5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

insulation type 1 W DC (42 mA), 0.5 W DC (21 mA) (4) 24 VDC Power consumption (Current) 1 W DC (83 mA), 0.5 W DC (42 mA) (4) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 12 VDC Metal seal Rubber seal Note 1) Use dry air to prevent condensation when operating at low temperatures.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Component Parts SY w Description Material N.C. Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

W = 34n + m + 89 n: Number of SUP/EXH blocks m: Weight of DIN rail Note 1) In cases such as those where many valves are operated simultaneously, use type B (double side SUP/EXH), applying pressure to the 1(P) ports on both sides and exhausting from the 3(R) ports on both sides. Note 2) The weight W is the value for the manifold only.

smcmaintenancepartslist

Contents Bore size (mm) Set of left nos. #8, #9, $0, $1 #7 #8 #9 $0 $1 $2 Wear ring A Special resin 6, 10: Not available 6 CY1S6-PS-N Wear ring B Special resin Set of left nos. #8, #9, $0, $1, $2 10 CY1L10-PS-N Cylinder tube gasket NBR Guide shaft gasket NBR 15 20 25 32 40 CY1L15-PS-N CY1L20-PS-N CY1L25-PS-N CY1L32-PS-N CY1L40-PS-N Piston seal NBR Set of left nos. #7, #8, #9, $0, $1, $2 Scraper

Table of Contents

DC: 1 W (With indicator light: 1.5 W) AC Supply valve and release valve A Supply valve (N.O.)

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold

modular-press-e

OUT IN Model Optional specifications r w e t Bracket assembly Note 1) AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 AD17 N.C. N.O.

Modular F.R.L. Pressure Control Equipment

OUT IN Model Optional specifications r w e t Bracket assembly Note 1) AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 AD17 N.C. N.O.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

PA/B 3.6 (0.2) A/BR 3.24 (0.18) Rc(PT)1/8: Rc(PT) 1/4: M5: PA/B 3.42 (0.19) A/BR 3.24 (0.18) PA/B 3.6 (0.2) A/BR 3.6 (0.2) C4: C8 : C4: Valve effective area mm2 (Cv factor) Note 2) C6: C10: C6: C8: Manifold base weight W (g) Note 3) W = 65.4n + m + 128.2 W = 13n + m + 36 W = 41.2n + m + 77.6 (n: Number of SUP/EXH blocks, m: DIN rail weight) Note 1) In cases such as when many valves are operated

VZ100/300/500

1/8 Tube Nil Rc G NPT NPTF F N T 20 stations 20 One-touch fitting for 4 One-touch fitting for 6 A port M5 x 0.8, 1/8, C4, C6, B3, B7 One-touch fitting for 5/32" One-touch fitting for 1/4 Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port.

Modular F.R.L. Units

Applicable Model Applicable Model Model AF20-A AF30-A AF40-A AF40-06-A AF50-A AF60-A Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Model AF30-A AF40-A AF40-06-A AF50-A AF60-A Port size 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 30 AF A X425 2 03 B 30 AF A 2 03 B X430 q w t y e r For high pressure q w y e r t Semi-standard: Select one each for a to c.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

1 w !4 PF2M701/702(-L) PF2M711S(-L) !5 * There is no bypass construction for the 1 and 2 L ranges. Component Parts No.

High Vacuum Angle Valve

How to Order [Option] XLCV M9N A 16 1 G L Flage size 16, 25, 40 XLCV M9N A 50 1 1 G Flage size 50, 63, 80 XLCV q r t w y e u i o !1 !

Secondary Batteries

2 pcs. 1 pc. n pcs.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

to 12 stations 24 D side D-sub connector kit P kit Note 1) 1 to 12 stations 24 D side Flat ribbon cable connector kit 26P 20P ( ) 1 to 9 stations 18 J kit Flat ribbon cable (20P) PC wiring system compatible D side JD0 1 to 8 stations 16 Flat ribbon cable (20P) (PC wiring system compatible) D side U side D side U side D side U side LD0 (N) LU0 (N) LD1 (N) LU1 (N) LD2 (N) LU2 (N) SDF SDH

VDW30/40-XF

rated voltage Allowable voltage fluctuation Coil insulation type Class B 500 VDC, 10 M or more Insulation resistance Voltage limit 1800 VAC, 1 sec., 3 mA or less Simulation noise: 500 Vp-p (Based on 1 sec. pulse width, 50 10 Hz frequency noise simulation) Noise tolerance Note 3) Fast transient noise: IEC61000-4-4: 1 kV VDW30: 3 W (With 0.5 W power-saving circuit) VDW40: 6.5 W (With 1 W

5 Port Solenoid Valve SY Series

1/8 27.2 32.5 20.5 23 32.3 L plug connector: L SY5120-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector: M SY5120-M(-F ) DIN terminal (D): C4, N3 C6, N7 C8, N9 SY5120-W0(-F ) 1 2 M8 connector (W0): C4, N3 C6, N7 C8, N9 1 2 C4, N3 C6, N7 C8, N9 1 2 SY5120-D(-F ) 60.9 Applicable cable O.D. 3.5 to 7 (Lead wire length) Approx. 300 95.8 [98] 53.4 28.1 [35.1] 104.9 Max. 10 42.1 12.7 27 32.6 M8

VQC

COM External pilot Low wattage type (0.5 W) Nil K N R Y (A) 4 (B) 2 Note 1) C Note) 5 (R1) 3 (R2) 1 (P) Seal type 5 (R1) 3 (R2) 1 (P) Note 2) 0 1 N.C N.O Metal seal Rubber seal 3 position closed center Note) For rubber seal type only.

Serial Transmission System Series EX250 Series EX500

VDC 5 PEB EA N.C N.C 2 position double (metal) 4 position dual 3 port valve (B) 4 2 A B C: Locking type (Manual) BNote) Note 1) Function 1 5 3 Standard type (1 W) High voltage type (1.0 MPa) Negative COM External pilot Low wattage type (0.5 W) Nil K N R Y P EA EB N.O N.O 2 Note 2) 2 position double (rubber) 4 position dual 3 port valve (C) Seal 4 2 A B CNote) Note 3) 0 1 Metal seal Rubber