Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold

VQZ1000/2000/3000

Rc 1/8 1(P) port L plug connector (L): VQZ2220 1(R)-L-C4/C6/M5 DIN terminal (Y): VQZ2220 1(R)-Y-C4/C6/M5 Indicator light 300 136.5 68 (Lead wire length) Pg.7 31 <36> 142.5 MAX.10 71.5 Applicable cable O.D.

Modular F.R.L. Units

Drain cock with barb fitting B B B B B B Dimensions Barb fitting applicable tubing: T0604 Width across flats 17 1/4 Width across flats 17 1/4 Width across flats 17 1/4 Standard specifications Model P1 P2 A B C E F G J K Bracket mount M N Q1 Q2 R S U V AC20C-B 1/8, 1/4 1/8 126.4 87.6 26.5 41.6 40 28.5 2 1 30 43.2 24 33 5.5 12 3.5 29 AC25C-B 1/4, 3/8 1/8 167.4 115.1 28 30 55.1 50 27.5 0 41

ZR

ZR1 W 20 S 1 Ejector exhaust Nozzle diameter 2 Individual exhaust 1 Built-in silencer 10 13 1.0 mm 1.3 mm Port size: RC 1/8 (Nozzle dia. 1.0 to 1.5 mm) RC 1/4 (Nozzle dia. 1.8, 2.0 mm) 15 1.5 mm 18 1.8 mm 20 2.0 mm Maximum vacuum pressure S L 84 kPa 53 kPa 13-3-9 9 Series ZR Ejector Unit/Standard Type (S): Max.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 8 Rc VSA4120-01 VSA4120-02 VSA4120-03 VSA4220-01 VSA4220-02 VSA4220-03 VSA4320-01 VSA4320-02 VSA4320-03 VSA4420-01 VSA4420-02 VSA4420-03 2 position single VA 1 4 1 8 Rc 0.60 1 8 Rc 1 8 Rc SA 2 position double 1 4 1 8 Rc 0.70 1 8 Rc VA 1 8 Rc 3 position closed center 1 4 1 8 Rc 0.86 VM 1 8 Rc Courtesy of Steven Engineering, Inc.-230 Ryan Way,

VQC

A Station 1 1 SOL. A Station 2 14 SOL. A Station 3 2 VQD 1 SOL. A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 8 9 10 11 12 13 Station 5 16 17 18 19 20 21 22 23 24 25 SOL. B 16 SOL. A 4 Station 6 SOL. B DIN rail mounting bracket [-D] VVQ1000-57A for {F, L, M, P, S (EX500) kit} VVQC1000-57A-S for {S (EX250) kit} VVQC1000-57A-T for {T, S (EX126) kit} 17 SOL. A 5 Station 7 SOL. B 18 SOL.

modular-press-e

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

Modular F.R.L. Pressure Control Equipment

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

Serial Transmission System Series EX250 Series EX500

(SD0) Without input block With 1 input block 0 1 Ports 2, 4 size (inch) Ports 2, 4 Symbol N7 N9 N11 NM Ports 1, 3, 5 1/4" One-touch fitting 5/16" One-touch fitting 3/8" One-touch fitting Mixed 8 With 8 input blocks 1: 1/2 3, 5: 3/4 Note) When an AS-i compatible S kit is used, there is a limit on the maximum number of stations.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

51 VQZ1000 2 to 20 stations l l Rc(PT) 1/8 lll In-line SY C4(4) C6(6) C8(8) Rc(PT)1/8 2 stations: 193 Addition per/ station: 54 VV5QZ25 VQZ2 50 VQZ2 51 VQZ2000 lll l l Rc(PT) 1/4 2 to 20 stations SYJ In-line SX 2 stations: 398 Addition per/ station: 102 1(P)port Rc(PT)3/8 35(R)port Rc(PT)1/4 C6(6) C8(8) C10(10) Rc(PT)1/4 l l VV5QZ35 VQZ3 50 VQZ3 51 VQZ3000 2 to 20 stations VK In-line lll

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (8 outputs) DeviceNet OMRON Corp.: CompoBus/S (16 outputs) OMRON Corp.: CompoBus/S (8 outputs) CC-Link S kit 1 to 8 stations 16 stations 16 1 to 4 stations 8 stations 8 D side 1 to 8 stations 16 stations 16 Serial transmission kit EX140 Integrated-type (For Output) Serial Transmission System 1 to 4 stations 1 to 8 stations 8 stations

Secondary Batteries

2 pcs. 1 pc.

VZ100/300/500

pilot VV3Z3-20-1 VZ32 1 8 0.47 0.43 0.13 0.74 0.32 0.19 M5 x 0.8 1 8 M5 x 0.8 0.71 0.98 0.71 1.00 0.68 1.00 0.52 0.36 0.49 0.37 0.35 0.27 0.21 0.25 0.2 0.26 0.17 0.25 0.81 0.92 0.80 0.96 1.00 1.00 0.28 0.24 0.23 0.25 0.25 0.30 0.20 0.22 0.19 0.24 0.24 0.26 VV3Z3-40-2 1 8 1 8 Base mounted For internal pilot 1 8 M5 x 0.8 VZ34 1 8 1 8 VV3Z3-40-1 1 8 1 8 C4 C6 Body ported For external pilot

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

more symbols are specified, indicate them alphabetically. (2) 01 [Rc 1/8] 02 [Rc 1/4] 02 [Rc 1/4] 03 [Rc 3/8] VQZ200 VQZ200-S(2) VQZ300 VQZ300-S(2) Note) Symbol R indicates an external pilot.

Table of Contents

m/s 2 in X, Y, Z directions, 3 times each (De-energized) 3% F .S. or less 1000 VAC for 1 min.

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: 2-way, Connecting Tube Diameter: 6, Liquid contact parts material: Resin + Metal, Mounting Hole: Presence, Display: