Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

CLK1

Hs 33 37.5 43 43 n-2 2 D-H7, D-H7W D-H7F 15 + 45 ( ) (n = 2, 4, 6...) A B 3 5.5 7 7 15 60 65 + 45 (n-2) D-H7, D-H7W D-H7F 30.5 28.5 30 30 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) Approx. Hs 30.5 35 40.5 47.5 D-H7C 15 65 10 65 + 50 (n-2) A B Approx. Hs 3 5.5 7 7 n-2 2 D-H7C 31.5 28.5 30 30 15 + 50 ( ) (n = 2, 4, 6...)

Clamp Cylinder with Lock Series CLK1

Hs 33 37.5 43 43 n-2 2 D-H7, D-H7W D-H7F 15 + 45 ( ) (n = 2, 4, 6...) A B 3 5.5 7 7 15 60 65 + 45 (n-2) D-H7, D-H7W D-H7F 30.5 28.5 30 30 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) Approx. Hs 30.5 35 40.5 47.5 D-H7C 15 65 10 65 + 50 (n-2) A B Approx. Hs 3 5.5 7 7 n-2 2 D-H7C 31.5 28.5 30 30 15 + 50 ( ) (n = 2, 4, 6...)

SGC200-OMJ0004

4) 4) , , , , 1)-10-20 2) 1) 1) 1) 1) 50mm 2/s 2) 2) 2) 2) 3) 3) 3) 3) 4) 5), 6) 4 SGC200*-OMJ0004-A SGC/SGH Series SGC/SGH Series SGC/SGH Series SGC/SGH Series 2 2 2 2 / / / / Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 Rc1/2 2830 Rc3/4 4550 Rc1 6570 , , , , 1.5~2 1) 2) 3) 2 5 SGC200*-OMJ0004-A SGC/SGH Series SGC/SGH Series SGC/SGH Series SGC/SGH Series 2 2 2 2 / / / / 30 1 1) 2)1 0.1MPa

CY1

2 @7 #2 r @8 u o y t @1 @2 @5 @4 @3 CY1HT32 @6 Material Note Parts list Material Note Parts list Qty. 1 2 1 2 2 1 5 5 4 4 1 2 2 1 2 2 2 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Qty. 2 2 2 2 1 4 2(4) 2 4 2 2 4(2) 1 2 4 2 Description Body Plate Cylinder tube Piston Piston nut Shaft Piston side yoke External slider side yoke Magnet A Magnet B External slider tube Spacer Space ring Slide

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

2!6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Basic Type/Direct Mount Type

2 2 3 3 3 5 5 5 CR 0.5 0.5 0.5 1 1 1.5 2 2 3 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 Model CY3R6 CY3R10 CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 CY3R50 CY3R63 L 34 38 53 62 70 76 90 110 118 W 20 20 25 40 40 50 60 60 70 WS 6 8 7 7 7 7 7 10 10 X 10 15 18 22 28 35 40 50 60 LD 3.5 3.5 4.3 5.4 5.4 7 7 8.6 8.6 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79 93 113 121 M 3.5 4 5 5 6 7 8

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover]

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/Flow Adjustment Valve

Profile Design ISO/VDMA Air Cylinder Series CP95

Piping length [m] Air consumption Q [Nl/min.] 4 3 100 cylinder [mm] 40 50 63 80 2 2 100 100 Stroke [mm] Air consumption Q [Nl/min.]

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment Valve

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment Valve

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

Table of Contents

2 2 2 2 4 2 2 1 1 6 2 No. !

REA/REB

axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates Magnetic disks Ceramic products

REA/REB

precision guide type (Single axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates

REA/REB

2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.