Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

Flow Rate Range: 50 [1 to 50 (25 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon or carbon dioxide. 2-color display flow switch., Sensor and monitor separation, which allows remote monitors' centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication also on the sensor., Fast response: either 50 ms, 0.5s, 1,

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)]

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 10～Less than 50, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [NPT] NPT, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance

ZP

A Width across flat 12 (Hexagon) A Width across flat 12 (Hexagon) B B 10.5 13.5 4 11 8 D 2.5 11.7 6.6 8.8 Dimensions Dimensions A B Model Rc1/8 NPT1/8 NPTF1/8 ZPT2-B01 ZPT2-N01 ZPT2-T01 A B D Model ZPT4-B6 ZPT4-B8 M6 x 1 M8 x 1.25 6.2 6.9 6.9 6 8 4.9 7.5 ZPT3-B5/B6 Adapter part no. ZPT4-B01/N01/T01 Adapter part no.

ZP

A Width across flat 12 (Hexagon) A Width across flat 12 (Hexagon) B B 10.5 13.5 4 11 8 D 2.5 11.7 6.6 8.8 Dimensions Dimensions A B Model Rc1/8 NPT1/8 NPTF1/8 ZPT2-B01 ZPT2-N01 ZPT2-T01 A B D Model ZPT4-B6 ZPT4-B8 M6 x 1 M8 x 1.25 6.2 6.9 6.9 6 8 4.9 7.5 ZPT3-B5/B6 Adapter part no. ZPT4-B01/N01/T01 Adapter part no.

ZP

A Width across flat 12 (Hexagon) A Width across flat 12 (Hexagon) B B 10.5 13.5 4 11 8 D 2.5 11.7 6.6 8.8 Dimensions Dimensions A B Model Rc1/8 NPT1/8 NPTF1/8 ZPT2-B01 ZPT2-N01 ZPT2-T01 A B D Model ZPT4-B6 ZPT4-B8 M6 x 1 M8 x 1.25 6.2 6.9 6.9 6 8 4.9 7.5 ZPT3-B5/B6 Adapter part no. ZPT4-B01/N01/T01 Adapter part no.

Table of Contents

D2 D3 L1 L2 L3 L4 M1 L5 Weight T D1 H(1) D2 D3 L1 L2 L3 L4 M1 L5 H(1) A(2) A(2) AQ Weight (g) (g) Model Min.

IIIIIII

H J K u 1 5 7 {40) 1 1 8 1 0 0 0 8 ( 3 0 1 0 2 ) 1 8510008 (47 lO 2t 1 3 2 {33 5) ) 7 1 I t a t 0 9 6 t24 E\ r 1 8 t30l 1 3 0 7 5 ) 0 7 5 fi9 0 008 o2l , 2 C (s) 224 157) Millimeters in Parentheses Millimeters in Parentheses NVM830-N01-13 Nylon Roller Loosen hex socket screw and adjust NVM830-N01-14 Rod may b6 bent: bending is 0 39" {1 omm) I I J F O F 0 5 1 l b s ( 0 2 3 k q ) F O F ' 4

Mechanical Valves Series NVM, NVFM, NVZNI

H J K u 1 5 7 {40) 1 1 8 1 0 0 0 8 ( 3 0 1 0 2 ) 1 8510008 (47 lO 2t 1 3 2 {33 5) ) 7 1 I t a t 0 9 6 t24 E\ r 1 8 t30l 1 3 0 7 5 ) 0 7 5 fi9 0 008 o2l , 2 C (s) 224 157) Millimeters in Parentheses Millimeters in Parentheses NVM830-N01-13 Nylon Roller Loosen hex socket screw and adjust NVM830-N01-14 Rod may b6 bent: bending is 0 39" {1 omm) I I J F O F 0 5 1 l b s ( 0 2 3 k q ) F O F ' 4

ZP

Vacuum inlet (Female thread) Width across flats E C B5 M5 x 0.8 B6 M6 x 1 B8 M8 x 1.25 B01 Rc1/8 N01 NPT1/8 T01 NPTF1/8 D A B2 Model A B2 C D E Vacuum inlet direction q Pad dia.

Tamper Proof and Flat Head Screw

(mm) 1in=25.4mm L4 D3 H (width across flats) T2 A L2 D1 L3 D2 T1 L1 Dimensions A Model T2 H D1 T1 D2 D3 L3 L1 L4 L2 AS12 0-M5-T M5 x 0.8 8 9 M5 x 0.8 9 4.5 10 31 10.3 0.7 28.4 AS12 0-U10/32-T 10-32UNF 10-32UNF AS22 0-01-ST Rc 1/8 12 14.3 R 1/8 AS22 0-F01-ST PF 1/8 14.6 7 18 35.6 14.1 1.5 32 AS22 0-N01-ST NPT 1/8 12.7 NPT 1/8 AS22 0-02-ST Rc 1/4 17 18 R 1/4 AS22 0-F02-ST PF 1/4 19.5 7 27.2

Compact and Lightweight

ZH2-TB208-A 8 M4 x 170 2 pcs. (ZH2-TB201-A)3 1 M4 x 30 2 pcs. Flat washer (for M4) 2 pcs. ZH2-TB302-A 2 M4 x 55 2 pcs. ZH2-TB303-A 3 M4 x 80 2 pcs. ZH18DA ZH20DA ZH2-TB304-A 4 M4 x 100 2 pcs. ZH2-TB306-A 6 M4 x 145 2 pcs. ZH2-TB308-A 8 M4 x 185 2 pcs. 1 Select only One-touch fitting if ZH ejectors are to be clamped.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 M5 x 0.8 AS221F-01 AS231F-01 R 1/8 AS221F-02 AS231F-02 R 1/4 AS321F-02 AS331F-02 R 1/4 AS321F-03 AS331F-03 R 3/8 AS421F-04 AS431F-04 R 1/2 AS121F-U10/32 AS131F-U10/32 10-32 UNF AS221F-N01 AS231F-N01 NPT 1/8 AS221F-N02 AS231F-N02 NPT 1/4 AS321F-N02 AS331F-N02

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover]

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C4 [ø4 (5/32") One-touch Fitting], Piping Entry Direction: L (Bottom), Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Z (w/o Lead Wire w/Connector)

(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: 2-way, Connecting Tube Diameter: -, Liquid contact parts material: Resin + Metal, Mounting Hole: Presence,