42

SZ VF VQ5150 VQ5151 (A) 4 (B) 2 (A) 4 (B) 2 VP4 VQ 1/2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 4/5 VQ 4/5 q w e q w VQC 1/2 VQC 4/5 VQZ SQ (A) 4 (B) 2 VQ5251 VQ5250 (A) 4 (B) 2 VFS 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VFR r e q w e r q w VQ7 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P)

Vacuum System Peripherals:

Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage (2 W DC) type and long period energized type available.

VFR

1, Metal joint q, w End plate (D) !2, Connection bracket q, w, Gasket e, r, O-ring y, u End plate (D) !2, Connection bracket q, w, Gasket e, t, O-ring y, u Non plug-in type Plug-in type VVF4000-3A-2 !

SZ3000

SZ3B60 [N.C. valve x 2 pcs.] 4(A) 2(B) r t !0 !1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Effective area (Cv) (1) 0.8MPa 0.15MPa 5 to 50C 18mm2 (1.0) 180 c.p.m SUP side pressure (P1) To CYL port Note 1) As per JISB8375-1981 (Supply pressure: 0.5MPa) Max. operating frequency Dimensions 17.5 37.5 (1.5) Valve Manifold 25 45 4 4 4 2 2 2 A A A 4 B B B 2 A 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting ass'y for 6 C8: One-touch fitting ass'y for 8 B 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch

SYJ300/500/700

SYJ72R is only for manifold use. 4-4-38 39 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ700 Construction q e r t w y q e r t w y N.C. N.O. (A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) i i V100 3 (R) 1 (P) 3 (R) 1 (P) SY u u SYJ VK Component Parts Replacement Parts VZ No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Inch 1(P), 3/5(R) port: 5/16" 4(A), 2(B) port: 5/32", 1/4" Weight W (g) Note 2) Made to Order Made to Order (For details, refer to page 411.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

How to Order Manifold Assemblies (Example) Example (OMRON Corporation compatible serial unit) Double solenoid (24VDC) SZ3260-5LOZ-C6 (3 sets) Single solenoid (24VDC) SZ3160-5LOZ-C6 (2 sets) Supply/Exhaust block assembly SS5Z3-60SRID-05U-C6 . 1 set (manifold part number) SZ3160-5LOZ-C6. 2 sets (single solenoid part number) SZ3260-5LOZ-C6. 3 sets (double solenoid part number) (U side mounting

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

P. 2-3-44 P. 2-3-46 P. 2-3-47 P. 2-3-48 C6 L6 P R D side SMC AN200 U side Individual EXH spacer SSQ1000-R-3Special wiring specifications (-K) Back pressure check valve (-B) SSQ1000-BP Built-in silencer (-S) P. 2-3-49 P. 2-3-45 P. 2-3-46 P. 2-3-47 C6 L6 D-sub connector Terminal no.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Manifold base) SYJ512-5LZ-M5 .2 pcs. (Valve) SYJ500-10-1A .1 pc. (Blank plate ass'y) VQ SS3YJ5-41R-03-C6 .1 pc. (Manifold base) SYJ514R-5G .2 pcs. (Valve) SYJ500-10-3A . 1 pc.

VQC

Blanking plate VVQ1000-10A-1 Individual SUP spacer VVQ1000-P-1-C6 SUP shutoff position: Specify 2 positions. Individual EXH spacer VVQ1000-R-1-C6 EXH shutoff position: Specify 2 positions.

VZS

fitting Applicable tubing O.D.: 6 C6 2 stations are needed to mount control unit.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Component Parts SY w Description Material N.C. Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

C6 1/8 Note) The values are for individually operated 2 position type manifold bases.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For connector cable of M8 connector, refer to page 90. 49 Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 t q r w 5 (R1) 3 (R2)

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

PF2M7 10 C6 L M q w r t y u i e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min w Flow adjustment valve/Piping entry direction With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02, N1, N2, F1, F2 Straight Symbol Port size Rated flow

Rubber seal 5 Port Solenoid Valve Series SYJ5000

For connector cable of M8 connector, refer to page 90. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t rw 5 (R1) 3 (R2) 1

VCC

How to Order Manifold VV CC1 M 06 10 C4 G04 q w e r t This How to Order is that of the example below. w 2 port valve mountable number Note 1) r Pilot port fitting size q Type (Passage number) 2 3 M 4 One-touch fitting 6 One-touch fitting C4 C6 2 port valve 3 port valve 2/3 port valves mixed mounting 00 02 04 Without 2 port valve 2 pcs. (colors) 4 pcs. (colors) 40 40 pcs.