Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: L (Bottom), Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: T (Panel Mount Adapter for w/o Flow Adjustment Valve)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)

(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: Back, Connecting Tube Diameter: -, Liquid contact parts material: Resin + Metal, Mounting Hole: Presence,

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: Bracket for w/o Flow Adjustment Valve: ZS-33-M

Table of Contents

Port Port size BP01 BP02 P, A, B Rc Rc , EA, EB M5 Rc 1 8 1 8 ( ): Port size P02 1 4 1 8 Sub-plate Compact: Non plug-in VFS210--(B) Sub-plate assembly part no.: VFS2000-CS-(B) (01: Rc , 02: Rc ) 1 8 1 4 01 02 S01 S02 5-bottom ported size (Refer to the below right.) 2-4.5 mounting hole Bottom ported Port Size Port Port size S01 S02 EA, EB Rc Rc P, A, B Rc Rc 1 8 1 4 1 8 1 8 1 (Center) Bottom

Micro Mechanical Valve Series VM1000

OFF 45 Max. 6 ON 44 Symbol 3 port 24.5 38 (A) 2 (A) 2 12 12 1 (P) (78.5) 50.5 14.5 3 1.5 1.5 28 5 port (A) 2 (A) 2 12 12 3 (R) 3 (R) 1 (P) 14.5 47.8 37.2 17 R port (5 port only) 3 x 1/8 44 * 0.5 MPa supply F .O.F .* 20 N T.T. 45 6 A Series VM100 Series VM100/Side Ported With bracket VM120-01-A-B VM130-01-A-B VM121-01-A-B VM131-01-A-B With bottom mounting thread VM120U-01-A VM130U-01-A VM121U

ZP

Dimensions: Without Buffer ZPX H40 50 B8 B10 01 ZPX H63 80 B10 B12 01 ZPX H100 125 B10 B12 01 C 1/8 (Rc, NPT, NPTF) G 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) Width across flat 21 (Hexagon) C 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 45 4 x M4 x 8 F 70 4 x M5 x 10 3 x M3 x 8 E D Y C A B A B A B Dimensions Dimensions Dimensions Model A 63 63 80 80 B 65 65 82 82 C 14.5

ZP

Dimensions: Without Buffer ZPX H40 50 B8 B10 01 ZPX H63 80 B10 B12 01 ZPX H100 125 B10 B12 01 C 1/8 (Rc, NPT, NPTF) G 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) Width across flat 21 (Hexagon) C 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 45 4 x M4 x 8 F 70 4 x M5 x 10 3 x M3 x 8 E D Y C A B A B A B Dimensions Dimensions Dimensions Model A 63 63 80 80 B 65 65 82 82 C 14.5

1

OFF 45 Max. 6 ON 44 Symbol 2 port 24.5 38 (A) 2 (A) 2 12 12 1 (P) (78.5) 50.5 14.5 3 1.5 1.5 28 3 port (A) 2 (A) 2 12 12 3 (R) 3 (R) 1 (P) 14.5 47.8 37.2 17 R port (5 port only) 3 x 1/8 44 * 0.5 MPa supply F.O.F.* 20 N T.T. 45 INDEX 330 Series VM100 Series VM100/Side Ported With bracket VM120-01-A-B VM130-01-A-B VM121-01-A-B VM131-01-A-B With bottom mounting thread VM120U-01-A VM130U-01-A

ZP

Dimensions: Without Buffer ZPX H40 50 B8 B10 01 ZPX H63 80 B10 B12 01 ZPX H100 125 B10 B12 01 C 1/8 (Rc, NPT, NPTF) G 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) Width across flat 21 (Hexagon) C 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 45 4 x M4 x 8 F 70 4 x M5 x 10 3 x M3 x 8 E D Y C A B A B A B Dimensions Dimensions Dimensions Model A 63 63 80 80 B 65 65 82 82 C 14.5

2

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS221F-01-01(S)A 1/8" 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-03(S)A 5/32" 8.2 AS221F-01-07(S)A 1/4" 11.2 20.8 27.9 10 (9) AS221F-01-09(S)A 5/16" 13.2 22.4 29.5 14.2 11 (10) AS221F-02-01(S)A 1/8" 1/8 13 (12.7) 7.2 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-

VM

fitting 1(P): Male thread 2(A): One-touch fitting 1(P): One-touch fitting 2(A): Male thread 1(P): Male thread 2(A): Male thread 2(A) 2(A) 2(A) 2(A) Applicable tubing O.D.

Vacuum Pad

Dimensions: Without Buffer ZPX H40 50 B8 B10 01 ZPX H63 80 B10 B12 01 ZPX H100 125 B10 B12 01 C 1/8 (Rc, NPT, NPTF) G 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) Width across flat 21 (Hexagon) C 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 45 4 x M4 x 8 F 70 4 x M5 x 10 3 x M3 x 8 E D Y C A B A B A B Dimensions Dimensions Dimensions Model A 63 63 80 80 B 65 65 82 82 C 14.5

Vacuum Pad

Dimensions: Without Buffer ZPX H40 50 B8 B10 01 ZPX H63 80 B10 B12 01 ZPX H100 125 B10 B12 01 C 1/8 (Rc, NPT, NPTF) G 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) Width across flat 21 (Hexagon) C 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 45 4 x M4 x 8 F 70 4 x M5 x 10 3 x M3 x 8 E D Y C A B A B A B Dimensions Dimensions Dimensions Model A 63 63 80 80 B 65 65 82 82 C 14.5