PFxx-OMJ0005CN

min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/

Title not found

I N I n / N l / . \ I n i r N l a / N l ^ l : , ! . : ' : ) ' , + . .

Series SV

M12 52 l M12 M12 48 6 6 32.3 28.3 16 M12 31.3 31.3 l 14.9 Terminal no.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

() Blue DC () When used as an IO-Link device Brown L + L + Black C/Q Main circuit C/Q IO-Link master Gray NC White NC Blue L L 19 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20 Series Dimensions ZSE20(F) ISE20 ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Made to Order Piping specification M5 For 20 25

CL

(mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

VS 8-2/VS 8-4

kit with 0.6 m lead wire L kit with 1.5 m lead wire Lead wire housing assembly 16 L kit with 3.0 m lead wire M kit, 26 pins Circular connector housing assembly 17 32 Series VS 8-2/VS 8-4 S R S R Manifold Component Part No. !

NCA1

1 1 1 1-3/8 1-3/8 1-3/4 2 2-1/2 Only necessary for Item No 13, 15 and 26A S T Y L E Single Rod W Double Rod O P T I O N S ( I F A P P L I C A B L E ) XB5 _ For information on Bore Size, Rod and Rod Thread , please see How To Order Series NCA1 Replacement Parts.

C95

Centre Trunnion T Flange F Mounting at the back Mounting at the front Rear single clevis C Rear double clevis D Bore (mm) Z E1 R W MF ZF FB CD EB L XD UB CB EW MR TR AO AT XA SA AH AB L1 TL TD TM UW TF UF E2 48 55 68 80 100 120 32 36 45 50 63 75 16 20 25 25 30 35 10 10 12 12 16 16 130 145 155 170 190 205 7 9 9 9 12 14 10 12 12 16 16 20 65 75 80 90 110 140 12 15 15 20 20 25 142 160 170 190

Rotary Table/

tubing and steel piping P l = Operating pressure [MPa] O.

CRQ2

L (Example) F9BL 5m .

NCX2 seies

I ffi f l * l l+l {_l l@tt L-I a Noler Thls diagfam is for D A7 or D,A8 type ( ) with D-F7 or D-J7lype.

Title not found

Current output 4~20mA2.5% F.S. or less Repeatability 0.2% F.S. 2digit or less 0.2% F.S. 1digit or less response time 2.5ms or less (With anti-chattering function:20ms, 160ms and 640ms selection) Hysteresis Hysteresis mode and window comparator mode selection Port size R1/8 (with M5 female) Enclosure IP40 43 Vacuum Regulator Series IRV 60 l/min (ANR) Note) 100 l/min (ANR) Note) 150 l/min (

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

B P_1 or n_1 H_1 P_1=A(AB)/4 n_1=B+(AB)/4 H_1=(AB)/2 Released Workpiece 1 Workpiece 2 Workpiece n Atmosphere B Display value fine adjustment function (F6) Fine adjustment of the indicated value of the pressure sensor can be made within the range of 5% of the read value. (This eliminates wide variations of the indicated value.) 5% R.D.

PSxx-OMG0001CN

kPa MPa(500 kPa kPa) ZS-28-A 2 m ZS-28-B (M35 L 2 ) ZS-28-C 1 ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-27-01 1 -8No.PS-OMG0001CN-H LCD OUT1 OUT2 UP SET DOWN (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 (UP)ON/OFF (DOWN)ON/OFF (SET) -9No.PS-OMG0001CN-H M3X5 L(2) 0.50.7 Nm M35L ZS-28-B M35L M38 L(2 ) M38L ZS-27-01 ZS-27-C 90 2 -10No.PS-OMG0001CN-H 1 a a1DIN b (b -

NCA1

XA+ Stroke A P + Stroke 2-EE KK MM B AH AT LF + Stroke WF S AB E AO SA + Stroke AO Bore Size (in) MM KK A AB AH AO AT B E EE LF+ P+ S SA+ WF XA+ 500 (5") 1.000 3/4-16 1.13 .63 2.75 .63 .19 1.500 5.50 1/2 NPT 4.50 2.88 4.25 7.88 1.38 7.25 600 (6") 1.375 1-14 1.63 .75 3.25 .63 .19 2.000 6.50 3/4 NPT 5.00 3.13 5.25 8.50 1.63 8.00 800 (8") 1.375 1-14 1.63 .75 4.25 .69 .25 2.000 8.50 3/4 NPT

5 Port Solenoid Valve Series SY3000/5000/7000/9000

D A L Series Part no.

Electric Actuator/Slider Type

Table Displacement (Reference Value) W L 0.08 LEFS32 (L = 30 mm) 0.06 Displacement [mm] LEFS25 (L = 25 mm) 0.04 LEFS16 (L = 20 mm) LEFS40 (L = 37 mm) 0.02 0 0 22.5 [100] 44.9 [200] 67.4 [300] 89.9 [400] 112.4 [500] Load W lbf [N] Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Cable length (L) [m] (30.7) (16.6) (23.7) Connector A1 (10.5) 1 1.5 3 3 5 5 8 8 (7.0) (12.7) (10.2) (5.6) Connector C (14.2) (6.7) (5.7) Connector A2 3 2 1 (Terminal no.) 1 3 2 4 1 4 A 10 (13.5) AB 1 3 B 15 1 2 (18) C 20 AB 15 16 Produced upon receipt of order (14.7) (30.7) (1 1) L (10) Connector B Connector D With lock and sensor Connector A1 terminal no. 1 2 3 Connector C terminal no.

SV

32.3 28.3 16 M12 31.3 31.3 l 14.9 Terminal no.