SZ3000

SZ3B60 [N.C. valve x 2 pcs.] 4(A) 2(B) r t !0 !1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

, 3(R) 4(A), 2(B) SQ1000 C8 C3, C4, C6, M5 12 stations Side, Top D side U side 1 2 3 stations Valves are numbered from the D side.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

VZS

Rc 1 4 VVZS3000-R-02-1 VVZS3000-R-02-2 Body type Plug-in type VVZS3000-10A-1 Non plug-in type VVZS3000-10A-2 Part no. Body type Plug-in type ARBZS3000-00-P-1 Non plug-in type ARBZS3000-00-P-2 Part no. Note) Apply pressure from the P port of the base to operate the interface regulator.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

of P and R port Type 40R Applicable solenoid valve SYJ514R-SYJ524R-How to Order SS3YJ5-40R-05 -01 R port 1/8 X port (External pilot type) Applicable blanking plate assembly SYJ500-10-3A P, R port thread type P port 1/8 R Stations A port size + + + + M5 x 0.8 02 : 20 2 stations : 20 stations P port 1/8 M5 01 M5 x 0.8 Nil Rc G NPT NPTF P A A X F N T 1/8 R P A port M5 x 0.8, 1/8 R port 1/8

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

P), 3(R) port] Applicable tubing O.D.: 8, 5/16" 13.3 (Pitch) P = 10.5 13.3 24 24 16.2 16.2 17 34 34 36.7 B 2 B 2 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 A 4 A 4 A 4 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" Applicable connector: 26 pin

VCC

Description C-w D-t C-t D-o F-e D-e D-r O-ring between manifold blocks VVCC12-OR-1 Special FKM O-ring 1 1 set unit VV2CC1 VV3CC1 VVMCC1 (common) 4 One-touch fitting One-touch fitting 1 VVCC12-50A-L1C4 1 set unit 6 One-touch fitting O-ring HNBR 1 VVCC12-50A-L1C6 O-ring O-ring Special FKM 1 1 set unit VVCC12-OR-3 O-ring Special FKM 2 O-ring assembly between port blocks VV3CC1 VVMCC1 1 set

VZ100/300/500

40R-2 40-2 40R-1 40-1 Model Manifold type Single base/B mount 21R-1 P(SUP)/R(EXH) Common SUP/Common EXH Valve stations 2 to 20 stations A port porting specifications Location Valve Bottom Top Rc Base Direction 1(P), 3(R) port Side 1 8 Rc 1 8 Rc 1 8 M5 x 0.8 M5 x 0.8 M5 x 0.8, Rc 1/8, C4 (One-touch fitting for 4), C6 (One-touch fitting for 6) M5 x 0.8 M5 x 0.8 Port size 2(A) port 1 8 X port

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

1 and 2 L ranges.

smcmaintenancepartslist

9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Table of Contents

ZX1-R1-1 ZX1-R1-3 ZX1-R16 4 pcs. (Ordering example) ZZX106-R 1 pc. (Manifold base) ZX100-K15LZ-EC 5 pcs. (Vacuum single unit) ZX-BM1 1 pc.

modular-press-e

1 !0 o !1 y y !2 !2 IN OUT IN OUT u r t i u r t i The numbers are the same as the "Construction" of the Best Pneumatics No.5 Series AWG. *BLUE links will lead to purchase pages. Replacement Parts Description Material Qty. Note Part no. No.

Modular F.R.L. Pressure Control Equipment

1 !0 o !1 y y !2 !2 IN OUT IN OUT u r t i u r t i The numbers are the same as the "Construction" of the Best Pneumatics No.5 Series AWG. *BLUE links will lead to purchase pages. Replacement Parts Description Material Qty. Note Part no. No.

Modular F.R.L. Units

Applicable Model Applicable Model Model AF20-A AF30-A AF40-A AF40-06-A AF50-A AF60-A Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Model AF30-A AF40-A AF40-06-A AF50-A AF60-A Port size 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 30 AF A X425 2 03 B 30 AF A 2 03 B X430 q w t y e r For high pressure q w y e r t Semi-standard: Select one each for a to c.

5 Port Solenoid Valve Series SQ1000/2000

Piping specifications Additional weight of 1 station g 5 station weight g Note 1) Port size Series Applicable solenoid valve Type of connection Applicable Base type stations P, R A, B Piping Port size C3 (for 3.2) C8 (for 8) C4 (for 4) Side SQ1000 C6 (for 6) J kit: Flat cable 1 to 8 stations SQ130 SQ131 420 20 Option SS5Q13Note 2) L3 (for 3.2) Built-in silencer Direct exhaust L4 (for 4) Top

ZR

06 ZZR1 R 1 R1 ZR1 1 1 RV ZR1 Port location Stations R L Left side Right side 01 1 Arrangement (Right valve station which is looked from valve side is first station.) Arrangement (Right valve station which is looked from valve side is first station.)

High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

Serial Transmission System Series EX250 Series EX500

Stations 1 station MADE IN JAPAN C US TYPE1 R EX500-IE1 (PNP) 1 24VDC/60mA/IP65 8-point integrated type, M8 connector, PNP specifications C US TYPE1 R EX500-IE1 (PNP) 24VDC/60mA/IP65 TYPE1 EEX500-IB1-M6 1 set EX500-IE1 4 sets EX500-IE3 2 sets 24VDC/60mA/IP65 MADE IN JAPAN C US TYPE1 R EX500-IE1 (PNP) MADE IN JAPAN C US TYPE1 8-point integrated type, M8 connector, NPN specifications R MADE

VQC

COM External pilot Low wattage type (0.5 W) Nil K N R Y (A) 4 (B) 2 Note 1) C Note) 5 (R1) 3 (R2) 1 (P) Seal type 5 (R1) 3 (R2) 1 (P) Note 2) 0 1 N.C N.O Metal seal Rubber seal 3 position closed center Note) For rubber seal type only.