Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)]

Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 50～Less than 100, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: [One-Touch Couplings] One-Touch Couplings (Straight), Plumbing Thread Type: -, Plumbing Thread Nominal: -, Pressure Resistance(MPa): 1,

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

SS5Z3-60PD2-05U-P.1 set (manifold part number) SZ3160-5LOZ-C6 . 2 sets (single solenoid part number) SZ3260-5LOZ-C6 . 3 sets (double solenoid part number) The symbol indicates built-in.

SZ3000

U side D side Stations3 2 1 Serial unit (D side mounting) 1-3-32 33 Cassette Type Manifold Serial Transmission Type Series SZ3000 How to Order Solenoid Valves SZ3 5LOZ 1 C6 60 Type of actuation A, B port size 2 position single solenoid C4: One-touch fitting for 4 C6: One-touch fitting for 6 (A) 4 (B) 2 1 SV 5 (EA) 1 (P) 3 (EB) A 4 Switch specifications Manual override SZ 2 position double

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Fittings & Tubing Air Cylinders Rotary Actuators 5 1 C6 LOZ 60 10 SZ3 Clean series CE-compliant CE-compliant Nil Q Actuation type 2 position single solenoid A, B port size (A)4 2(B) 1 C4: 4 One-touch fitting C6: 6 One-touch fitting N3: 5/32" One-touch fitting N7: 1/4" One-touch fitting 1 (P) (EA)5 3(EB) Rated voltage Switch 2 position double solenoid 5 6 24 VDC Nil: Without switch 2(B) (

Table of Contents

HYS Indicator light SE1(L)-18/-19 I Z Brown DC (+) Lead wire 0.2 to 0.33 mm2 Max. coating O.D. 1.7 mm Black OUT1 Socket LED Red Hook White OUT2 1 k Connector DC polarity indicator SE1(L)--16/-17 I Z Blue DC () With pressure setting trimmer 1 (SET 1), OUT 1 (Black lead wire, Red LED) can be set.

MY1

15 M10 x 1.5 8.6 170 85 64 12 M6 x 1 45 30.5 MY1B40 63 2 M6 x 1 13 61.5 75 (mm) PC PD T VV XX YH YW Z ZZ P PA PB Q PP QW QQ RR SS TT UU WW Model Rc 1/8 60 30 206 12 42 16 16 6 14.5 15 12.5 MY1B25 55 6 10 16 28 38.5 46 220 Rc 1/16 Rc 1/8 80 35 264 17 51 16 23 4 16 16 16 MY1B32 70 10 10 19 32 48 55 280 Rc 1/16 Rc 1/4 100 40 322 18.5 59 24 27 10.5 20 22 19.5 MY1B40 23 36 340 14 67 Rc 1/8 60.5

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: w/o Lead Wire w/Connector, Option: -

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.

Compact Manifold Regulator

A R 04 Z A q w e r u t y N Common Supply Type 1.

ZSE40/ISE40

female threads) ZSM Rc 1/8 Reverse pressure two directions B R 1/8, NPT 1/8 PF2 M5 x 0.8 female threads Panel mount (ZS-22-A) Rc 1/8 IF Data E M5: M5 x 0.8 (Female threads) C4: With 4 One-touch fitting C6: With 6 One-touch fitting Wall mount Wall mount Panel mount + Front protective cover (ZS-24-C) M5 x 0.8 F 4, 6 One-touch fitting Option When optional parts only are required, order

PSxx-OMM0006CN

(M8(3 )11 ) 01 X M ISE40A 2 K ISE40A -0.11.000 MPa ZSE40A 0.0-101.3 kPa ZSE40AF -100.0100 kPa 1 01 R1/8 (M5) A A N01 NPT1/8 (M5) W1 Rc1/8 B B WF1 G1/81 D D M5 M5X0.8 () E C4 4 C6 6 F + 1IS0228-1 P10/1 X NPN2() Y PNP2() 1 R NPN2 +/ T PNP2 +/ M SI2 P (psi)1 S NPN2 +/ 1 2kPaMPa V PNP2 +/ -9No.PS-OMM0006CN-E /1 1 01 N01 W1 WF1 M5 C4 C6 A A ZS-24-A X X X B B ZS-24-B X X X X X D

CRB2/CRBU2/CRB1

(mm) Q1 = M Q1 = M Size Q1 = M Q1 = M 50 63 80 100 (mm) Shaft type Size K T K T K T K T L1 = L1 = 50 63 80 100 Thread L1 = Shaft type M5 x 0.8 L1 = J X Z J X Z J X Z J X Z 4.2 4.2 4.2 4.2 Thread M6 x 1 M5 x 0.8 5 5 5 5 4.2 4.2 4.2 4.2 M8 x 1.25 M6 x 1 6.8 6.8 L1 5 5 5 Q1 Q1 L1 M10 x 1.5 J axis Z axis Q1 Q1 M8 x 1.25 8.6 6.8 L1 L1 K axis T axis 81 Series CRB1 (Sizes: 50, 63, 80, 100)

Compact manifold regulator ARM5 Series

Size 4 6 5/32 1/4 Size 6 8 1/4 5/16 Symbol C4 C6 N3 N7 Symbol C6 C8 N7 N9 Straight type Elbow type Straight type Elbow type V R W X S T Y U One-touch fittings for regulator block One-touch fittings for centralized supply block Fitting size Elbow W Elbow X Elbow Y Straight V Fitting size Elbow S Elbow T Elbow U Straight R 4, 5/32 2.5 6 11 35.5 4, 5/32 6 3 6.5 11 36 6 3 12.5 19 35.5 1/4 6.5