Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F02 (G1/4), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F02 (G1/4), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: G1/4, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment Valve: ZS-33-M

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: G1/4, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

1

) 3/4 [3(R) port] 1/2: 1/2" female thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 11.5 15.7 101.2 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 72 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (Pilot EXH port) 38.7 (6.5) 25 65.5 1/4, 3/8, C8, C10, C12 [4(A), 2(B)

CATALOG

1 1 1/4 115/16 5/8 3/4 9/16 3/8 11/32 325 (3.25) 1 3/4-16 1 1/8 3.9 1 1/2 1/2 3/8-24 3 3/4 0 1.57 2.76 2.34 2.72 8.94 1.57 11.69 6.82 1 3/8 1 1/2 2 7/16 7/8 1/2 27/64 400 (4) 1 3/4-16 1 1/8 4.7 1 1/2 1/2 3/8-24 4 1/2 0 1.57 3.32 2.34 2.72 8.94 1.57 11.69 6.82 1 3/8 2 1/16 2 7/16 7/8 1/2 27/64 H O W T O O R D E R S E R I E S N C A 1 A I R C Y L I N D E R O P T I O N S D U A L O P E R A T

V

8 Single NVFS2100 0.7 15 or less 2 Position 1/4 0.83 1/8 Double NVFS2200 13 or less 0.7 1/4 0.83 1/8 Closed NVFS2300 20 or less 0.65 1/4 Center 0.67 1/8 NVFS2400 20 or less Exhaust 0.65 3 Position 1/4 Center 0.67 1/8 NVFS2500 20 or less Pressure 0.65 1/4 Center 0.67 1/8 NVFS2600 25 or less Perfect 0.4 1/4 (Double Check) 0.4 T E C H N I C A L SPECIFICATIONS O P T I O N A L T E C H N I C A

Secondary Batteries

Standard Type 1(P): One-touch fitting 2(A): One-touch fitting Applicable tubing O.D. (mm) Bracket assembly no. 1(P) 2(A) 4 90-VHK-B1A 4 4 6 90-VHK-B1A 6 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): One-touch fitting 6 8 90-VHK-B1A 8 2(A) Applicable tubing O.D. (mm) 2(A) Applicable tubing O.D.

High-precision Digital Pressure Switch ( compatible)

Normal output Reversed output P_1(P_2)=A-(A-B)/4 n_1(n_2)=B+(A-B)/4 A = Maximum pressure H_1(H_2)= (A-B)/2 H_1(H_2)= (A-B)/2 B = Minimum pressure If setting is not necessary press the UP and DOWN buttons simultaneously for 1 second or longer. -37No.PS-OMY0007-A [F 6] Fine adjustment of display value This function is to manually perform a fine adjustment of the displayed pressure value.

Precision Regulator

2) 1 1 23 O-ring NBR JISB2401P16 Note 2) JISB2401P16 Note 2) 2 2 24 Seal (A) NBR P36203015 1 P36203015 1 25 Seal (B) NBR P36203016 3 P36203016 3 26 Fixed throttle Stainless steel P36203017 P36202018 1 1 1 1 P36203017 Repair kit no.

ITV

4", x: 5/32" Inch size (1) Weight 100 g or less (without options) Note 1) Indicates the weight of a single unit.

Vacuum System Peripherals:

Series M3, M5, R 1/8 A hose nipple that provides large holding force for tubing.

mlu

BBA2: D-A7/A8/F7/J7 The above stainless steel screw kit is used for auto switch D-F7BAL and D-F7BAVL when it is shipped mounted on a cylinder. Also, BBA2 is included when a auto switch alone is shipped. 3 Plate Cylinder with Lock Series MLU Construction !4 !7 !0 !4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

Precision Regulator Series IR1000/2000/3000

Note) Seal (A) 13 NBR 1 1 P36203015 P36203015 Seal (B) 14 NBR 3 3 P36203016 P36203016 Fixed throttle 15 Stainless steel P36202018 1 1 1 P36202018 1 1 P36203017 P36202018 P36203017 Repair kit no.

IO-Link/ELECTRO-PNEUMATIC REGULATOR

Default: Gain 9 Bit Bit 3, 2, 1, 0 Value Bit 3 2 1 0 Setting 0 0 0 0 Gain 0 0 0 0 1 Gain 1 0 0 1 0 Gain 2 0 0 1 1 Gain 3 0 1 0 0 Gain 4 0 1 0 1 Gain 5 0 1 1 0 Gain 6 0 1 1 1 Gain 7 1 0 0 0 Gain 8 1 0 0 1 Gain 9 * 1 0 1 0 Gain A 1 0 1 1 Gain B 1 1 0 0 Gain C 1 1 0 1 Gain D 1 1 1 0 Gain E 1 1 1 1 Gain F * indicates the initial shipping value. 16 - Parameter index 0x43 Parameter name Sensitivity

Standby E/P Regulator (Air Management System/ELECTRO-PNEUMATIC REGULATOR)

Default: Gain 9 Bit Bit 3, 2, 1, 0 Value Bit 3 2 1 0 Setting 0 0 0 0 Gain 0 0 0 0 1 Gain 1 0 0 1 0 Gain 2 0 0 1 1 Gain 3 0 1 0 0 Gain 4 0 1 0 1 Gain 5 0 1 1 0 Gain 6 0 1 1 1 Gain 7 1 0 0 0 Gain 8 1 0 0 1 Gain 9 * 1 0 1 0 Gain A 1 0 1 1 Gain B 1 1 0 0 Gain C 1 1 0 1 Gain D 1 1 1 0 Gain E 1 1 1 1 Gain F * indicates the initial shipping value. 16 - Parameter index 0x43 Parameter name Sensitivity

20

Supply pressure [MPa] Features 1 SMC helps you work toward a revolutionized production system with a focus on saving-energy.

ITV

Brown Blue White Black 3: (Blue) 1: (Brown) 2: (White) 4: (Black) Note) Body RESET Current signal type Voltage signal type Preset input type Power supply Input signal GND(COMMON) Monitor output 1 2 3 4 1 2 3 4 Power supply Input signal 1 GND(COMMON) Input signal 2 Brown Brown White White Blue Blue Black Black Note) A right angle type cable is also available.

•

Millirrfeter size 1{1' Q I1'SiZeJ' , 0.6' r'~ '" 0Ur 0~ '2. , ~1/4' a!;'16" 03/4" 'ol/2~ AsP330F'!U R(PT)1/8 M5 X 0.8 J\SP. 4;JOF~02 R(PT)I /4 Rc(PD1 /8 IIS'P530F:03 R(PT)318 Rc(PT)lIS 'ASi"!)30l"'lJ4 " R(PT)1!2 Rc(PT)1I4 ASP;l3OF:,FO~ RIPT)114 G(PF)1I8 I\Sps:ioFf;03' R(PT)318 G(PF)118 ),I'SPsJOF;;04: R(PT)1 /2 G{PF)1/4 A~P33!1F" 'l Il1 NPT1 /8 10-32UNF ,~Sp430FNO,?

IR1000/2000/3000

Therefore, operate with a silencer (SMC Series AN) mounted on the exhaust port (EXH port). The connection is Rc(PT) 1/2. Precautions for IR100 only Warning 1. When remounting the valve guide after removing it for maintenance, use a tightening torque of no more than 0.6Nm (6kgfcm).