Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment Valve:

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N02 (NPT1/4), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F02 (G1/4), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Structure: IP40, Lead Wire: With lead wire with connector (2 m), Handling Instructions: With Instruction Manual (Japanese and English), Calibration Certificate included: With Calibration Certificate, Flow rate control valve: None, Custom-made Specifications: None, Rating Flow Range(L/min): 2 to 100 (50), Accessory: None, Option: None, Analog Current Output(mA): None

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: G1/4, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: -, Option: -

5 Port Solenoid Valve Series SY3000/5000/7000/9000

With External Pilot Specifications One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" (Pitch) P = 24 22.2 24.3 R R 4 A 4 A 4 A 4 A 3/5 3/5 4 A 4 A R R 18.8 18.8 4 A 4 A 4 A 4 A 3/5 3/5 18 4 A 4 A 63.3 39.3 39.3 40.1 79.8 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] One-touch fitting [4(A), 2(B) port] Applicable tubing O.D. :

5-Port Solenoid Valve

ported) (Fitting for the type with P/E ports on the U and/or D sides) ( ) C6: 3.6 N7: 7.4 M5 x 0.8 [4(A), 2(B) port] One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 2 : 3.2, 1/8" : 4, 5/32" : 6, 1/4" Connector Connecting Base (Station n) (Station 1)--D-sub, Flat Ribbon ( ) C6: 77.3 N7: 81.1 P 1 P 1 (73.8) Terminal Block 3/5 E 3/5 E B 2 B B 2 B 2 B 2 2 Lead Wire A 4 A 4 A 4 A

5 Port Solenoid Valve Series SV1000/2000/3000/4000

With External Pilot Specifications 46.5 (Pitch) Ground terminal 15.8 9.5 16.5 17.5 P=16 20.5 2 x M12 11.9 9.2 SJ 17.7 25.2 3 3 30.6 4 A 4 A 4 A 4 A 4 A 3 3 3/5 E PWR 4 A 4 A 4 A 4 A 4 A T 49.9 E 3/5 3/5 E PWR 42.7 T 2 2 E 3/5 63.5 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 1 1 1 1 P 1 1 P SY BUS 0 P 1 1 P BUS 0 0 0 PE PE X X One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4,

Series SV

With external pilot specification (Pitch) P = 16 23.5 17.5 18.8 9.5 12.5 15.9 31.5 34.6 53.9 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A E 3/5 E 3/5 E 3/5 E 3/5 67.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 P 1 P 1 P 1 PE X PE x One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, N3 6, N7 8, N9 One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.: 4 N3 One-touch fitting

1

U and/or D sides) ( ) C6: 3.6 N7: 7.4 M5 x 0.8 [4(A), 2(B) port] One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 2 : 3.2, 1/8" : 4, 5/32" : 6, 1/4" (Station n) (Station 1)--( ) C6: 77.3 N7: 81.1 P 1 P 1 (73.8) 3/5 E 3/5 E B 2 B B 2 B 2 B 2 2 A 4 A 4 A 4 A 4 A 4 Note 1) These figures show the SS5Y3-12F2-05D.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(Pitch) P = 24 22.2 24.3 With External Pilot Specifications 1118.3 18.8 39.3 18 18.8 39.3 40.1 R R 3/5 3/5 4 A 4 A 4 A 3/5 4 A 4 A 4 A R R 3/5 4 A 4 A 4 A 4 A 4 A 4 A 63.3 79.8 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C6: 6 (SMC) N7: 1/4" (SMC) [Communication connector D-sub] (76.8) (External pilot specifications) BUS OUT BUS P 1 P 1 P 1 2 B 2 B 2 B 2 B 2 B 2 B 2 B 82.7 76.7 76.7 63.8 (60.3) BUS IN 11.6 13.5 37.6 36.1 4 A 4 A 4 A 4 A E 4 A 4 A A PWR 3/5 E E 3/5 3/5 PWR 12 53.2 (10) (Pitch) P = 20.5 21.2 53.2 (14.7) One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

SV

With External Pilot Specifications 46.5 (Pitch) Ground terminal 2-M12 15.8 9.5 16.5 20.5 17.5 P = 16 11.9 9.2 17.7 25.2 30.6 3 3 4 A 4 A 4 A 4 A 4 A 3 3 T 3/5 E PWR 49.9 42.7 4 A 4 A 4 A 4 A 4 A T E 3/5 3/5 E PWR 2 2 E 3/5 63.5 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 1 1 1 1 P 1 1 P BUS 4632 P 1 1 P BUS 4632 4632 4632 PE PE X X One-touch fitting [4(A), 2(B) port] Applicable tubing O.D

4/5 Port Solenoid Valve

) 1 (P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

5 Port Solenoid Valve

External pilot port] (Fitting for the type with P/E ports on U and/or D sides) (15.3) Applicable tube O.D.: 4, 5/32" (Slide locking manual override) 7.4 BUS OUT C6: 77.3 N7: 81.1 ( ) P 1 P 1 (73.8) 76.7 68.8 63.1 BUS IN 56.6 (73.2) 58.5 5.3 E 3/5 3/5 E B 13.6 2 B 2 B 2 B 2 B 2 PWR PE 4 A 4 A 4 A 4 A 4 A X B A B A 3/5E A 4 A 4 (For DIN rail mounting) 7.5 11.8 1P B 2 2 [Communication connector

0.4

External pilot port] (Fitting for the type with P/E ports on U and/or D sides) (15.3) Applicable tube O.D.: 4, 5/32" (Slide locking manual override) 7.4 BUS OUT C6: 77.3 N7: 81.1 ( ) P 1 P 1 (73.8) 76.7 68.8 63.1 BUS IN 56.6 (73.2) 58.5 5.3 E 3/5 3/5 E B 13.6 2 B 2 B 2 B 2 B 2 PWR PE 4 A 4 A 4 A 4 A 4 A X B A B A 3/5E A 4 A 4 (For DIN rail mounting) 7.5 11.8 1P B 2 2 [Communication connector

SX

141.1 99.2 99.2 19 42.9 (Lead wire length) 19 42.9 Polarity indication 13.6 13.6 A B A B B A A COM B + A B A B A B A Manual override (Push and turn for locking type) 42 31.4 Manual override (Press and turn for the locking type) 42 31.4 84.9 B: Green A: Orange 2-4.2 84.9 B: Green A: Orange 2-4.2 2-One-touch fittings (Mounting holes for manifold) (A, B port) (A, B port) 2-One-touch fittings