWrn2 RWwn3 RWrn3 . n 3 11 3CC-Link (2) 2 RXn/RYn64RWrn/RWwn8 (RYn) (RXn) () () CN6 () () CN6 RYn0 ON SON RXn0 RD 14 RYn1 ST1 RXn1 INP RYn2 ST2 RXn2 CPO RYn3 DOG 2 RXn3 ZP 16 RYn4 LSP 3 RXn4 TLC RYn5 LSN 4 RXn5 RYn6

SMC Pneumatic Clean Series

X N1 Width across flats NA S + Stroke LS + Stroke N2 X Y LT LX LZ ZZ + Stroke (mm) H H2 H1 S P N1 I GB D A 8 13 AL F K MM NA NN B1B2 Bore size 54 47 47 40 B LH LT LS LX LD N2 Z ZZ 6.8 4 LC LZ X Y 31 26 26 26 GA 16 13 13 13 149 GC WA WB WC 34.5 30 24 33.5 28 7 5.5 5.5 5 8 8 8 50 45 45 41 36 31 31 31 6 6 6 6 6 6 5 M26 x 1.5 M26 x 1.5 M20 x 1.5 108 82 80 80 15 11.5 10.5 8.5 40 32 25 20 M14 x

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

MHZ

1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ MHZ2-40 1 MHZ2-40 2 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

R1/8 Piping adapter ZS-46-N1 A2 Bracket B (Horizontal mounting) u Option 3 NPT1/8 Symbol Operation manual*1 Calibration certificate*1 Nil Y K T N01 NPT1/8 Piping adapter ZS-46-N2 B Panel mount adapter *1 All texts are in both English and Japanese. Options/Part Nos. ZS-46-B When only optional parts are required, order with the part numbers listed below. Description Part no.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

NVV5Z5-4 2-( 05 ) 1 -r87T) Y -r.Stationsa asize ot A, B port E-?

Title not found

NVV5Z5-4 2-( 05 ) 1 -r87T) Y -r.Stationsa asize ot A, B port E-?

High Vacuum Angle Valve

Construction/Operation Auto switch (Option) Heater (Option) Pilot port (Pressurize to close) P-2 q Bonnet assembly (Maintenance parts)1 (Including w, e, y, u, i, o) Magnet (Option) Pilot port (Pressurize to open) P-1 r Exterior seal (Maintenance part)1 i Bellows holder (Material: Stainless steel 304) u Bellows assembly (Maintenance parts)1 (Including y, i) Bellows (Material: Stainless steel

V100

) (D, Y) VS N.C.

7

1 t VXZ o y o y IN(P1) !3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !