42

8" PE. port 18 18 17.2 PE 41.7 R2 R1 5 P 1 3 SMC 1/2" 1(P), 5(R1), 3(R2) port 106.5 1/8" External pilot port 178.5 (3-position) 3.5 10.7 164.4 (Double) 96.2 155.4 (Single) M5 x 0.8 Ground screw 71.7 62.5 106 58.2 49.7 9 9 U side 27 12 X n 4 A 2 B 8 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port 4 A 2 B A A B A B A B A B A B A SMC SMC SMC SMC SMC SMC SMC 7 A A A A A A A B B B 4

SYJ300/500/700

Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (

3 Port Air Operated Valve Series SYJA300

Type 41 Applicable solenoid valve SYJ514SYJ514MSYJ524SYJ524MHow to Order SS3YJ5 41 05 C6 R port 1/8 Stations P, R port thread type A port size 02 : 20 P port 1/8 2 stations : 20 stations A A M5 01 C4 C6 N3 N7 M5 x 0.8 1/8 Nil Rc G NPT NPTF Applicable blanking plate assembly SYJ500-10-3A F N T 4 One-touch fitting 6 One-touch fitting A port M5 x 0.8, 1/8, C4, C6 5/32" One-touch fitting 1/4"

VZS

VVZS3000-4-1 VVZS2000-4 14.4 x 12 x 1.2 7.5 x 4.5 x 1.5 VVZS2000-11-n (1) Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS2000-11-1-1 (2) Assembly part no.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (7.5) DIN rail clamp screw 18 0.5 U side n 5 Manual override Manual override SY A SMC SMC SMC SMC 4 (L4) (L3) L1 SYJ 2 L2 A 3 2 A VK 2 P=16 2 A 1 VZ 2 19 Stations VT 5.5 D side 0.7 17 70 3 300 VT 43.5 10 (C4, C6) (M5) (Lead wire) VP Cover diameter 1.6 Cross section 0.34mm2 VG VP 48.5 (11) 7.5 R 3 1 P (18) 2-Rc

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

TURN 1.TURN VQZ 28 5.5 35 74.5 SMC VQD 13 2-M4 clamp screw EXH outlet M5: External pilot port 9 D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port Lead wire length: L0, 600 mm L1, 1500 mm L2, 3000 mm C8: 1 (P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 44 29.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch fitting for 3.2 C4

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1 4 3 8 VSA430 Individual EXH 1 2 VSA430 3 4 3 4 Common EXH , 1 2 3 4 How to Order 1 2 standard , 1 2 3 4 , 3 8 1 2 3 8 VSA440 3 4 Individual EXH 1 2 SA VV 4 2 0 N 1 05 Piping specifications/Side ported, bottom ported Manifold Air operated valve Series VSA 4 port valve Thread type Body size Nil Rc EXH port Symbol Size N Piping NPT NPTF PF Individual 1 Symbol Common Type 2 3 1 4 3 8 1 2

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VKF VV3QZ22-05C 1 set (C kit 5 stations manifold base) VVQZ200-10A-2 1 set (Blanking plate assembly) VQZ212-5M-C6 4 sets (N.C. type part no.)

Rubber seal 5 Port Solenoid Valve Series SYJ5000

8 1/8 1/4 1/8, C6 (One-touch fitting for 6) P, R port M5 x 0.8, Port size C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8

VZ100/300/500

1/8 1/8 1/8 1/8 C6 Base mounted For internal pilot VZ54 VV3Z5-41-1 1/4 1/4 C8 Body ported For external pilot VV3Z5-21R-1 VZ52R 2.2 0.34 0.55 2.4 0.32 0.62 1/4 1/8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VV3Z5-41R-2 1/4 1/4 1/8 1/8 C6 C8 2.2 2.0 1.6 2.1 0.35

Rubber seal 5 Port Solenoid Valve Series SYJ7000

2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type SS5YJ7-20 Body ported SYJ72 for internal pilot Type SS5YJ7-21 Type SS5YJ7-40 Base mounted Type SS5YJ7-41 SYJ74 for internal pilot Type SS5YJ7-42-C6 Type SS5YJ7-42-C8 Note)

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Rc(PT) 1/8 SY C4 (for 4) C6 (for 6) C8 (for 8) Rc(PT)1/8 Rc(PT) 1/4 Side VV3QZ25-lll VQZ2l5 VQZ200 2 to 20 2 stations:126 Additional station:38 SYJ VK C6 (for 6) C8 (for 8) C10 (for 10) Rc(PT)1/4 1(P)port Rc(PT)3/8 3(R)port Rc(PT)1/4 Side VV3QZ35-lll VQZ3l5 VQZ300 2 to 20 2 stations:209 Additional station:60 VZ VT Note 1) Threaded port style.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1.6 2.1 0.34 0.39 0.35 0.35 0.27 0.32 0.24 0.55 0.59 0.59 0.59 0.47 0.39 0.51 2.3 2.4 2.3 2.4 2.2 2.2 2.3 0.27 0.32 0.27 0.36 0.32 0.27 0.31 Body ported for internal pilot 0.59 0.62 0.54 0.66 0.56 0.54 0.59 1/8 1/4 1/8 1/4 10-SYJ72M 1/8 1/8 1/8 1/8 C6 C8 Type 10-SS3YJ7-40 Type 10-SS3YJ7-41 Base mounted for internal pilot 10-SYJ74M 1/4 1/4 Type 10-SS3YJ7-42-01 Type 10-SS3YJ7-42-C6 1/4 Type

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

per/station: 19 2 stations: 126 Addition per/station: 38 2 stations: 209 Addition per/station: 60 C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) Side Top 2 to 20 stations Rc 1/8 VV3QZ15VQZ100 VQZ115 V100 C4 (For 4) C6 (For 6) C8 (For 8) Rc 1/8 2 to 20 stations VV3QZ25VQZ200 Rc 1/4 Side VQZ25 SY SYJ 1(P) port Rc 3/8 3(R) port Rc 1/4 C6 (For 6) C8 (For 8) C10 (For 10) Rc 1/4 2 to 20 stations

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

to 12 stations 24 D side D-sub connector kit P kit Note 1) 1 to 12 stations 24 D side Flat ribbon cable connector kit 26P 20P ( ) 1 to 9 stations 18 J kit Flat ribbon cable (20P) PC wiring system compatible D side JD0 1 to 8 stations 16 Flat ribbon cable (20P) (PC wiring system compatible) D side U side D side U side D side U side LD0 (N) LU0 (N) LD1 (N) LU1 (N) LD2 (N) LU2 (N) SDF SDH

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

PA/B 3.6 (0.2) A/BR 3.24 (0.18) Rc(PT)1/8: Rc(PT) 1/4: M5: PA/B 3.42 (0.19) A/BR 3.24 (0.18) PA/B 3.6 (0.2) A/BR 3.6 (0.2) C4: C8 : C4: Valve effective area mm2 (Cv factor) Note 2) C6: C10: C6: C8: Manifold base weight W (g) Note 3) W = 65.4n + m + 128.2 W = 13n + m + 36 W = 41.2n + m + 77.6 (n: Number of SUP/EXH blocks, m: DIN rail weight) Note 1) In cases such as when many valves are operated

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold

A

0.551 3/8 1/2 1/2 3/4 3/4 1/2 D I M E N S I O N S N O N-R O TAT I N G R O D C E N T E R T R U N N I O N M O U N T I N G T Y P E NC A1KT 0 0.001 Y D TL TM R BORE (INCH) KK A AA B E EA EE G UV UM TT TD ZB LF P WF J XI BA C DD 1 2.5 1.43 7/16-20 150 (1.5) 3/4 2.02 1 1/8 2 0.3 1.26 2 4.5 1.18 1 4.75 1.71 3 5/8 2.36 1 1.1 2.89 1 1/8 3/8 1/4-28 0.551 3/8 1 3 1.84 7/16-20 1 1/8 200 (2) 3/4 2.60